Institute of Micro Production Technology Research Publications
Investigation on a NiFe Alloy with a Coefficient of Thermal Expansion Matching the One of Silicon

Investigation on a NiFe Alloy with a Coefficient of Thermal Expansion Matching the One of Silicon

Categories Zeitschriften/Aufsätze
Year 2008
Authors M. Bedenbecker, H.H. Gatzen
Published in MMM 2007, Tampa, FL, USA, Journal of Applied Physics, Vol. 103, 07E731