Publications

Mikrofluidische Galvanik zur Herstellung magnetoresistiver Schichten. / Rechel, Mathias; Taptimthong, Piriya; Arndt, Matthias et al.
MikroSystemTechnik Kongress 2017 "MEMS, Mikroelektronik, Systeme", Proceedings. VDE Verlag GmbH, 2017. p. 313-316 (MikroSystemTechnik Kongress 2017 "MEMS, Mikroelektronik, Systeme", Proceedings).

Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review

Modeling and Characterization of a Bimodal Tactile Display. / Wurz, Marc Christopher; Fischer, Eike Christian; Twiefel, Jens et al.
2017. Paper presented at International Workshop on Piezoelectric Materials and Applications in Actuators, IWPMA 2017.

Research output: Contribution to conference › Paper › Research

Press hardening tool integrated thin film temperature sensor. / Dencker, Folke; Schlenkrich, A.; Wurz, Marc Christopher.
Proceedings of the 17th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2017. euspen, 2017. p. 349-350 (Proceedings of the 17th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2017).

Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review

Pulsed electron source for atmospheric pressure chemical ionization in ion mobility spectrometry. / Bunert, Erik; Heptner, Andre; Kirk, Ansgar T. et al.
2017 30th International Vacuum Nanoelectronics Conference (IVNC). ed. / Christoph Langer; Robert Lawrowski. Institute of Electrical and Electronics Engineers Inc., 2017. p. 102-103 8051563 (International Vacuum Nanoelectronics Conference).

Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review

Reaktives Ionentiefenätzen von Schattenmasken für die Sensordirektabscheidung mit einer neuartigen Beschichtungsanlage. / Klaas, Daniel; Pehrs, Florian; Wurz, Marc Christopher.
MikroSystemTechnik Kongress 2017: Proceedings. Berlin: VDE Verlag GmbH, 2017. p. 680-683.

Research output: Chapter in book/report/conference proceeding › Conference contribution › Research

Silicon field emitter arrays produced via wafer dicing. / Kusch, Alexander; Wurz, Marc; Bunert, Erik et al.
2017 30th International Vacuum Nanoelectronics Conference (IVNC). ed. / Christoph Langer; Robert Lawrowski. Institute of Electrical and Electronics Engineers Inc., 2017. p. 132-133 8051577 (International Vacuum Nanoelectronics Conference).

Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review

Comparison of ALD and IBS Al₂O₃ films for high power lasers. / Liu, Hao; Jensen, Lars; Becker, Jürgen et al.
48th Annual Laser Damage Symposium Proceedings - Laser-Induced Damage in Optical Materials 2016. SPIE, 2016. 1001421 (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 10014).

Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review

Packaging for systems in harsh environments. / Wurz, Marc Christopher; Bengsch, Sebastian.
Semiconductor Devices in Harsh Conditions. CRC Press, 2016. p. 135-147.

Research output: Chapter in book/report/conference proceeding › Contribution to book/anthology › Research › peer review

Manufacturing of micro end mills by batch processing of silicon carbide. / Denkena, Berend; Wurz, Marc; Grove, Thilo et al.
Proceedings of the 16th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2016. ed. / P. Bointon; Richard Leach; N. Southon. euspen, 2016. (Proceedings of the 16th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2016).

Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review

Normal force actuator for a tactile display using a micromechanically built spring element made of Polyimide. / Wurz, Marc; Rechel, Mathias; Twiefel, Jens et al.
ACTUATOR 2016. 2016.

Research output: Chapter in book/report/conference proceeding › Conference contribution › Research

An application report: Protective thin film layers for high temperature sensor technology. / Dencker, Folke; Wurz, Marc; Dubrovskiy, Sergey et al.
Proceedings of the 2016 IEEE North West Russia Section Young Researchers in Electrical and Electronic Engineering Conference, EIConRusNW 2016. ed. / S. Shaposhnikov. Institute of Electrical and Electronics Engineers Inc., 2016. p. 32-36 7448110.

Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review

Transmission laser bonding of low melting eutectic alloys. / Hoff, C.; Cromwell, K.; Hermsdorf, J. et al.
High-Power Laser Materials Processing: Lasers, Beam Delivery, Diagnostics, and Applications V. ed. / Stefan Kaierle; Friedhelm Dorsch. SPIE, 2016. 97410K (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 9741).

Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review

Concept development and evaluation of a hermetically sealed ceramic package. / Kusch, Alexander; Rissing, Lutz; Wurz, Marc Christopher.
2016. 413-416 Paper presented at Smart Systems Integration 2016 - 10th International Conference and Exhibition on Integration Issues of Miniaturized Systems, SSI 2016, Munich, Germany.

Research output: Contribution to conference › Paper › Research › peer review

Development and optimization of thin-film technology based micro-inductors and transformers. / Beringer, Sebastian; Dinulovic, Dragan; Haug, Martin et al.
2nd Joint ISTDM/ICSI 2019 Conference. ed. / M. A. Eriksson; M. G. Lagally. Curran Associates Inc., 2016. p. 51-58 (ECS Transactions; Vol. 75, No. 2).

Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review

Effect of annealing temperature on the coercivity and the electrical resistivity of the electroplated ni-fe-w alloy film. / Mundotiya, Brij Mohan; Rissing, Lutz; Wurz, Marc Christopher.
Magnetic Materials Processes and Devices 14. The Electrochemical Society, 2016. p. 59-65 (ECS Transactions; Vol. 75, No. 2).

Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review

Electroplating through fluidic channels as production technology for 3d interconnect devices and sensing structures. / Rechel, Mathias; Bengsch, Sebastian; Wurz, Marc Christopher.
Processing Materials of 3D Interconnects, Damascene and Electronics Packaging 8. Vol. 75 7. ed. Electrochemical Society, Inc., 2016. p. 25-32 (PROCESSING MATERIALS OF 3D INTERCONNECTS, DAMASCENE AND ELECTRONICS PACKAGING 8).

Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review

Investigation for thinning-by-dicing of sintered and unsintered ceramics. / Stompe, Manuel; Asadi, Esmail; Rissing, Lutz et al.
2016. Paper presented at 16th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2016, Nottingham, United Kingdom (UK).

Research output: Contribution to conference › Paper › Research › peer review

P8.1 - Characterization of a Read/Write Head. / Taptimthong, Piriya; Rissing, Lutz; Wurz, Marc Christopher.
2016. 769-775 Paper presented at 18. GMA/ITG-Fachtagung Sensoren und Messsysteme 2016.

Research output: Contribution to conference › Paper › Research

Präzisionsbearbeitung endkonturnaher Keramik im ungesinterten Zustand. / Wurz, Marc; Rissing, Lutz; Stompe, Manuel.
67. Ausgabe Jahrbuch Schleifen, Honen, Lippe und Polieren. Vulkan-Verlag Essen, 2016.

Research output: Chapter in book/report/conference proceeding › Contribution to book/anthology › Research

Structuring methods of plastic substrates for electroplating applications. / Bengsch, Sebastian; Rechel, Mathias; Asadi, Esmail et al.
Magnetic Materials Processes and Devices 14. ed. / C. Bonhote; G. Zangari; Y. Kitamoto; T. Osaka; H. H. Gatzen. Vol. 75 2. ed. Electrochemical Society, Inc., 2016. p. 67-73 (MAGNETIC MATERIALS PROCESSES AND DEVICES 14).

Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review

Thin-film based microtransformer suitable for high switching frequency power applications. / Dinulovic, Dragan; Shousha, Mahmoud; Haug, Martin et al.
2016. 107-112 Paper presented at 2016 International Exhibition and Conference for Power Electronics, Intelligent Motion, Renewable Energy and Energy Management, PCIM Europe 2016, Nuremberg, Germany.

Research output: Contribution to conference › Paper › Research › peer review

UltraMag: Integration ultradünner Magnetfeldsensoren in intelligenten Automatisierungskomponenten. / Remus, Hans-Jürgen; Rissing, Lutz; Janke, Ralf et al.
1. Auflage ed. Stuttgart: Steinbeis-Edition, 2016.

