Institute of Micro Production Technology Research Publications
The Fabrication of Nano-Roughness Standards for the Calibration of Atomic Force Microscopes

The Fabrication of Nano-Roughness Standards for the Calibration of Atomic Force Microscopes

Categories Konferenz (reviewed)
Year 2001
Authors H.H. Gatzen, C. Kourouklis
Published in Proc. ASPE 16th Ann. Meet. 2001, Virginia, USA, pp. 493-496