Institute of Micro Production Technology Research Publications
Thin film fabrication of highly sensitive earth magnetic field sensor

Thin film fabrication of highly sensitive earth magnetic field sensor

Categories Konferenz (reviewed)
Year 2014
Authors A. Wienecke, L. Rissing
Published in Tagungsband Smart Systems Integration 2014, 8th International Conference & Exhibition on integration issues of miniaturized systems - MEMS, NEMS, ICs and electronic components 2014, pp. 595–598