Research output: Book/Report › Monograph › Research › peer review

Impact of different polyimide-based substrates on the soft magnetic properties of NiFe thin films. / Rittinger, Johannes; Taptimthong, Piriya; Jogschies, Lisa et al.
Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems. SPIE, 2015. 95171R (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 9517).

Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review

A Comparative Study of Saturation Induction with Current Density of Electrodeposited Fe-Ni-W Alloys. / Mundotiya, Brij Mohan; Wurz, Marc Christopher; Rissing, Lutz.
Polymer electrolyte fuel cells 14. The Electrochemical Society, 2015. p. 75-83 (ECS Transactions; Vol. 64, No. 31).

Research output: Chapter in book/report/conference proceeding › Conference contribution › Research

Hybrid Packaging of Circuits and Devices Onto Flexible Screen Printed Electrical Interconnects. / Wurz, Marc; Akin, Meriem; Rissing, Lutz et al.
2015. Paper presented at SMTA Pan Pacific Microelectronics Symposium, United States.

Research output: Contribution to conference › Paper › Research

Design und Herstellung eines akustischen Wandlers mit einer Polymermembran. / Kaiser, Max; Rechel, Mathias; Goldmann, J. et al.
MikroSystemTechnik Kongress 2015 "MEMS, Mikroelektronik, Systeme", Proceedings. VDE Verlag GmbH, 2015. p. 606-609 (MikroSystemTechnik Kongress 2015 "MEMS, Mikroelektronik, Systeme", Proceedings).

Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review

Entwurf und Fertigung eines elektromagnetischen Normalkraftaktors in hybrider Bauform für taktile Displays. / Rechel, Mathias; Rissing, Lutz; Hofmann, Viktor et al.
MikroSystemTechnik Kongress 2015 "MEMS, Mikroelektronik, Systeme", Proceedings. VDE Verlag GmbH, 2015. p. 761-764 (MikroSystemTechnik Kongress 2015 "MEMS, Mikroelektronik, Systeme", Proceedings).

Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review

Fertigung eines Gitterelektroden-Arrays zur selektiven hyperthermischen Manipulation von Biofilmen. / Kaiser, Max; Rechel, Mathias; Stiesch-Scholz, Meike et al.
MikroSystemTechnik Kongress 2015 "MEMS, Mikroelektronik, Systeme", Proceedings. VDE Verlag GmbH, 2015. p. 824-827 (MikroSystemTechnik Kongress 2015 "MEMS, Mikroelektronik, Systeme", Proceedings).

Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review

Flexibles magnetisches Lese-/Schreibsystem: Design eines Schreibkopfes. / Taptimthong, Piriya; Rittinger, Johannes; Wurz, Marc Christopher et al.
MikroSystemTechnik Kongress 2015 "MEMS, Mikroelektronik, Systeme", Proceedings. VDE Verlag GmbH, 2015. p. 684-687 (MikroSystemTechnik Kongress 2015 "MEMS, Mikroelektronik, Systeme", Proceedings).

Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review

Hybrider Fertigungsprozess zur Integration von Drucksensoren auf die Oberfläche von Tellerfedern. / Rittinger, Johannes; Klaas, Daniel; Wurz, Marc Christopher et al.
MikroSystemTechnik Kongress 2015 "MEMS, Mikroelektronik, Systeme", Proceedings. VDE Verlag GmbH, 2015. p. 563-566 (MikroSystemTechnik Kongress 2015 "MEMS, Mikroelektronik, Systeme", Proceedings).

Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review

Neuartige Herangehensweise für eine Batchproduktion keramischer Mikrofräswerkzeuge. / Asadi, Esmail; Bouabid, Abdelhamid; Wurz, Marc et al.
Diamond Business. Vol. 3 2015. p. 12-16.

