• A. Buchta (2023): Herstellung miniaturisierter Ionengetterpumpen am IMPTphi – Produktionstechnik Hannover informiert, Newsletter Nr. 38 / März 2023
    DOI: https://doi.org/10.48811/phi-23-001
  • A. Buchta, A. Kassner, J. Voß, J.Petring, L. Diekmann, F. Dencker, M. C. Wurz (2023): Novel Glass-Silicon Emitter Chip for Field Emission Applications2023 IEEE 36th International Vacuum Nanoelectronics Conference (IVNC)
    DOI: 10.1109/IVNC57695.2023.10188880
  • B. Denkena, H. Klemme, D. Kowalke, M. Korbacher, R. Ottermann, F. Dencker, M. C. Wurz (2023): Force sensing linear rolling guides based on modified metal strain gaugesEuspen 23rd International Conference & Exhibition
    DOI: 10.1109/ECTC51909.2023.00118
  • C. Wittek, L. Steinhoff, M. Reißfelder, S. Raumel, F. Dencker, M. Wurz (2023): Process Development for Batch Production of Micro Milling Tools Made of Silicon Carbide by Means of Dry Etching ProcessMDPI
    DOI: https://doi.org/10.3390/mi14030580 doi.org/10.3390/mi14030580
  • L. Steinhoff, F. Dencker, M. Wurz (2023): Application of batch manufactured flexible micro-grinding tools on copper and oxidized copper surfacesTribologie und Schmierungstechnik
    DOI: 10.24053/TuS-2023-0002
  • L. Steinhoff, R. Ottermann, F. Dencker, M. C. Wurz (2023): Detailed characterisation of batch-manufactured flexible micro-grinding tools for electrochemical assisted grinding of copper surfacesThe International Journal of Advanced Manufacturing Technology
    DOI: https://doi.org/10.1007/s00170-023-11876-2
  • O. Altun, P. Oladazimi, M. Wawer, S. Raumel, M. C. Wurz, K. Barienti, F. Nürnberger, R. Lachmayer, I. Mozgova, O. Koepler, S. Auer (2023): Enhanced findability and reusability of Engineering Data by Contextual Metadata24th International Conference on Engineering Design, ICED23 Bordeaux, France, July 2023
  • O. Altun, P. Oladazimi, M.L. Wawer, S. Raumel, M. Wurz, K. Barienti, F. Nürnberger, R. Lachmayer, I. Mozogova, O. Koepler, S. Auer (2023): Enhanced findability and reusability of engineering data by contextual metadataProceedings of the Design Society , Volume 3: ICED23 , July 2023 , pp. 1635 - 1644
    DOI: https://doi.org/10.1017/pds.2023.164
  • S. Hadeler, Y. Long, R. Ottermann, F. Dencker, J. Twiefel, M. C. Wurz (2023): Influence of Microscale Tin Particles on Mechanical Properties of Silver Sintering Joints with Reduced Processing Parameters2023 IEEE 73nd Electronic Components and Technology Conference (ECTC)
    DOI: 10.1109/ECTC51909.2023.00118
  • S. Kamrani, F. Dencker, R. Ottermann, M. C. Wurz (2023): Simulation, Manufacturing and Evaluation of a Transformer Eddy-Current Sensor for Deep-Drawing ProcessesSMSI Sensor and Measurement Science International, 08.-11.05.2023 Nürnberg
    DOI: 10.5162/SMSI2023/P02
  • S. Raumel, K. Barienti, T. Hoang, N. Merkert, F. Dencker, F. Nürnberger, H. Maier, M. Wurz (2023): Characterization of the tribologically relevant cover layers formed on copper in oxygen and oxygen-free conditionsFriction
    DOI: https://doi.org/10.1007/s40544-022-0695-5
  • S. Raumel, L. Albracht, U. Holländer, S. Hübner, B.-A. Behrens, A. Langohr, E. Faramand, M. Wurz (2023): Oxygen-free resistance heating with nitrogen and silane as an energy-efficient heating process for hot stamping42nd International Deep Drawing Research Group Conference
    DOI: 10.1088/1757-899X/1284/1/012007
  • A. M. Zawacka, M. S. Prediger, A. Kassner, F. Dencker, M. Wurz (2022): Approaches for a Solely Electroless Metallization of Through-Glass Vias2022 IEEE 72nd Electronic Components and Technology Conference (ECTC)
    DOI: 10.1109/ECTC51906.2022.00145
  • D. Konopka, F. Pape, R. Ottermann, T. Steppeler, F. Dencker, M. C. Wurz, G. Poll (2022): Characterization of an anti-wear coating for the application of highly loaded smart thin-film sensorsInternational Conference BALTTRIB, Kaunas, Lithuania, September 2022
    DOI: 10.15544/balttrib.2022.9
  • L. Diekmann, A. Kassner, F. Dencker, M. Wurz (2022): Nonevaporable getter-MEMS for generating UHV conditions in small voluminaJournal of Vacuum Science & Technology B
    DOI: 10.1116/6.0001991
  • L. Sommer, M. Prediger, D. Rosenbusch (2022): Berufsfeld Wissenschaft und Technik: Ein erster Einblick nach der Schulephi - Produktionstechnik Hannover Informiert, Newsletter Nr. 37 / Dezember 2022
  • L. Steinhoff (2022): Herstellung und Evaluierung von Mikroschleifstiftenphi – Produktionstechnik Hannover informiert, Newsletter Nr. 36 / September 2022
    DOI: https://doi.org/10.48811/phi-22-013
    ISSN: 2198-1922
  • L. Steinhoff, F. Dencker, M. C. Wurz (2022): Production and characterisation of batch manufactured flexible micro-grinding tools for finishing metallic surfaceseuspen's 22nd International Conference & Exhibition 2022
  • L. Steinhoff; F. Dencker; M. Wurz (2022): Application of batch manufactured flexible micro-grinding tools on copper and oxidized copper surfaces63. Tribologie Fachtagung der GfT
  • M. Arndt (2022): Entwicklung eines piezoelektrischen Kraftsensor-Arraysphi - Produktionstechnik Hannover Informiert, Newsletter Nr. 34 / März 2022
    DOI: https://doi.org/10.48811/phi-22-002
  • M. Arndt, F. Dencker, M. Wurz, Y. Long, J. Twiefel (2022): Detection of joining mechanisms at different locations of the wire/substrate interface during ultrasonic wire bonding via a PZT-based sensor arrayJournal of Materials Processing Technology
    DOI: 10.1016/j.jmatprotec.2022.117826
  • M. Arndt, T. Fünfkirchler, S. Hübner, F. Dencker, M. C. Wurz, B.-A. Behrens (2022): Monitoring of the flange draw-in during deep drawing processes using a thin-film inductive sensor12. Kongress der deutschen WPG - Wissenschaftliche Gesellschaft für Produktionstechnik, Stuttgart, Germany, October 2022
    DOI: 10.1007/978-3-031-18318-8_12
  • M. Reulbach, M. Aue, H. Windhagen, M. S. Prediger, F. Nürnberger, E. Jakubowitz (2022): The effect of tin coating in combination with phosphoric acid primers on bone cement bond strength to total hip stem alloysMSE 2020 - Materials Science and Engineering Congress, Darmstadt, Deutschland
  • M. Rodriguez Diaz; S. Raumel; M. C. Wurz; M. Szafarska; R. Gustus; K. Möhwald; H. J. Maier (2022): Young’s modulus and residual stresses of oxide-free wire arc sprayed copper coatingsCoatings 2022, 12(10), 1482
    DOI: https://doi.org/10.3390/coatings12101482
  • M. S. Prediger (2022): Drucksensoren aus Glas: IMPT gewinnt „Best Session Paper“phi - Produktionstechnik Hannover informiert, Newsletter Nr. 36 / September 2022
  • M. S. Prediger, E. Müller, M. Reulbach, M. C. Wurz, E. Jakubowitz (2022): Development and investigation of tin coatings for increased bone cement detachment at implant interfaces1st International SIIRI Symposium: CRC/TRR 298 SIIRI - Safety-Integrated and Infection-Reactive Implants, Hanover, Germany, August 2022
  • O. Melchert, F. Dencker, M. Wurz, A. Demircan, U. Morgner, M. Kues (2022): Soliton compression and supercontinuum spectra in nonlinear diamond photonicsDiamond & Related Materials
    DOI: https://doi.org/10.48550/arXiv.2211.00492
  • R. Ottermann, S. Zhang, B. Denkena, H. Klemme, D. Kowalke, M. Korbacher, F. Dencker, M. Wurz (2022): In Situ Resistance Trimming of Directly Deposited Thin-Film Strain GaugesIEEE Sensors 2022
    DOI: 10.1109/SENSORS52175.2022.9967357
  • R. Ottermann; T. Steppeler; F. Dencker; M. Wurz (2022): Degeneration Effects of Thin-Film Sensors after Critical Load Conditions of Machine ComponentsMachines 2022, 10, 870
    DOI: https://doi.org/10.3390/machines10100870
  • S. Hadeler (2022): Integrierte Sensorik im GummiverbundWIP Elastomerforum
  • S. Heikebrügge, R. Ottermann, B. Breidenstein, M. Wurz, F. Dencker (2022): Residual Stresses from Incremental Hole Drilling Using Directly Deposited Thin Film Strain GaugesExperimental Mechanics
