Direct hot embossing of micro-elements by means of UV-structurable polyimide
Categories |
Konferenz (reviewed) |
Year | 2014 |
Authors | M. Akin, M. Rezem, M. Rahlves, B. Roth, E. Reithmeier, L. Rissing |
Published in | MNE 2014, Lausanne, CH, September 22-26 |
DOI | 10.13140/2.1.1919.1367 |