Research output: Chapter in book/report/conference proceeding › Contribution to book/anthology › Research

Smart System Integration: Moulding of Magnetic Field Sensors into AlSi9Cu3(Fe)-Alloys. / Wurz, Marc; Klaas, Daniel; Wienecke, Anja et al.
2015. Paper presented at SMTA Pan Pacific Microelectronics Symposium, United States.

Research output: Contribution to conference › Paper › Research

Studium Initiale: Übergangsmanagement und Integration beruflich Qualifizierter in das Hochschulstudium: Schlussbericht des Teilvorhabens der Gottfried Wilhelm Leibniz Universität Hannover zum Verbundprojekt Mobilitätswirtschaft: Bund-Länder-Wettbewerb: "Aufstieg durch Bildung: Offene Hochschulen": 1. Wettbewerbsrunde, erste Förderphase vom 01.10.2011-31.03.2015. / Billmann-Mahecha, Elfriede; Beyersdorf, Martin; Rissing, Lutz et al.
2015.

Research output: Book/Report › Project report/research report › Research

Verwendung von Schattenmasken zur Direktstrukturierung individuell adaptierbarer Sensorik auf technischen Oberflächen. / Klaas, Daniel; Rittinger, Johannes; Taptimthong, Piriya et al.
MikroSystemTechnik Kongress 2015 "MEMS, Mikroelektronik, Systeme", Proceedings. VDE Verlag GmbH, 2015. p. 338-341 (MikroSystemTechnik Kongress 2015 "MEMS, Mikroelektronik, Systeme", Proceedings).

Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review

Thin-film microtransformer for high frequency power applications. / Dinulovic, Dragan; Gerfer, Alexander; Opitz, Oliver et al.
JEMS 2013 – Joint European Magnetic Symposia. ed. / D. Niarchos; G. Hadjipanayis; O. Kalogirou. EDP Sciences, 2014. (EPJ Web of Conferences; Vol. 75).

Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review

Integrierte Sensorik für Hochtemperaturumgebungen. / Wurz, Marc Christopher; Wienecke, Anja; Rissing, Lutz.
GMM, VDI/VDE-IT (eds) Tagungsband: MikroSystemTechnikKongress 2013, Von Bauelementen zu Systemen. 2014. p. 555-558.

Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review

Magnetic MEMS. / Wurz, Marc; Rissing, Lutz; Belski, Alexander et al.
St. Petersburg State Polytechnical University Journal 5. 205. ed. 2014. p. 21-35.

Research output: Chapter in book/report/conference proceeding › Conference contribution › Research

Research activities in the field of electromagnetic energy harvesting micro systems. / Wurz, Marc Christopher.
Magnetic Materials, Processes, and Devices 13. 31. ed. Electrochemical Society, Inc., 2014. p. 21-31 (ECS Transactions; Vol. 64, No. 31).

Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review

Highly-integrated energy harvesting device for rotational applications utilizing quasi-static piezoelectric and electromagnetic generators. / Wurz, Marc Christopher; Kleyman, Gleb; Twiefel, Jens.
Active and Passive Smart Structures and Integrated Systems 2013. 2013. 86881L (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 8688).

Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review

High permeability flexible bulk material for magnetic micro head applications. / Belski, Alexander; Taptimthong, Piriya; Wurz, Marc Christopher et al.
JEMS 2012 – Joint European Magnetic Symposia . ed. / P. Tiberto; M. Affronte; F. Casoli; C. de Julián Fernández; G. Gubbiotti; C. Marquina; F. Pratt; M. Solzi; S. Tacchi; P. Vavassori. EDP Sciences, 2013. (EPJ Web of Conferences; Vol. 40).

Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review

Electroplating of Cu/Sn layers for hermetic encapsulation for vacuum applications. / Rissing, L.; Wurz, M. C.; Cvetkovic, S. et al.
Magnetic Materials, Processes, and Devices 12. 10. ed. Electrochemical Society, Inc., 2013. p. 207-216 (ECS Transactions; Vol. 50, No. 10).

Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review

Embossing of soft-magnetic structures and influence on magnetic properties. / Kaiser, M.; Wurz, M. C.; Cvetkovi, S. et al.
Magnetic Materials, Processes, and Devices 12. 10. ed. Electrochemical Society, Inc., 2013. p. 189-197 (ECS Transactions; Vol. 50, No. 10).

Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review

Investigation of the crystallization of NiFe81/19 depending on the annealing temperature. / Wurz, M. C.; Shaganov, A.; Rissing, L. et al.
Magnetic Materials, Processes, and Devices 12. 10. ed. Electrochemical Society, Inc., 2013. p. 147-156 (ECS Transactions; Vol. 50, No. 10).

Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review

MEMS Fabricated Microtransformer with Closed Fe-Co Magnetic Core for High Frequency Power Applications. / Wurz, Marc; Dinulovic, Dragan; Kaiser, Matthias et al.
2013. 352 Paper presented at 58th Magnetism & Magnetic Materials (MMM2013), Chicago, United States.

Research output: Contribution to conference › Paper › Research

Surface preparation for sensing the Kerr-effect on NiFe81/19 layers. / Belski, A.; Wurz, M. C.; Cvetkovic, S. et al.
Proceedings of the 12th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2012. ed. / H. Spaan; Theresa Burke; Paul Shore. euspen, 2012. p. 279-282 (Proceedings of the 12th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2012; Vol. 2).

Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review

Component-integrated sensors and communication for gentelligent devices. / Overmeyer, Ludger; Rissing, Lutz; Wurz, Marc C. et al.
IEEE International Conference on Industrial Engineering and Engineering Management, IEEM2011. 2011. p. 499-503 6117967 (IEEE International Conference on Industrial Engineering and Engineering Management).

Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review

Considerations on ultra-thin substrate-less micro and nano systems. / Gatzen, Hans H.; Griesbach, Tim; Wurz, Marc C. et al.
Nano and Micro Materials, Devices and Systems; Microsystems Integration. American Society of Mechanical Engineers(ASME), 2011. p. 447-454 (ASME 2011 International Mechanical Engineering Congress and Exposition, IMECE 2011; Vol. 11).

Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review

Redesign and fabrication of a magnetic head for gentelligent™ products. / Belski, A.; Wurz, M. C.; Rissing, L.
Proceedings of the 11th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2011. ed. / P. Shore; Henny Spaan; H. Van Brussel; Theresa Burke. euspen, 2011. p. 168-171 (Proceedings of the 11th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2011; Vol. 2).

Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review

Assembly and embedding of nanoparticles in a Ni-matrix. / Wurz, M. C.; Wagner, P.; Rissing, L. et al.
Magnetic Materials Processes and Devices 11. 34. ed. Electrochemical Society, Inc., 2010. p. 33-42 (ECS Transactions; Vol. 33, No. 34).

Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review

Process development of an electroplated permalloy layer on magnetic magnesium for gentelligent™ products. / Belski, A.; Wurz, M. C.; Rissing, L.
Magnetic Materials Processes and Devices 11. 34. ed. Electrochemical Society, Inc., 2010. p. 93-104 (ECS Transactions; Vol. 33, No. 34).

Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review

Investigations on embedding nanoparticles by electroplating. / Wurz, M.; Oekermann, T.; Wagner, P. et al.
ECS Transactions - Magnetic Materials, Processes and Devices 10 - 214th ECS Meeting. 45. ed. 2009. p. 207-216 (ECS Transactions; Vol. 16, No. 45).

Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review

Fabrication of a micro coil for magneto-optical data storage. / Wurz, M. C.; Ruffert, C.; Gatzen, H. H. et al.
INTERMAG 2006 - IEEE International Magnetics Conference. IEEE Computer Society, 2006. p. 567 4262000.

Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review

Investigations on the permeability of electroplated and sputtered permalloy. / Wurz, M. C.; Dinulovic, D.; Gatzen, H. H.
Magnetic Materials, Processes, and Devices VIII - Proceedings of the International Symposium. 2006. p. 525-535 (Proceedings - Electrochemical Society; Vol. PV 2004-23).

Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review

Journals

Conference Papers, Conference Proceedings, Collections, Reports and Books

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