    DOI: https://doi.org/10.1007/s11340-022-00822-0
  • S. Raumel, F. Dencker, M. C. Wurz (2022): Influence of oxide layers on plastic deformability of copper7th World Tribology Congress 2022
  • S. Raumel, F. Dencker, M. Wurz, T. L. Hoang, N. Merkert (2022): Nanoindentation in alumina coated Al: Molecular dynamics simulations and experimentsSurface and Coatings Technology
    DOI: https://doi.org/10.1016/j.surfcoat.2022.128342
  • S. Raumel, K. Barienti, H.-T. Luu, N. Merkert, F. Dencker, F. Nürnberger, H.-J. Maier, M. C. Wurz (2022): Characterization of the tribologically relevant cover layers formed on copper in oxygen and oxygen-free conditionsFriction
    DOI: https://doi.org/10.1007/s40544-022-0695-5
  • S. Raumel, M. Wurz, F. Dencker (2022): Batch Fabrication of Silicon Indenter Tips for adhesion investigations using Deep Reactive Ion Etching (DRIE)Nanobrücken 2022 - Nanomechanical Testing Conference
  • S. Raumel; F. Dencker; M. Wurz; (2022): Concept and fabrication of functionalized indenter tips for adhesion studies in XHV-adequate atmosphereMSE Congress 2022
  • T. Bierwirth, F. Dencker, E. Fischer, M. Wurz (2022): Fabrication of a Low Profile Planar Transformer Using Molded Interconnect Device TechnologyElectronics System-Integration Technology Conference (ESTC) 2022
  • T. Herrmann, A. K. Schierz, M. S. Prediger, J. Reifenrath, J. Meißner, M. Wurz, P. Behrens (2022): Effect of the PEG functionalization on the saturation magnetization of magnetic nanoporous core-shell nanoparticlesInternational Journal on Magnetic Particle Imaging
    DOI: https://doi.org/10.18416/IJMPI.2022.2203009
  • T. Khvan, F. Dencker, U. Hangen, A. Z. Zinovev (2022): High temperature nanoindentation of iron: Experimental and computational studyJournal of Nuclear Materials 567 (2022) 153815
    DOI: https://doi.org/10.1016/j.jnucmat.2022.153815
  • Y. Long, M. Arndt, F. Dencker, M. Wurz, J. Twiefel, J. Wallaschek (2022): Impact of surface texture on ultrasonic wire bonding processJournal of Materials Research and Technology, Volume 20, 1828-1838
    DOI: 10.1016/j.jmrt.2022.07.187
  • A. Glukhovskoy, E. Müller, M. Prediger, H. Maier, M.C. Wurz (2021): Entwicklung einer Polyimidmembran für elektromagnetische Mittelohr-AktorenMikroSystemTechnik Kongress 2021
  • A. Glukhovskoy, M. Prediger, J. Schäfer, N. Ambrosius, A. Vogt, R. Santos, R. Ostholt, M. C. Wurz (2021): Proof of Concept: Glass-Membrane Based Differential Pressure Sensor2021 IEEE 71st Electronic Components and Technology Conference (ECTC)
    DOI: DOI 10.1109/ECTC32696.2021.00248
  • E. C. Fischer, T. Bierwirth, F. Dencker, M. C. Wurz (2021): Fabrication of a Low Profile Planar Transformer Using a Dual PCB ApproachMikroSystemTechnik Kongress 2021
    ISBN: 978-3-8007-5656-8
  • F. Dencker, M.C. Wurz, H.J. Maier (2021): Verfahren zur Herstellung von DiamantspitzenDE102019213043A1
  • F. Dencker, M.C. Wurz, H.J. Maier, R. Ottermann, D. Klaas, A. Kassner (2021): Sensorbauteil, Halbzeug, Verfahren zur Anbringung und zur Herstellung eines SensorbauteilsDE102019122623A1 WO002021032878A1
  • J. Twiefel, A. Glukhosvkoy, S. de Wall, M. Wurz, M. Sehlmeyer, M. Hitzemann, S. Zimmermann (2021): Towards a Highly Sensitive Piezoelectric Nano-Mass Detection—A Model-Based Concept StudyMDPI Sensors
    DOI: 10.3390/s21072533
  • Kassner A., Wurz M.C. (2021): Forscher aus Hannover entwickeln miniaturisierte Quantengravimeterphi – Produktionstechnik Hannover informiert, Newsletter Nr. 30 / März 2021
    DOI: https://doi.org/10.48811/phi-21-003
    ISSN: 2198-1922
  • L. Steinhoff (2021): Entwicklung eines piezoelektrischen Aluminiumnitrid-Dünnfilmsphi - Produktionstechnik Hannover informiert, 2021
  • M. Arndt, M.C. Wurz, F. Dencker, Y. Long, J. Twiefel (2021): Simulationsgestützte Auslegung und Fertigung von piezoelektrischen Kraftsensor-Arrays zur Untersuchung des Ultraschall-DrahtbondprozessesMikroSystemTechnik Kongress 2021
  • M. Klaproth, B. Denkena, B. Bergmann, R. Ottermann, F. Dencker, M. Wurz (2021): Werkzeugmaschinen werden intelligentVDI-Z
    DOI: https://www.ingenieur.de/fachmedien/vdi-z/werkzeugmaschinen/werkzeugmaschinen-werden-intelligent/
  • M. Prediger, E. Müller, S. Bengsch, M.C. Wurz (2021): Kombination von additiver und dünnfilm-technischer Fertigung zur Herstellung eines Drucksensors für biomedizinische AnwendungenMikroSystemTechnik Kongress 2021
  • M. Wurz, M. S. Prediger (2021): Physical Sensors: Magnetic SensorsReference Module in Biomedical Sciences
    DOI: https://doi.org/10.1016/B978-0-12-822548-6.00054-6
  • M.C. Wurz (2021): Magnetkopf und Verfahren zur Speicherung von Informationen sowie ErzeugnisEP000003821431A1
  • M.C. Wurz (2021): Einrichtung mit einem elektrischen Bauteil sowie Verfahren zu deren HerstellungEP000003817929A1
  • R. Basten, A. Zawacka, S. Bengsch, M. Prediger, M.C. Wurz (2021): Folienübertragung von Dünnfilmen auf Metalloberflächen mithilfe von Sol-Gelen, Self-Assembling Monolayers und WasserglasMikroSystemTechnik Kongress 2021
  • R. Ottermann, D. Klaas, F. Dencker, D. Hoheisel, P. Rottengatter, T. Kruspe, S. Jung, M.C. Wurz (2021): Direktabgeschiedene Dünnfilm-Dehnungsmessstreifen für erhöhte TemperaturenMikroSystemKongress 2021
  • R. Ottermann, D. Klaas, F. Dencker, D. Hoheisel, S. Jung, A. Wienke, J. Düsing, J. Koch, M.C. Wurz (2021): Directly Deposited Thin-Film Strain Gauges on Curved Metallic SurfacesIEEE Sensors 2021
  • R. Ottermann, D. Klaas, F. Dencker, M. C. Wurz (2021): Direktabgeschiedene Dünnfilmsensorik mithilfe einer neuartigen BeschichtungsanlageNDVaK - Neues Dresdner Vakuumkolloquium
  • S. de Wall, A. Kassner, C. Künzler, F. Dencker, L. Diekmann, M.C. Wurz (2021): Mikrotechnologische Fertigung von integrierten optischen Gittern mittels Lift-Off-Prozess für den Einsatz in AtominterferometernMikroSystemTechnik Kongress
  • S. de Wall, E.C. Fischer, F. Dencker, M.C. Wurz, S. Bengsch (2021): Anisotropic Magneto-Resistive Effect based Sensor using Daisy Chain on Polyether Ether Ketone SubstrateIEEE Sensors 2021
  • S. Hadeler, R. Ottermann, Y. Long, F. Dencker, M.C. Wurz, J. Twiefel (2021): Investigations on Silver Sintering using an Ultrasonic Transient Liquid Phase Sintering ProcessIEEE Electronics Packaging Technology Conference (EPTC)
  • S. Raumel, F. Dencker, M.C. Wurz (2021): Investigation of tribologically relevant surface layers formed on non-ferrous metals in oxygen-free conditionsEuropean Symposium on Friction, Wear and Wear Protection, Friction 21
  • S. Raumel, K. Barienti, F. Dencker, M. C. Wurz (2021): Einfluss von Silan-dotierten Umgebungsatmosphären auf die tribologischen EigenschaftenTribologie und Schmierungstechnik
    DOI: DOI: 10.24053/TuS-2021-0002
  • S. Raumel, R. Ottermann (2021): Zeigt euren MuT: Mädchen und Technik ist wieder da!phi - Produktionstechnik Hannover informiert
  • Arndt M, Dencker F, Wurz MC (2020): Novel Piezoelectric Force Sensor Array for Investigation of Ultrasonic Wire BondingIEEE 70th Electronic Comp. and Techn. Conf. (ECTC)
    DOI: 10.1109/ECTC32862.2020.00053
  • Fischer EC, Bengsch S, de Wall S, Wurz MC (2020): Giant Magneto-Resistive Effect based Sensor on Laser Direct Structured MID SubstratesIEEE 70th Electronic Comp. and Techn. Conf. (ECTC)
    DOI: 10.1109/ECTC32862.2020.00077
  • H.J. Maier, M.C. Wurz, A. Glukhovskoy, T. Schnebeck (2020): Verfahren und Vorrichtung zum Bestimmen einer KonzentrationDE102018102059B4
  • H.J. Maier, M.C. Wurz, S. Bengsch (2020): Method for applying an electrical microstructure, elastomer structure, fiber composite component, and tireUS020200068718A1
  • H.J. Maier, M.C. Wurz, S. Beringer (2020): Elektrische Schaltungsstruktur und Verfahren zu deren HerstellungDE102017108437B4
