Microfabricated Inductive Linear Micro Positioning Sensor
| Categories |
Konferenz (reviewed) |
| Year | 2004 |
| Authors | D. Dinulovic, H.H. Gatzen |
| Published in | Proc. 3rd IEEE Int. Conf. on sensors, IEEE Sensors 2004, Vienna, Austria, ISBN 0-7803-8692-2 |
