Applying Scanning Probe Microscopy to Ultraprecision-Machining
| Categories |
Konferenz (reviewed) |
| Year | 1997 |
| Authors | H.H. Gatzen, J.C. Mätzig, H. Siekmann |
| Published in | Proc. european Workshop on Microtechnology and Scanning Probe Microscopy 1997, Mainz |
