Technology Development for the Thinning of a Slider with an Integrated Microactuator
| Categories |
Konferenz (reviewed) |
| Year | 2009 |
| Authors | S. Cvetkovic, H.H. Gatzen |
| Published in | Proc. euspen 9th Int. Conf. 2009, San Sebastian, Spain, Vol. 2, pp. 455-458 |