  • Klaas D, Ottermann R, Dencker F, Wurz MC (2020): Development, Characterisation and High-Temperature Suitability of Thin-Film Strain Gauges Directly Deposited with a New Sputter Coating SystemMDPI Sensors
    DOI: 10.3390/s20113294
  • M.C. Wurz (2020): Herstellung induktiver elektrischer BauelementeEP000003701553A1
  • M.C. Wurz (2020): Verfahren und Anlage zur Herstellung eines elektrischen Bauteils sowie ComputerprogrammEP000003638825A1 WO002018229250A1
  • M.C. Wurz, H.J. Maier, S. Bengsch (2020): Verfahren zur Herstellung eines Formkörpers und Bauteil mit elektrischer FunktionalitätWO002020239463A1 DE102019113973A1
  • M.C. Wurz, M. Rechel, P. Taptimthong (2020): Magnetkopf und Verfahren zur Speicherung von Information sowie ErzeugnisWO002020011308A1
  • R. Ottermann, D. Klaas, F. Dencker, D. Hoheisel, P. Rottengatter, T. Kruspe, M.C. Wurz (2020): Direct Deposition of Thin-Film Strain Gauges with a New Coating System for Elevated TemperaturesIEEE Sensors 2020
    DOI: 10.1109/SENSORS47125.2020.9278661
  • Raumel S (2020): Verschleiß-Untersuchung in sauerstofffreier Atmosphärephi – Produktionstechnik Hannover informiert, 2020
  • Raumel S, Barienti K, Dencker F, Wurz MC (2020): Einfluss von Silan-dotierten Umgebungsatmosphären auf die tribologischen Eigenschaften von Titan61. Tribologie-Fachtagung 2020
  • S. Bengsch, E. C. Fischer, S. de Wall, T. Schelm, M. Arndt, M. C. Wurz (2020): Optical Platform for Highly Precise Optical ComponentsIEEE 70th Electronic Comp. and Techn. Conf. (ECTC)
    DOI: 10.1109/ECTC32862.2020.00341
  • S. Bengsch, M. Wurz (2020): Passive and Active Thermal Management of Bonded Bare-Dice Laser Diodes on Polymer Foil Substrates2020 IEEE Photonics Conference (IPC)
  • S. Bengsch, U. Giese, E. C. Fischer, M. C. Wurz (2020): Thin Film Transferring via PVA Substrate and Contacting of Sensor inside Elastomer MatrixIEEE Sensors 2020
    DOI: 10.1109/SENSORS47125.2020.9278876
  • S. de Wall, A. Kassner, F. Dencker, C. Künzler, H. Heine, W. Herr, M. Christ, M. Krutzik, E. M. Rasel, M. C. Wurz (2020): Mikrotechnologische Fertigung von integrierten optischen Gittern für den Einsatz in AtominterferometernMikro-Nano-Integration - 8. GMM-Workshop, 2020
  • S. Hadeler, S. Bengsch, M. Prediger, M. C. Wurz (2020): Transfer Printing of Conductive Thin Films on PDMS with Soluble Substrates for Flexible Biosensors7th International Electronic Conference on Sensors and Applications (ECSA)
    DOI: 10.3390/ecsa-7-08181
  • U. Giese, H.J. Maier, M.C. Wurz, S. Bengsch (2020): Einrichtung mit einem elektrischen Bauteil sowie Verfahren zu deren HerstellungWO002020007957A1
  • Arndt M, Dencker F, Wurz MC (2019): Novel Eddy-Current Sensor For Industrial Deep-Drawing ApplicationsIEEE Sensors 2019
    DOI: 10.1109/SENSORS43011.2019.8956948
  • Arndt M, Dencker F, Wurz MC (2019): Simulationsgestützte Auslegung und Fertigung von werkzeugintegrierten induktiven SensorenMikroSystemTechnik Kongress 2019
    ISBN: 978-3-8007-5090-0
  • Bengsch S, Aue M, Cromwell K, Wurz MC (2019): Structuring of Laser Activated Polymers for Sensor ApplicationsIEEE 69th Electronic Components and Technology Conference (ECTC)
    DOI: 10.1109/ECTC.2019.00290
  • Christ M, Kassner A, Smol R, Bawamia A, Heine H, Herr W, Peters A, Wurz MC, Rasel EM, Wicht A, Krutzik M (2019): Integrated atomic quantum technologies in demanding environments: development and qualification of miniaturized optical setups and integration technologies for UHV and space operationCEAS Space Journal
    DOI: 10.1007/s12567-019-00252-0
  • Dinulovic D, Shousha M, Haug M, Gerfer A, Beringer S, Wurz MC, Thone J, Wens M (2019): Microfabricated Magnetics on Silicon for Point of Load High Frequency Dc-Dc Converter ApplicationsIEEE Transactions on Industry Applications
    DOI: 10.1109/TIA.2019.2921523
  • Fischer EC, Cromwell K, Wurz MC (2019): Fertigung und Charakterisierung von in Leiterplatten integrierten MikrotransformatorenMikroSystemTechnik Kongress 2019
    ISBN: ISBN 978-3-8007-5090-0
  • Glukhovskoy A, Wurz MC (2019): The concept of a large working stroke reluctance zipper actuatorMikroSystemTechnik Kongress 2019
    ISBN: 978-3-8007-5090-0
  • H.J. Maier, M.C. Wurz, S. Beringer (2019): Herstellung induktiver elektrischer BauelementeWO002019081352A1
  • Hockauf R, Asadi E, Denkena B, Wurz MC (2019): „Hai-Tech“ spanend fertigenWerkstatt und Betrieb
  • Kassner A, Künzler C, Dencker F, Christ M, Heine H, Herr W, Krutzik M, Rasel EM, Wurz MC (2019): Atomchips mit integrierten optischen Gittern zur Erzeugung von Bose-Einstein-KondensatenMikroSystemTechnik Kongress 2019
    ISBN: ISBN 978-3-8007-5090-0
  • Kassner A, Rechel M, Heine H, Herr W, Christ M, Krutzik M, Rasel EM, Wurz MC (2019): Atom Chip technology for use under UHV conditionsSmart Systems Integration; 13th International Conference and Exhibition on Integration Issues of Miniaturized Systems, Barcelona, Spain, 2019, pp. 69-75 More info
    ISBN: 978-3-8007-4919-5
  • Klaas D, Glukhovskoy A (2019): Wasseranalysegerät wird Industrie 4.0-fähigDigitalisierung erfolgreich umgesetzt, Nr. 2, 2019
    ISBN: 978-3-95900-350-6
  • L. Rissing, M. Akin (2019): Verfahren zum Fügen und Einrichtung zum Fügen einer Anordnung unter Verwendung des VerfahrensDE 10 2014 104 510 B4
  • M. V. Mishin, A. A. Vorobyev, A. S. Kondrateva, E. Y. Koroleva, P. A. Karaseov, P. G. Bespalova, A. L. Shakhim, A. Glukhovskoy, M. Wurz, A. V. Filimonov (2019): Substrate Modification Influence on Properties of Nanocomposite Based on TiO2 and Gold NanoparticlesInternational Conference "Emerging Trends in Applied and Computational Physics 2019" (ETACP-2019) 21–22 March 2019, Saint-Petersburg, Russian Federation
    DOI: doi:10.1088/1742-6596/1236/1/012025
  • M.C. Wurz (2019): Method for applying an electrical microstructure, elastomer structure, fiber compisite component, and tireCN000110073727A
  • M.C. Wurz, A. Glukhovskoy, T. Schnebeck, H.J. Maier (2019): Verfahren und Vorrichtung zum bestimmen einer KonzentrationWO002019149776A1
  • M.C. Wurz, H.J. Maier, S. Bengsch (2019): Verfahren zur Anbringung einer elektrischen Mikrostruktur sowie Elastomerstruktur, Faserverbundbauteil und ReifenEP000003552464A1 WO002018104047A1
  • Ottermann R, Knöpke R, Wurz MC (2019): Elektrische Kontaktierung bauteilinhärenter Dehnungsmesssensorik mithilfe des Transient Liquid Phase (TLP) BondingMikroSystemTechnik Kongress 2019
    ISBN: 978-3-8007-5090-0
  • P. Freytag, H.J. Maier, L. Rissing, D. Klaas, A. Wienecke (2019): Konstruktionsbauteil eines technischen Gegenstandes sowie Verfahren zur Herstellung des KonstruktionsbauteilsEP 3 085 474 B1
  • Prediger M (2019): Geringste Drücke magnetisch messenphi – Produktionstechnik Hannover informiert, Newsletter Nr. 24 / September 2019
    ISSN: 2198-1922
  • Prediger M, Rechel M, Wurz MC (2019): AMR-based mechanical pressure sensors: a proof of concept15th International Symposium Magnetoresistive Sensors and Magnetic Systems
  • Prediger M, Wittek C, Owiss G, Wurz MC (2019): AMR Sensoren auf flexiblem Substrat zur Messung von Verformungen eines hartmagnetischen Partikel-ElastomerverbundsProceedings of the MikroSystemTechnik Kongress 2019
    ISBN: 978-3-8007-5090-0
  • Schmelt AS, Fischer EC, Hofmann V, Twiefel J, Wurz MC (2019): Vibro-tactile displays for stimulating surface impressionsProceedings of the 23rd International Congress on Acoustics
  • Asadi E (2018): Innovatives Verfahren zur Herstellung von SchleifscheibenProduktionstechnik Hannover informiert (phi), August 2018
  • Asadi E, Hockauf R, Denkena B, Grove T, Wurz MC (2018): Flexible mono- and multilayer micro grinding tools for ultra-high precision processing and micro machining18th International Conference & Exhibition proceedings, pp. 151-152, Venedig, Italien, June 2018
