Thinning Process Optimization for an Ultra-thin 3D Magnetic Field Sensor
| Categories |
Konferenz (reviewed) |
| Year | 2012 |
| Authors | S. Cvetkovic, R. Kruppe, L. Rissing |
| Published in | Smart Systems Integration (SSI 2012), 6th Int. Conf. & Exhibition, Zurich, Swiss, paper 17 |
| ISBN | 978-3-8007-3423-8 |
