ResearchPublications
Development of a Humidity Sensor Element based on sputter-deposited Thin ZnO-Layers

Development of a Humidity Sensor Element based on sputter-deposited Thin ZnO-Layers

Categories Konferenz (reviewed)
Year 2016
Authors Klaas D, Rein M, Wurz MC, Rissing L
Published In 3rd International Conference on System-integrated Intelligence: New Challenges for Product and Production Engineering, SysInt 2016, Procedia Technology 26, pp. 27-34
DOI 10.1016/j.protcy.2016.08.005
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