Qualification of Membranes for MEMS Applications Applying Nanoindentation
| Year | 2010 |
| Authors | F. Pape, T. Creutzburg, and H.H Gatzen |
| Published in | Nanobrücken / Hysitron User Meeting, pp. 57-58, Saarbrücken, Germany, 2010 |
Last Change: 13.10.23
| Year | 2010 |
| Authors | F. Pape, T. Creutzburg, and H.H Gatzen |
| Published in | Nanobrücken / Hysitron User Meeting, pp. 57-58, Saarbrücken, Germany, 2010 |
Last Change: 13.10.23