Institute of Micro Production Technology Research Publications
High Surface Qquality of Sintered Silicon Carbide by Chemical Mechanical Polishing

High Surface Qquality of Sintered Silicon Carbide by Chemical Mechanical Polishing

Categories Konferenz
Year 2015
Authors E. Asadi, L. Rissing
Published in Proc. 15th euspen Int. Conf. Leuven, Belgium, pp. 41-42