  • Bengsch S, Aue M, de Wall S, Wurz MC (2018): Structuring Methods of Polymers for Low Cost Sensor ManufacturingIEEE 68th Electronic Components and Technology Conference (ECTC) | File | More info
    DOI: 10.1109/ECTC.2018.00213
    ISBN: 978-1-5386-4999-2
  • Christ M, Kassner A, Smol R, Bawamia A, Peters A, Wurz MC, Rasel EM, Wicht A and Krutzik M (2018): Integrated Atomic Quantum Technologies in Demanding Environments: Development and Qualification of Miniaturized Optical Setups and Integration Technologies for UHV and Space OperationInternational Conference on Space Optics 2018, ICSO 2018
  • D. Klaas, M.C. Wurz, H.J. Maier (2018): Verfahren und Anlage zur Herstellung eines elektrischen Bauteils sowie Computerprogramm10 2017 113 212
  • G. L. Angrisani, P. Taptimthong, S. E. Thürer, C. Klose, H. J. Maier, M. Wurz, K. Möhwald (2018): Magnetic Properties of Thermal Sprayed Tungsten Carbide-Cobalt CoatingAdvanced Engineering Materials 20 (9)
    DOI: 10.1002/adem.201800102
  • Glukhovskoy A, Schnebeck T, Holz S, Fischer EC, Wurz MC (2018): A laser-based, in-line chlorine dioxide concentration sensorProceedings of Symposium on Automated Systems and Technologies, Hanover, Germany (TEWISS Verlag)
    ISBN: 978-3-95900-223-3
  • H. C. Janßen, D. P. Warwas, D. Dahlhaus, J. Meißner, P. Taptimthong, M. Kietzmann, P. Behrens, J. Reifenrath, N. Angrisani (2018): In Vitro and in vivo accumulation of magnetic nanoporous silica nanoparticles on implant materials with different magnetic propertiesJournal of Nanobiotechnology 16
    DOI: https://doi.org/10.1186/s12951-018-0422-6
  • H. J. Maier, M. C. Wurz, S. Bengsch, U. Giese (2018): Einrichtung mit einem elektrischen Bauteil sowie Verfahren zu deren HerstellungDE 10 2018 116 182 A1
  • H.J. Maier, M.C. Wurz, A. Glukhovskoy, T. Schnebeck (2018): Verfahren und Vorrichtung zum Bestimmen einer KonzentrationDE 10 2018 102 059 A1
  • H.J. Maier, M.C. Wurz, S. Beringer (2018): Elektrische Schaltungstruktur und Verfahren zu deren HerstellungWO002018192976A1
  • Hockauf R, Asadi E, Denkena B, Grove T, Wurz MC (2018): Grinding of riblets with “beaver tooth” multi-layer tools4th CIRP Conference on Surface Integrity, Tianjin, China, Juli 2018
  • Isaak A, Long Y, Asadi E, Wurz M, Twiefel J, Wallaschek J (2018): Fabrication and characterization of high-speed PZT sensors for the investigation of ultrasonic wire bonding processeuspen’s 18th International Conference & Exhibition
  • Long Y, Dencker F, Isaak A, Hermsdorf J, Wurz MC, Twiefel J (2018): Self-Cleaning Mechanisms in Ultrasonic Bonding of Al WireJournal of Materials Processing Technology, Vol 258 More info
    DOI: 10.1016/j.jmatprotec.2018.03.016
  • Long Y, Dencker F, Isaak A, Li C, Schneider F, Hermsdorf J, Wurz MC, Twiefel J, Wallaschek J (2018): Revealing of ultrasonic wire bonding mechanisms via metal-glass bondingMaterials Science and Engineering B: Solid-State Materials for Advanced Technology, Vol 236-237
    DOI: 10.1016/j.mseb.2018.11.010
  • Long Y, Dencker F, Isaak A, Schneider F, Hermsdor J, Wurz MC, Twiefel J (2018): Visualization of Oxide Removal during Ultrasonic Wire Bonding ProcessIEEE Electronics Packaging Technology Conference (EPTC), Singapore, p. 1-4
  • M. Rechel, P. Taptimthong, M. C. Wurz (2018): Magnetkopf, Verfahren zur Speicherung von Information sowie ErzeugnisDE 10 2018 116 896 A1
  • M. Wurz, S. Bengsch, B. Roesener, S. Beringer (2018): Concept for Using MID Technology for Advanced PackagingIEEE 68th Electronic Components and Technology Conference (ECTC)
    DOI: 10.1109/ECTC.2018.00143
  • M.C. Wurz, L. Overmeyer, P. von Witzendorf, J. Hermsdorf, S. Bengsch (2018): Verfahren zum verbinden eines Halbleiterbauelements mit einem Gegenstück durch Laser-Löten, sowie entsprechende Anordnung mit einem HalbleiterbauelementWO002018099766A1
  • Mishin M, Vorobyev A, Kondrateva A, Koroleva E, Karaseov P, Bespalova P, Shakhmin A, Glukhovskoy A, Wurz MC, Filimonov A (2018): The Mechanism of Charge Carrier Generation at the ТiO2 - n-Si Heterojunction Activated by Gold NanoparticlesSemiconductor Science and Technology, Vol 37(7)
    DOI: 10.1088/1361-6641/aac4f3
  • Papakonstantinou A, Heine H, Le Gonidec M, Kassner A, Rechel M, Herr W, Wurz MC, Ertmer W, Rasel EM (2018): Next Generation Atom Chip DevelopmentDPG Spring meeting 2018 More info
  • Schlangen S, Bremer K, Isaak A, Wurz MC, Bonilla G, Neumann J, Roth B, Overmeyer L (2018): Mode-selective polished fiber couplers based on fiber gratingsThe Optical Fiber Communication Conference and Exhibition (OFC) More info
    DOI: 10.1364/OFC.2018.Th1K.6
    ISBN: 978-1-943580-38-5
  • Schlangen S, Bremer K, Zheng Y, Isaak A, Wurz MC (2018): Manufacturing and characterization of asymmetric evanescent field polished fiber couplers for fiber grating assisted mode selective couplingSPIE Photonics Europe More info
    DOI: 10.1117/12.2306772
  • Schmelt AS, Fischer EC, Wurz MC, Twiefel J (2018): Solid State Joint Actuator for a Vibro Tactile Line DisplayACTUATOR 2018, 16th International Conference on New Actuators, Bremen More info
    ISBN: 978-3-8007-4675-0
  • Schmelt AS, Hofmann V, Fischer EC, Wurz MC, Twiefel J (2018): Design and Characterization of the Lateral Actuator of a Bimodal Tactile Display With Two Excitation DirectionsDisplays, Vol 54
    DOI: 10.1016/j.displa.2018.09.002
  • A. S. Schmelt, V. Hofmann, J. Twiefel, E. C. Fischer, M. Wurz (2017): Modeling and Characterization of a Bimodal Tactile DisplayInternational Workshop on Piezoelectric Materials and Applications in Actuators (IWPMA)
  • B. Denkena, M. C. Wurz, T. Grove, A. Bouabid, E. Asadi (2017): Mass production for micro end mills17th Euspen Int. Conf., S. 245-246, Hannover, 2017
  • B. M. Mundotiya, D. Dinulovic, L. Rissing, M. Wurz (2017): Fabrication and Characterization of a Ni-Fe-W Core Microtransformer for High-Frequency Power ApplicationsSensors and Actuators A
    DOI: https://doi.org/10.1016/j.sna.2017.09.032
  • Behrens BA, Hübner S, Niemeyer H, Moritz J, Pfeffer C, Wölki K, Dencker F, Wurz MC, Wolter B, Müller T, Niese F (2017): Hot stamping process reliability – Innovative sensor technology for inline quality assuranceConference Strategies in Car Body Engineering, 22-23 March 2017, Bad Nauheim
  • Bengsch S (2017): Kontaktierung und Kühlung von ungehausten Halbleiterbauteilen auf KunststofffolienUni Magazin Leibniz Uni Hannover (Ausgabe 03/04 2017)
  • Bengsch S, Fischer EC (2017): „Tire as Sensor“ - Industriekooperation am Institut für Mikroproduktionstechnik (IMPT) mit der Continental Reifen GmbHPhi - Produktionstechnik Hannover informiert (Ausgabe 4/2017) More info
  • Beringer S, Dinulovic D, Bengsch S, Haug M, Wurz MC (2017): Anodische Auflösung von Aluminium als Downsizing Technik für Mikro-InduktivitätenMikroSystemTechnik Kongress 2017 · 23. – 25. Oktober 2017 in München (Seite 624-627)
    ISBN: 978-3-8007-4491-6
  • D. Klaas, M.C. Wurz, H.J. Maier (2017): Verfahren und Anlage zur Herstellung eines elektrischen Bauteils sowie ComputerprogrammDE 10 2017 113 212 B3
  • Dencker F, Dreyer L, Müller D, Zernetsch H, Paasche G, Sindelar R, Glasmacher B (2017): A silicone fiber coating as approach for the reduction of fibroblast growth on implant electrodesJournal of Biomedical Materials Research - Part B Applied Biomaterials, Vol 105(8), 2017
    DOI: 10.1002/jbm.b.33798
  • Dencker F, Kolodziejczyk F, Wurz MC (2017): Electrical feed through for tool integrated high temperature applicationsInternational Conference and Exhibition on Integration Issues of Miniaturized Systems 2017, SSI 2017
    ISBN: 978-395735057-2
