Institute of Micro Production Technology Research Publications
Evaluation of an Electromagnetic Microactuator using Scanning Hall Probe Microscopy Measurements

Evaluation of an Electromagnetic Microactuator using Scanning Hall Probe Microscopy Measurements

Categories Zeitschriften/Aufsätze
Year 2009
Authors D. Dinulovic, H. Saalfeld, Z. Celinski, S. Field, H.H. Gatzen
Published in Journal of Applied Physics, AIP, Vol. 105, 07F119-1