ResearchPublications
Stress Reduction in sputtered thin NiFe 81/19 layers for Magnetic Field Sensor

Stress Reduction in sputtered thin NiFe 81/19 layers for Magnetic Field Sensor

Categories Konferenz (reviewed)
Year 2016
Authors Jogschies L, Rittinger J,Klaas D, Wurz MC
Published In 3rd International Conference on System-integrated Intelligence: New Challenges for Product and Production Engineering, SysInt 2016, Procedia Technology 26, pp. 162-168
DOI 10.1016/j.protcy.2016.08.022
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