Slurry Comparison for Chemical-mechanical Polishing (CMP) of Silicon Carbide (SiC)
| Categories |
Konferenz (reviewed) |
| Year | 2012 |
| Authors | J. Rittinger, S. Cvetkovic, L. Rissing |
| Published in | Proc. 12th euspen Int. Conf. 2012, Stockholm, Sweden, pp. 145-148 |
