Institute of Micro Production Technology Research Publications
Concept for a Wafer Level Test System for Measuring Magnetic Film Properties

Concept for a Wafer Level Test System for Measuring Magnetic Film Properties

Categories Konferenz (reviewed)
Year 2006
Authors D. Dinulovic, E. Flick, H. Gerdes, K. Feindt, M. Eccarius, H.H. Gatzen
Published in 210th Meet. of The Electrochemical Society 2006, Cancun, Mexico