A Linear Microactuator with Enhanced Design
| Categories |
Zeitschriften/Aufsätze |
| Year | 2002 |
| Authors | J. Edler, M. Föhse, H.D. Stölting, H.H. Gatzen |
| Published in | Microsystem Technologies, Springer Verlag Berlin Heidelberg New York, Vol. 7, No.5-6, pp. 261-264 |
