Technical Progress in Designing and Controlling of Active Micro Systems
| Categories |
Zeitschriften/Aufsätze |
| Year | 2008 |
| Authors | S. Demmig, R. Gehrking, M. Hahn, K. Wiedmann, B. Ponick, H.H. Gatzen, A. Mertens |
| Published in | Microsystem Technologies, Springer Verlag Berlin Heidelberg New York, Vol. 14, No. 12, pp. 1925-1931 |
