Integration of PVDF (Polyvinylidene Fluoride) in MEMS Production
| Categories |
Konferenz (reviewed) |
| Year | 2014 |
| Authors | S. Holz, S. Kiricenko, L. Rissing |
| Published in | ECS Trans. 2014 64(1): 189-195 |
| DOI | 10.1149/06401.0189ecst |
