Qualification of Membranes for MEMS Applications Applying Nanoindentation
Year | 2010 |
Authors | F. Pape, T. Creutzburg, and H.H Gatzen |
Published in | Nanobrücken / Hysitron User Meeting, pp. 57-58, Saarbrücken, Germany, 2010 |
Year | 2010 |
Authors | F. Pape, T. Creutzburg, and H.H Gatzen |
Published in | Nanobrücken / Hysitron User Meeting, pp. 57-58, Saarbrücken, Germany, 2010 |