  • Dencker F, Schlenkrich A, Wurz MC (2017): Press hardening tool integrated thin film temperature sensorProceedings of the 17th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2017
    ISBN: 978-099577510-7
  • Dinulovic D, Shousha M, Haug M, Beringer S, Wurz MC (2017): Comparative Study of Microfabricated Inductors/Transformers for High-Frequency Power ApplicationsIEEE Transactions on Magnetics (Volume: 53, Issue: 11, Nov. 2017) More info
    DOI: 10.1109/TMAG.2017.2734878
  • E. Pyatishev, Y. Enns, I. Komarevtsev, A. Glukhovskoy, M. Wurz (2017): A micromechanical gyroscope with bistable suspension of microdriveProceedings of 24th Saint Petersburg International Conference on Integrated Navigation Systems (ICINS)
    DOI: 10.23919/ICINS.2017.7995646
  • Fischer EC, Glukhovskoy A, Schmelt AS, Twiefel J, Wurz MC (2017): Mikroaktorik für ein Taktiles DisplayProceedings of the MikroSystemTechnik Kongress 2017, München, pp. 515-518 More info
    ISBN: 978-3-8007-4491-6
  • H.J. Maier, M.C. Wurz, S. Beringer (2017): Elektrische Schaltungsstruktur und Verfahren zu deren HerstellungDE 10 2017 108 437 A1
  • Heine H, Matthias J, Grove N, Sahelgozin M, Kassner A, Rechel M, Abend S, Seidel ST, Herr W, Wurz MC, Müller J, Ertmer W, Rasel EM (2017): Atom-Chip based BEC sources for compact and transportable experiments More info
  • Hoff C, Venkatesh A, Schneider F, Hermsdorf J, Bengsch S, Wurz MC, Kaierle S, Overmeyer L (2017): Chip-Bonding of Low-melting Eutectic Alloys on Flexible Substrates by Transmitted Laser Radiation Advanced Optical Technologies, 2017; Vol. 6 (3-4) More info
    DOI: 10.1515/aot-2017-0011
  • Klaas D, Pehrs F, Wurz MC (2017): Reaktives Ionentiefenätzen von Schattenmasken für die Sensordirektabscheidung mit einer neuartigen BeschichtungsanlageProceedings of the MikroSystemTechnik Kongress 2017, München, pp. 680-683 More info
    ISBN: 978-3-8007-4491-6
  • Lehmann R, Wengerowsky D, Schmidt HJ, Kumar M, Niebur A, Costa BFO, Dencker F, Klingelhöfer G, Sindelar R, Renz F (2017): Klimt artwork: red-pigment material investigation by backscattering Fe-57 Mössbauer spectroscopy, SEM and p-XRFScience and Technology of Archaeological Research, Vol 3(2), 2017
    DOI: 10.1080/20548923.2017.1399332
  • Long Y, Dencker F, Isaak A, Li C, Schneider F, Hermsdor J, Wurz MC, Twiefel J, Wallaschek J (2017): Analysis of the Wire/Substrate Interface during Ultrasonic Bonding ProcessIEEE CPMT Symposium Japan (ICSJ), Kyoto, Japan, p. 203-206
  • Long Y, Dencker F, Schneider F, Emde B, Li C, Hermsdorf J, Wurz MC, Twiefel J (2017): Investigations on the oxide removal mechanism during ultrasonic wedge-wedge bonding processProceedings of the 2016 IEEE 18th Electronics Packaging Technology Conference, EPTC 2016
    DOI: 10.1109/EPTC.2016.7861512
    ISBN: 978-150904368-2
  • M. Stompe, M. Wurz (2017): Dicing by "Crack-and-Fracture" - Novel separation method for MEMS substrates
  • M.C. Wurz, H.J. Maier, S. Beringer (2017): Herstellung induktiver elektrischer BauelementeDE 10 2017 124 675 A1
  • Mundotiya BM (2017): Development of Nanocrystalline Soft Magnetic Ni-Fe-W Alloy Films and ImplementatPZH Verlag, Berichte aus dem impt More info
    ISBN: 978-3-95900-149-6
  • Pyatishev E, Enns Y, Komarevtsev I, Glukhovskoy A, Wurz MC (2017): A micromechanical gyroscope with bistable suspension of microdriveProceedings of 24th Saint Petersburg International Conference on Integrated Navigation Systems (ICINS)
    DOI: 10.23919/ICINS.2017.7995646
  • Pyatishev E, Wurz MC, Enns Y, Glukhovskoy A, Fischer EC, Odintsov A, Kleimanov R (2017): Elektromechanischer Mikro-Biegeaktor als optischer ShutterProceedings of the MikroSystemTechnik Kongress 2017, München More info
    ISBN: 978-3-8007-4491-6
  • Rechel M, Taptimthong P, Arndt M, Wurz MC (2017): Mikrofluidische Galvanik zur Herstellung magnetoresistiver SchichtenMikroSystemTechnik Kongress München
    ISBN: 978-3-8007-4491-6
  • Rittinger J (2017): Realisierung von AMR-Sensoren auf umgeformten metallischen SubstratenPZH Verlag, Berichte aus dem impt More info
    ISBN: 978-3-95900-163-2
  • Schmelt AS, Hofmann V, Twiefel J, Fischer EC, Wurz MC (2017): Modeling and Characterization of a Bimodal Tactile DisplayInternational Workshop on Piezoelectric Materials and Applications in Actuators (IWPMA)
  • Stompe M (2017): Präzisionsbearbeitung bearbeitbarer Festkeramiken im ungebrannten Zustand durch Trennschleifen More info
    ISBN: 978-3-95900-127-4
  • van Drunen WJ, Lachheb SK, Glukhovskoy A, Twiefel J, Wurz MC, Lenarz T, Rau TS, Majdani O (2017): Investigation of intracochlear dual actuator stimulation in a scaled test rigCurrent Directions in Biomedical Engineering, Vol 3(2)
    DOI: 10.1515/cdbme-2017-0024
  • van Drunen WJ, Mueller M, Glukhovskoy A, Salcher R, Wurz MC, Lenarz T, Maier H (2017): Feasibility of Round Window Stimulation by a Novel Electromagnetic MicroactuatorBioMed Research International, Vol 2017
    DOI: 10.1155/2017/6369247
  • B. Denkena, M. Wurz, T. Grove, A. Bouabid, E. Asadi (2016): Manufacturing of micro end mills by batch processing of silicon carbide16th International Conference & Exhibition proceedings, pp. 327-328, Notthingham, June 2016
  • B. F. O. Costa BFO, Lehmann R, Wengerowsky D, Blumers M, Sansano A, Rull F, Schmidt H-J, Dencker F, Niebur A, Klingelhöfer G, Sindelar R, Renz F (2016): Klimt artwork (Part II): material investigation by backscattering Fe-57 Mössbauer- and Raman- spectroscopy, SEM and p-XRFHyperfine Interactions, Vol 237(1), 2016 More info
    DOI: 10.1007/s10751-016-1263-z
  • Bengsch S, Rechel M, Asadi E, Wurz MC (2016): Structuring Methods of Plastic Substrates for Electroplating Applications229th ECS Meeting, San Diego, 2016
  • Beringer S, Dinulovic D, Haug M, Rissing L, Wurz MC (2016): Development and Optimization of Thin-Film Technology Based Micro Inductors and TransformersECS Trans. 2016 volume 75,issue 2, 51-58 More info
    DOI: 10.1149/07502.0051ecst
  • C. Hoff, K. Cromwell, J. Hermsdorf, M. Akin, M. C. Wurz, S. Kaierle, H. J. Maier, L. Overmeyer (2016): Transmission laser bonding of low melting eutectic alloysSPIE High-Power Laser Materials Processing: Lasers, Beam Delivery, Diagnostics, and Applications
    DOI: 10.1117/12.2230399
  • Dencker F, Wurz MC, Dubrovskiy S, Koroleva E (2016): An application report: Protective thin film layers for high temperature sensor technologyProceedings of the 2016 IEEE North West Russia Section Young Researchers in Electrical and Electronic Engineering Conference, EIConRusNW 2016
    DOI: 10.1109/EIConRusNW.2016.7448110
    ISBN: 978-150900445-4
  • Dinulovic D, Shousha M, Haug M, Beringer S, Wurz MC (2016): Thin-Film Based Microtransformer Suitable for High Switching Frequency Power ApplicationsPCIM Europe 2016; International Exhibition and Conference for Power Electronics, Intelligent Motion, Renewable Energy and Energy Management; Proceedings of More info
    ISBN: 978-3-8007-4186-1
  • E. Asadi (2016): Massenfertigung für MikrozerspanwerkzeugeProduktionstechnik Hannover informiert (phi), Newsletter Nr. 11
  • H.J. Maier, M.C. Wurz, S. Bengsch (2016): Verfahren zur Anbringung einer elektrischen Mikrostruktur sowie Elastomerstruktur, Faserverbundbauteil und ReifenDE 10 2016 123 795 A1
  • Jogschies L, Rittinger J,Klaas D, Wurz MC (2016): Stress Reduction in sputtered thin NiFe 81/19 layers for Magnetic Field Sensor3rd International Conference on System-integrated Intelligence: New Challenges for Product and Production Engineering, SysInt 2016, Procedia Technology 26, pp. 162-168 More info
    DOI: 10.1016/j.protcy.2016.08.022
  • Johannes Rittinger, Piriya Taptimthong, Lisa Jogschies, Marc C. Wurz, Lutz Rissing (2016): Magnetic microstructure analysis of sputter deposited permalloy thin films on a spin-on polyimide substrateMicrosystem Technologies: 1-6.
