Advances in Dicing Wafers for Micro Electro-Mechanical Systems (MEMS)
| Categories |
Konferenz (reviewed) |
| Year | 2000 |
| Authors | H.H. Gatzen, C. Morsbach, J. Zeadan |
| Published in | Proc. Micro.tec Conf. 2000, Hanover, VDE Publication, Vol. 2, pp. 621-625 |
