White Light Interferometry and Atomic Force Microscopy Grinding Tool Topography Measurements - A Comparison
| Categories |
Konferenz (reviewed) |
| Year | 1997 |
| Authors | H.H. Gatzen, J.C. Mätzig, L.P. Ruhbach |
| Published in | Proc. 4th Int. Conf. on Ultraprecision in Manufacturing Engineering 1997, Braunschweig, Germany |
