Focused Ion Beam Core Hole Drilling for Stress Detection in Thin-films
| Categories |
Zeitschriften/Aufsätze |
| Year | 2007 |
| Authors | H. Gerdes, H.H. Gatzen |
| Published in | MicroNanoReliability 2007, Berlin, Germany, Micromaterials and Nanomaterials, Microsystem Technologies, Springer Verlag Berlin Heidelberg New York, Vol. 15, No. 1, pp. 151-153 |