    DOI: 10.1007/s00542-015-2792-0
  • Klaas D, Rein M, Wurz MC, Rissing L (2016): Development of a Humidity Sensor Element based on sputter-deposited Thin ZnO-Layers3rd International Conference on System-integrated Intelligence: New Challenges for Product and Production Engineering, SysInt 2016, Procedia Technology 26, pp. 27-34 More info
    DOI: 10.1016/j.protcy.2016.08.005
  • Kusch A, Rissing L, Wurz MC (2016): Concept Development and Evaluation of a hermetically sealed Ceramic PackageInternational Conference and Exhibition on Integration Issues of Miniaturized Systems (SSI2016), München, pp. 413-416
  • L. Rissing, J. Rittinger (2016): Sensoranordnung zum Erfassen einer Bewegung eines Spikes in einem Fahrzeugreifen sowie Verfahren zum Überwachen einer derartigen SensoranordnungDE 10 2016 200 240 A1
  • L. Rissing, M. C. Wurz, M. Stompe (2016): Präzisionsbearbeitung endkonturnaher Keramik im ungesinterten ZustandBeitrag für 67. Ausgabe Jahrbuch Schleifen, Honen, Läppen und Polieren, Vulkan Verlag, Essen, 2016
  • L. Rissing, M.C. Wurz (2016): Elektrisch betriebener Raucherartikel, Plattform dafür und Verfahren zu dessen HerstellungDE102014102442B4
  • M. Akin, L. Rissing, V. Brokbals (2016): Flip and Fuse: A New Technique for Diffusive Coating of Organic, Flexible and Low Transition Temperature Substrates with Inorganic Materials in Roll-to-Roll Processes at Ambient ConditionsIEEE Transactions on Components, Packaging and Manufacturing Technology
    DOI: 10.1109/TCPMT.2016.2580758
  • M. Akin, M. Rezem, M. Rahlves, K. Cromwell, B. Roth, E. Reithmeier, M. Wurz, L. Rissing, H.-J. Maier (2016): Direct hot embossing of micro-elements by means of photostructurable polyimideJournal of Micro/Nanolithography, MEMS, and MOEMS (JM3)
  • M. Akin, M. Steggeman, L. Rissing (2016): Paper-based magnetics: Matching paper with permalloySpringer Cellulose
    DOI: 10.1007/s10570-016-1019-6
  • M. Stompe, E. Asadi, L. Rissing, M. C. Wurz (2016): Investigation for thinning-by-dicing of sintered and unsintered ceramics16th International Conference & Exhibition proceedings, pp. 325-326, Notthingham, June 2016
  • M.C. Wurz, L. Overmeyer, P. von Witzendorf, J. Hermsdorf, S. Bengsch (2016): Verfahren zum Verbinden eines Halbleiterbauelements mit einem Gegenstück sowie Anordnung mit einem HalbleiterbauelementDE 10 2016 123 180 A1
  • Mundotiya BM, Rissing L, Wurz MC (2016): Effect of Substrate Temperature on Magnetic Properties of Electroplated 82Ni-15Fe-3W Alloy FilmsIEEE Trans. on Magnetics, Vol. 52, Issue 8 More info
    DOI: 10.1109/TMAG.2016.2549987
  • Mundotiya BM, Rissing L, Wurz MC (2016): Effect of Annealing Temperature on the Coercivity and the Electrical resistivity of the Electroplated Ni-Fe-W alloy filmECS Trans., Vol. 75, Issue No. 2, Magnetic Materials, Processes, and Devices, pp. 59-65 More info
    DOI: 10.1149/07502.0059ecst
  • P. Freytag, H.J. Maier, L. Rissing, D. Klaas, A. Wienecke (2016): Elektrisches Bauteil, Konstruktionsbauteil eines technischen Gegenstands sowie Verfahren zu deren HerstellungDE 10 2015 106 002 A1
  • Rechel M, Bengsch S, Wurz MC (2016): Electroplating through Fluidic Channels as Production Technology for 3D Interconnect Devices and Sensing StructuresECS Transactions. 2016 volume 75, issue 7, 25-32 More info
    DOI: 10.1149/07507.0025ecst
  • Rechel M, Hofmann V, Twiefel J, Wurz MC (2016): Normal force actuator for a tactile display using a micromechanically built spring element made of PolyimideACTUATOR 2016, 15th International Conference on New Actuators, Bremen More info
    ISBN: 978-3-933339-26-3
  • T. Vergentev, A. Banshchikov, A. V. Filimonov, E. Y. Koroleva, N. Sokolov, M. Wurz (2016): Longitudinal conductivity of LaF3/SrF2 multilayer heterostructuresScience and Technology of Advanced Materials
    DOI: https://doi.org/10.1080/14686996.2016.1246940
  • Taptimthong P, Düsing JF, Rissing L, Wurz MC (2016): Flexible Magnetic Reading/Writing System: Heat-Assisted Magnetic Recording3rd International Conference on System-integrated Intelligence: New Challenges for Product and Production Engineering, SysInt 2016, Procedia Technology 26, pp. 72-78 More info
    DOI: 10.1016/j.protcy.2016.08.011
  • Taptimthong P, Rissing L, Wurz MC (2016): Flexible Magnetic Reading/Writing System: Characterization of a Read/Write Head18. GMS/ITG-Fachtagung Sensoren und Messsysteme (SUM2016), Nürnberg, pp. 769-775 More info
    DOI: 10.5162/sensoren2016/P8.1
  • A. Wienecke, K. Müller-Weihrich, L. Rissing (2015): Investigation of Electrodeposited NIFeMo for Applications as Flux Condensator in Magnetic Field SensorsECS Trans., Vol. 64, Issue No. 31, Magnetic Materials, Processes, and Devices 13, pp. 11-19
    DOI: 10.1149/06431.0011ecst
  • A. Wienecke, L. Rissing (2015): Development of a Magnetic Field Sensor for Temperatures up to 250° COIL Gas Magazine, pp. 36-37
  • A. Wienecke, R. Kruppe, L. Rissing (2015): Influence of Growth Conditions on Exchange Bias of NiMn-based Spin ValvesJournal of Applied Physics, 117, 17C108
    DOI: 10.1063/1.4907231
  • Alexander Belski (2015): Entwicklung und Fertigung eines Flexleiter-basierten magnetischen SchreibkopfesBerichte aus dem impt, IMPT 01/2015 More info
    ISBN: 978-3-95900004-8
  • Anja Wienecke (2015): Entwicklung eines Hochtemperatur-Magnetfeldsensors zur Detektion schwacher FelderBerichte aus dem impt, IMPT 02/2015 More info
    ISBN: 978-3-95900-032-1
  • B. M. Mundotiya, M. C. Wurz, L. Rissing (2015): A Comparative Study of Saturation Induction with Current Density of Electrodeposited Fe-Ni-W AlloysECS Trans., Vol. 64, Issue No. 31, Magnetic Materials, Processes, and Devices 13, pp. 75-83
    DOI: 10.1149/06431.0075ecst
  • D. Dinulovic, A. Gerfer, M. Haug, M. Kaiser, M. C. Wurz, L. Rissing (2015): Improved Microtransformer Design Utilizing Fe-Co Magnetic Core20th Int. Conf. on Magnetism (ICM 2015), Elsevier, Physics Procedia, Vol. 75, pp. 1252-1258
  • D. Hoheisel, S. Holz, L. Rissing (2015): Device for determination a concentration of a chemical substanceUS 10247665 B2
  • D. Klaas (2015): Schlankheitskur für SensorenProduktionstechnik Hannover informiert (phi), Newsletter Nr. 9
  • D. Klaas, A. Wienecke, M.C. Wurz, L. Rissing, P. Freytag, H.J. Maier (2015): Smart System Integration: Moulding of Magnetic Field Sensors into AlSi9Cu3(Fe)-AlloysSMTA Pan Pacific Microelectronics Symposium, Kauai, HI, USA
  • D. Klaas, J. Rittinger, P. Taptimthong, J. F. Düsing, M. C. Wurz, L. Rissing (2015): Verwendung von Schattenmasken zur Direktstrukturierung individuell adaptierbarer Sensorik auf technischen OberflächenMST Kongress 2015, Karlsruhe, 26. - 28. Oktober 2015, pp. 338-341
    ISBN: 978-3-8007-4100-7
  • Dominik Hoheisel (2015): Elektromagnetischer Mikroaktor zur Erzeugung einer FlüssiglinseBerichte aus dem impt, IMPT 03/2015
    ISBN: 978-3-95900-043-7
  • E. Asadi, A. Bouabid, M. C. Wurz, T. Grove, Be. Denkena, L. Rissing (2015): Neuartige Herangehensweise für eine Batchproduktion keramischer Mikrofräswerkzeuge.Diamond Business – Ausgabe 3.2015, S. 12-16, 2015
  • E. Asadi, L. Rissing (2015): Verfahren zur Herstellung eines Mikrozerspanwerkzeugs sowie MikrozerspanwerkzeugAnmeldung: 24.08.2015, DE, Offenlegungsschrift DE102015113998A1
  • E. Asadi, L. Rissing (2015): High Surface Qquality of Sintered Silicon Carbide by Chemical Mechanical PolishingProc. 15th euspen Int. Conf. Leuven, Belgium, pp. 41-42
  • F. Bach, J. Becker, L. Rissing, M.C. Wurz (2015): Beschichtungseinrichtung zum zumindest teilweisen Beschichten einer OberflächeDE 10 2014 004 323 A1
  • Hans H. Gatzen, Volker Saile, Jürg Leuthold (2015): Micro and Nano Fabrication - Tools and ProcessesSpringer Berlin Heidelberg
  • J. Rittinger, D. Klaas, M. C. Wurz, L. Rissing (2015): Hybrider Fertigungsprozess zur Integration von Drucksensoren auf die Oberfläche von TellerfedernMST Kongress 2015, Karlsruhe, 26. - 28. Oktober 2015, pp. 563-566
    ISBN: 978-3-8007-4100-7
