Integration of Electroplated CoFe in Trench Type Flux Guides for Magnetic MEMS Applications
| Categories |
Konferenz (reviewed) |
| Year | 2012 |
| Authors | J. Chen, S. Cvetkovic, L. Rissing |
| Published in | Trans. 222nd ECS Meeting, Honolulu, Hawaii, Vol. 50, No. 10, pp. 157-166 |
