Cross Crown Nanogrinding of a Chiplet for a Slider with an integrated Microactuator (SLIM)
| Categories |
Konferenz (reviewed) |
| Year | 2009 |
| Authors | H.H. Gatzen, S. Cvetkovic |
| Published in | Proc. ASPE, 24th Ann. Meet. 2009, Monterey, CA, USA, pp. 95 |
