Institute of Micro Production Technology Research Publications
Direct hot embossing of micro-elements by means of UV-structurable polyimide

Direct hot embossing of micro-elements by means of UV-structurable polyimide

Categories Konferenz (reviewed)
Year 2014
Authors M. Akin, M. Rezem, M. Rahlves, B. Roth, E. Reithmeier, L. Rissing
Published in MNE 2014, Lausanne, CH, September 22-26
DOI 10.13140/2.1.1919.1367