  • J. Rittinger, P. Taptimthong, L. Jogschies, M. C. Wurz, L. Rissing (2015): Impact of different polyimide-based substrates on the soft magnetic properties of NiFe thin filmsSPIE Microtechnologies (pp. 95171R-95171R). International Society for Optics and Photonics
  • K. A. Saalbach, M. C. Wurz, J. Twiefel, L. Rissing, J. Wallaschek (2015): Custom Lithium Niobate Transducer Arrays for Detecting Material Distribution of Hybrid WorkpiecesEnergy Harvesting and Systems, Vol. 1
    DOI: 10.1515/ehs-2014-0045
  • L. Jogschies, D. Klaas, R. Kruppe, J. Rittinger, P. Taptimthong, A. Wienecke, L. Rissing, M. C. Wurz (2015): Recent Developments of Magnetoresistive Sensors for Industrial ApplicationsSensors, 15(11), 28665-28689
  • L. Rissing (2015): Verfahren zur Herstellung einer optischen BaueinheitDE 10 2014 105 851 B3
  • L. Rissing, A. Kusch, M. Stompe, S. Zimmermann, E. Bunert (2015): Elektronenemissionselektrode und Verfahren zu deren HerstellungDE 10 2015 118 805 A1
  • L. Rissing, M. Akin (2015): Verfahren und Einrichtung zum Fügen sowie Anordnung DE 102014104510 A1
  • L. Rissing, M. Akin (2015): Verfahren und Einrichtung zum fügen von Strukturen auf einem Substrat sowie Anordnung umfassend solcher gefügten StrukturenVerfahren und Einrichtung zum fügen von Strukturen auf einem Substrat sowie Anordnung umfassend solcher gefügten Strukturen
  • L. Rissing, M.C. Wurz (2015): Elektrisch betriebener Raucherartikel, Plattform dafür und Verfahren zu dessen HerstellungDE 10 2014 102 442 A1
  • L. Rissing, M.C. Wurz, M. Kaiser (2015): Elektronisches BauteilDE 10 2013 013 464 A1
  • L. Rissing, S. Holz, D. Hoheisel (2015): Vorrichtung zum Bestimmen einer Konzentration eines chemischen StoffesDE 10 2014 000 651 B3
  • M. Kaiser, M. Rechel, J. Goldmann, L. Rissing, M. C. Wurz (2015): Design und Herstellung eines akustischen Wandlers mit einer PolymermembranMikrosystemtechnik-Kongress (MST2015), Karlsruhe, Deutschland, VDE Verlag GmbH – Berlin – Offenbach, S. 606-609
    ISBN: 978-3-8007-4100-7
  • M. Kaiser, M. Rechel, M. Stiesch-Scholz, L. Rissing, M. C. Wurz (2015): Fertigung eines Gitterelektroden-Arrays zur selektiven hyperthermischen Manipulation von BiofilmenMikrosystemtechnik-Kongress (MST2015), Karlsruhe, Deutschland, VDE Verlag GmbH – Berlin – Offenbach, S.824-827
    ISBN: 978-3-8007-4100-7
  • M. Rechel, L. Rissing, V. Hofmann, A. Tarnowsky, F.-E. Wolter, J. Wallaschek, M. C. Wurz (2015): Entwurf und Fertigung eines elektromagnetischen Normalkraftaktors in hybrider Bauform für tactile Displays.Mikrosystemtechnik-Kongress (MST2015), Karlsruhe, Deutschland, VDE Verlag GmbH – Berlin – Offenbach, S. 761-764
  • M. Stompe, L. Rissing (2015): Near-Net-Shape Production Of sub-mm Structures in Green/White State Porcelain Ceramics.Proc. 15th euspen Int. Conf. Leuven, Belgium, pp. 333-334
  • M. Stompe, L. Rissing (2015): Vertical Interconnect Access (VIA) in Technical Porcelain for MEMSSmart System Integration, Copenhagen, proceedings 2015, pp. 461-465
  • M. Wurz (2015): Research Activities in the Field of Electromagnetic Energy Harvesting Micro SystemsECS Trans 64 21
    DOI: https://doi.org/10.1149/06431.0021ecst
  • M.C. Wurz (2015): Verfahren zum herstellen eines hermetisch abgeschlossenen GehäusesEP000002883242A1
  • M.C. Wurz, L. Rissing, M. Kaiser (2015): Elektronisches BauteilDE102013013464A1
  • Meriem Akin, Joe Corea, Simon Scott, Ana Claudia Arias, Marc Wurz, Lutz Rissing (2015): Hybrid packaging of circuits and devices onto flexible screen printed electrical interconnectsSMTA Pan Pacific Microelectronics Symposium, Kauai, HI, USA
    DOI: 10.13140/RG.2.1.2064.9763/1
  • Meriem Akin, Lutz Rissing (2015): Paper-based spintronics: magneto-resistivity of permalloy onto paper substrates65th IEEE Electronic Components and Technology Conference, San Diego, USA
    arXiv: http://arxiv.org/abs/1503.04853
  • Meriem Akin, Lutz Rissing (2015): Paper-based Spintronics: The whys and wherefores.Magnetics Magazine, Summer Issue 2015, pp. 12-15 More info
  • Meriem Akin, Sonda Moakhar Ep Bouguecha, Juergen Becker, Lutz Rissing (2015): Eutectic bonding of integrated circuits onto polycarbonate and poly(methyl methacrylate) by means of indium-tin and indium-bismuthIEEE Transactions on Components, Packaging and Manufacturing Technology
    DOI: 10.1109/TCPMT.2015.2420531
  • N. Bader, F. Pape, H. H. Gatzen, G. Poll (2015): Examination of friction and wear of a 100Cr6 ball against a bearing ring in a micro-pin-on-disk testerWIT Transactions on Engineering Sciences, Vol 91: 57 - 68
    DOI: 10.2495/SECM150051
  • P. Taptimthong, J. Rittinger, M. C. Wurz, L. Rissing (2015): Flexibles magnetisches Lese-/Schreibsystem: Design eines SchreibkopfesMST Kongress 2015, Karlsruhe, 26. - 28. Oktober 2015, pp. 684-687
    ISBN: 978-3-8007-4100-7
  • R. Kruppe, L. Rissing (2015): Influence of Deposition Parameters on Mechanical Stress and Magnetic Properties in Thick, Electroplated Co-Fe Flux GuidesECS Trans., Vol. 64, Issue No. 31, Magnetic Materials, Processes, and Devices 13, pp. 33-38
    DOI: 10.1149/06431.0033ecst
  • S. Holz, D. Hoheisel, L. Rissing (2015): Device for determining a concentration of a chemical substanceCA 2935586 A1
  • T. Geipel, L. C. Rendler, M. Stompe, U.h Eitner, L. Rissing (2015): Reduction of Thermomechanical Stress Using Electrically Conductive AdhesivesEnergy Procedia, Volume 77, August 2015, Pages 346-355, ISSN 1876-6102
    DOI: 10.1016/j.egypro.2015.07.049
  • T. Yu. Vergentev, E. Y. Koroleva, L. Rissing, A. V. Filimonov (2015): Analysis of in-Plane Conductivity of La1-xSrxF3-x Superionic Thin Films.Computer Science
    DOI: 10.1007/978-3-319-23126-6-73
  • Yixiao Wang, Meriem Akin, Lisa Jogschies, Ludger Overmeyer, Lutz Rissing (2015): Optodic bonding of optoelectronic components in transparent polymer substrates-based flexible circuit systemsProc. SPIE 9366, Smart Photonic and Optoelectronic Integrated Circuits XVII, 936609 (February 27, 2015)
    DOI: 10.1117/12.2077072
  • A. Wienecke, L. Rissing (2014): Thin film fabrication of highly sensitive earth magnetic field sensorTagungsband Smart Systems Integration 2014, 8th International Conference & Exhibition on integration issues of miniaturized systems - MEMS, NEMS, ICs and electronic components 2014, pp. 595–598
  • A. Wienecke, L. Rissing (2014): Relationship between Thermal Stability and Layer-stack/structure of NiMn-based GMR SystemsIEEE Transactions on Magnetics, Vol. 51, NO. 1
  • A. Wienecke, M. C. Wurz, L. Rissing (2014): Integrierte Sensorik für HochtemperaturumgebungenGMM, VDI/VDE-IT (eds) Tagungsband: MikroSystemTechnikKongress 2013. Von Bauelementen zu Systemen, 14.-16. Oktober 2013 in Aachen, pp. 555–558
  • Andreas Schwenke (2014): Laserbasierte Generierung von Nanokompositmaterialien für medizintechnische Anwendungen(entstanden in Zusammenarbeit mit dem LZH), Berichte aus dem LZH, Band 04/2014, TEWISS-Technik und Wissen GmbH, Garbsen More info
    ISBN: 978-3-944586-75-5
  • Anja Hansen (2014): Adaptive Optik für die vitreo-retinale Femtosekundenlaserchirurgie(entstanden in Zusammenarbeit mit dem LZH), Berichte aus dem LZH, Band 01/2014, TEWISS-Technik und Wissen GmbH, Garbsen More info
    ISBN: 978-3-944586-45-8
  • C. Demminger, C. Klose, P. Taptimthong, H. J. Maier (2014): Material-inherent data storage using magnetic magnesium-cobalt alloysProcedia Technology, Vol. 15, 2014, pp. 187-196, Bremen, Germany,
    DOI: 10.1016/j.protcy.2014.09.071
  • C. Ruffert, N. C. Bigall, L. Rissing (2014): Investigations on the Separation of Platinum Nanoparticles with Magnetic BeadsIEEE Transactions on Magnetics, Vol. 50, Issue 11
    DOI: 10.1109/TMAG.2014.2323306
  • D. Dinulovic, M. Kaiser, A. Gerfer, O. Opitz, M.C. Wurz, L. Rissing (2014): Microtransformer with Closed Fe-Co Magnetic Core for High Frequency Power ApplicationsJournal of Applied Physics 115, 17A317
    DOI: 10.1063/1.4863930
