Produktionstechnik Hannover informiert:
Fabrication of miniaturized ion getter pumps at IMPT
In the miniaturisation of quantum systems, the miniaturisation of the periphery plays a major role. Especially in vacuum systems, the pump technology is the most space-consuming component. As part of the project "Innovative Vacuum Technology for Quantum Sensors" (InnoVaQ), the IMPT is therefore developing a miniaturised ion getter pump. It generally consists of three essential components: an electron source (also called emitter), an electron collector and a getter electrode. The electron source in the form of arrays of field emitters (FEA) are usually produced by microtechnological means - including reactive ion deep etching, wet chemical etching or laser ablation. The scientists at the IMPT follow a different approach and produce the electron source from silicon using dicing. This process has been patented by Leibniz Universität Hannover. The advantage of this manufacturing method is its cost efficiency and the stability of the field emitters due to their size.
More information on this topic in the phi newsletter article (German):
Produktionstechnik Hannover informiert: Fabrication of miniaturized ion getter pumps at IMPT
More information on the project InnoVaQ (German):
Projekt InnoVaQ - Innovative Vakuumtechnologie für Quantensensoren
