Institute of Micro Production Technology Research Publications
Thin Film Fabrication and System Integration Test Run for a Microactuator for a Tuneable Lens

Thin Film Fabrication and System Integration Test Run for a Microactuator for a Tuneable Lens

Categories Konferenz (reviewed)
Year 2013
Authors D. Hoheisel, L. Rissing
Published in Proc. SPIE Photonics West 2013, San Francisco, USA