A Linear Microactuator with Enhanced Design
Categories |
Zeitschriften/Aufsätze |
Year | 2002 |
Authors | J. Edler, M. Föhse, H.D. Stölting, H.H. Gatzen |
Published in | Microsystem Technologies, Springer Verlag Berlin Heidelberg New York, Vol. 7, No.5-6, pp. 261-264 |