Institute of Micro Production Technology Research Publications
Qualification of Membranes for MEMS Applications Applying Nanoindentation

Qualification of Membranes for MEMS Applications Applying Nanoindentation

Year 2010
Authors F. Pape, T. Creutzburg, and H.H Gatzen
Published in Nanobrücken / Hysitron User Meeting, pp. 57-58, Saarbrücken, Germany, 2010