Simulation, Manufacturing and Evaluation of a Transformer Eddy-Current Sensor for Deep-Drawing Processes

This article shows the manufacturing and evaluation of an eddy current sensor based on the transformer principle for monitoring a deep drawing process. First, the optimized parameters of two inductive sensor coils were determined by 2D-finite-element simulation (conductive path width, number of turns, measurement frequency) concerning the resulting output voltage. Then, the sensor was fabricated according to the simulation using thin film technology processes. Finally, the sensor is evaluated and a comparison with the simulation is shown.