  • D. Dinulovic, M. Kaiser, A. Gerfer, O. Opitz, M.C. Wurz, L. Rissing (2014): Thin-film Microtransformer for High Frequency Power ApplicationsAIP Journal of Applied Physics 115, 17A317
    DOI: 10.1063/1.4863930
  • D. Hoheisel, L. Rissing (2014): Thin Film Fabrication and System Integration Test Run for a Microactuator for a Tuneable LensProc. SPIE 8973, Micromachining and Microfabrication Process Technology XIX, 897305, San Francisco, USA
  • D. Klaas, P. Taptimthong, L. Jogschies, L. Rissing (2014): Component Integrated Sensors: Deposition of Thin Insulation Layers on Functional SurfacesProcedia Technology, Vol. 15, pp. 114–121
    DOI: 10.1016/j.protcy.2014.09.062
  • J. Rittinger, P. Taptimthong, L. Rissing (2014): Soft Magnetic Properties of Permalloy Thin Films on Polyimide-based Substrates10th European Conference on Magnetic Sensors and Actuators 2014, Vienna, July 6-9 2014
  • L. Jogschies, J. Heimann, D. Klaas, L. Rissing (2014): Investigations on Strain Behaviour of Polymer Substrates during a Separation Process2nd International Conference on System-Integrated Intelligence: Challenges for Product and Production Engineering, Procedia Technology, Vol. 15, 2014, pp. 221–229
    DOI: 10.1016/j.protcy.2014.09.075
  • L. Rissing (2014): Leiterplatte und Verfahren zum Herstellen einer LeiterplatteDE 10 2013 007 042 A1
  • L. Rissing, A.Belski, T. Creutzburg, T. Griesbach, M. Kaiser, A. Wienecke, M. C. Wurz (2014): Magnetic MEMSSemicon Russia 2014, St. Petersburg, St. Petersburg State Polytechnical University Journal 5 (205), pp. 21-35
  • L. Rissing, T. Creutzburg, M. Steffens, G. Reuter, T. Lenarz (2014): A Hybrid Concept as a new Approach for the Micro-Production of Magnetic ActuatorsSymposium on Automated Systems and Technologies AST, St. Petersburg, Russia, PZH-Verlag, Berichte aus dem ITA, pp. 89-93, Band4/2014
  • M. Akin, M. Rezem, M. Rahlves, B. Roth, E. Reithmeier, L. Rissing (2014): Direct hot embossing of micro-elements by means of UV-structurable polyimideMNE 2014, Lausanne, CH, September 22-26
    DOI: 10.13140/2.1.1919.1367
  • M. Ben-Salah Akin, E. Pichler, L. Rissing (2014): Design Guidelines for Efficient eutectic soldering onto low Tg polymeric multimode light waveguides2nd Int. Conf. SysInt 2014, Bremen, Germany, pp. 167-176
    DOI: 10.1016/j.protcy.2014.09.069
  • M. Ben-Salah Akin, W. Heumann und L. Rissing (2014): Enabling Eutectic Soldering of 3D Opto-Electronics onto Low Tg Flexible InterposersProceedings of 64th IEEE ECTC, Florida, pp. 1595-1600,
    DOI: 10.1109/ECTC.2014.6897507
  • M. Rechel, T. Creutzburg, V. Hofmann, A. Tarnowsky , F.-E. Wolter , J. Wallaschek , L. Rissing (2014): Normal force actuator for a tactile display using normal and shear forces to perform haptic skin stimulationMNE 2014, Lausanne, CH
  • M. Stompe, L. Rissing (2014): Ultra-precision Manufacturing of Porcelain-based MEMSProc. 8th Int. Conf. & Exh. on Integration Issues of Miniaturized Systems - MEMS, NEMS, ICs and Electronic Components, Vienna 2014, Vienna, Austria, pp. 573-577
  • P. Taptimthong, J. Rittinger, M. C. Wurz, L. Rissing (2014): Flexible Magnetic Writing / Reading System: Polyimide Film as Flexible SubstrateProcedia Technology, Vol. 15, 2014, pp. 230–237
    DOI: 10.1016/j.protcy.2014.09.076
  • P. von Witzendorff, M. Stompe, A. Moalem, S. Cvetkovic, U. Stute, L. Overmeyer, L. Rissing (2014): Dicing of Hard and Brittle Materials with On-Machine Laser-Dressed Metal-Bonded Diamond BladesPrecision Engineering Journal, Vol. 38, Issue 1, pp. 162–167
    DOI: 10.1016/j.precisioneng.2013.08.007
  • R. Kruppe, A. Wienecke, L. Rissing (2014): Optimization of Mechanical and Magnetic Properties in High, Electroplated Co-Fe-Flux GuidesIEEE Transactions on Magnetics, Vol. 50, NO. 4
  • S. Holz, S. Kiricenko, L. Rissing (2014): Integration of PVDF (Polyvinylidene Fluoride) in MEMS ProductionECS Trans. 2014 64(1): 189-195
    DOI: 10.1149/06401.0189ecst
  • A. Belski, M. Wurz, J. Rittinger, L. Rissing (2013): Development, Micro Fabrication and Test of Flexible Magnetic Write Head for Gentelligent ApplicationsMicroelectronic Engineering Journal, (spec. issue), Proc. 38th Int. Conf. on Micro & Nanoengineering, Toulouse, France
  • A. Belski, P. Taptimthong, M. C. Wurz, L. Rissing (2013): High permeability flexible bulk material for magnetic micro head applicationsJEMS 2012, EPJ Web Conferences, Volume 40, Parma, Italy
    DOI: 10.1051/epjconf/20134016003
  • C. Ruffert, J. Silomon, L. Rissing (2013): Fabrication of Paper-based Microfluidic Devices with Stamps39th Int. Conf. on Micro- and Nanoengineering (MNE), London, UK, Book of abstracts, p. 84
  • C. Ruffert, Q. Ramadan, M.A.M. Gijs (2013): Fabrication of a High Aspect Ratio (HAR) Micropillar Filter for a Magnetic Bead-based ImmunoassayMicrosystem Technologies, Springer Verlag, Heidelberg, Germany
    DOI: 10.1007/s00542-013-1964-z
  • C. Ruffert, Q. Ramadan, M.A.M. Gijs (2013): Fabrication of a High Aspect Ratio (HAR) Micropillar Filter for a Magnetic Bead-based ImmunoassayHARMNST2013, Berlin, Book of Abstracts pp. 124-125
  • C. Ruffert, S. Müller, L. Rissing (2013): Mikrofluidische Partikelmanipulation mit elektrischen FeldkräftenProc. Mikrosystemtechnik-Kongress (MST2013), Aachen, Deutschland, VDE Verlag GmbH, pp. 399-402
    ISBN: 978-3-8007-3555-6
  • D. Dinulovic, M. Kaiser, A. Gerfer, O. Opitz, M.C. Wurz, L. Rissing (2013): Thin-film Microtransformer for High Frequency Power ApplicationsJoint European Magnetic Symposia 2013 (JEMS), Rhodos, Greece, p. 153
  • D. Dinulovic, M. Kaiser, A. Gerfer, O. Opitz, M.C. Wurz, L. Rissing (2013): MEMS Fabricated Microtransformer with Closed Fe-Co Magnetic Core for High Frequency Power Applications58th Magnetism & Magnetic Materials (MMM2013), Denver CO, USA, p. 352
  • D. Hoheisel, C. Kelb, M. Wall, B. Roth, L. Rissing (2013): Fabrication of Adhesive Lenses Using Free Surface ShapingJ. Europ. Opt. Soc. Rap. Public., Vol. 8, 13065
  • D. Hoheisel, L. Rissing (2013): Design und Prozessfolge zur Herstellung eines elektromagnetischen Mikroaktors zur Erzeugung einer Flüssigkeitslinse für den Einsatz in einem MikroskopMikrosystemtechnik-Kongress (MST 2013), Aachen, Deutschland, pp. 500-503
    ISBN: 978-3-8007-3555-6
  • D. Hoheisel, L. Rissing (2013): Thin Film Fabrication and System Integration Test Run for a Microactuator for a Tuneable LensProc. SPIE Photonics West 2013, San Francisco, USA
  • D. Hoheisel, R. Kruppe, L. Rissing (2013): Design, Simulation and Fabrication Sequence of an Electromagnetic Microactuator for a Liquid LensM3-19, soft magnetic materials conference 2013
  • Hans H. Gatzen (2013): (Invited) Magnetic Micro and Nano Actuator SystemsMagnetic Materials, Processes, and Devices 12, ECS Transactions Volume 50, Issue 10, The Electrochemical Society, Pennington, NJ, USA
    DOI: 10.1149/05010.0119ecst
  • J. Rittinger, S. Cvetkovic, L. Rissing (2013): Investigations on the Removal Mechanisms of Diverse Alumina Based Polishing Slurries for Chemical Mechanical Polishing of Electro-plated NiFe 45/55Microelectronic Engineering Journal, (spec. issue), Proc. 38th Int. Conf. on Micro & Nanoengineering, Toulouse, France
  • L. Rissing, T. Griesbach (2013): Struktureinrichtung mit einem Bauelement, Vorrichtung zur Applikation des Bauelements, Verfahren zur Herstellung der Strucktureinrichtung und Verfahren zur Applikation des BauelementsDE 102011108981 A1
  • L. Rissing, U. Stute, M. Stompe, S. Cvetkovic, P. von Witzendorff (2013): Schleifscheibenkonditionierung mittels Laserstrahlung und kontaktlose Werkzeugüberwachung für die Ultrapräzisionsbearbeitung von spröd-harten MaterialienBeitrag für 66. Ausgabe Jahrbuch Schleifen, Honen, Läppen und Polieren, Vulkan Verlag, Essen, 2013 (erschienen Nov. 13)
    ISBN: 9783802729713
  • M. Kaiser, E. Delaygina, G. Steinhoff, L .Rissing (2013): Fertigung eines Mikroaktors zur Manipulation von Nanopartikeln auf einem GlassubstratMikrosystemtechnik-Kongress (MST 2013), Aachen, Deutschland, pp. 496-499
    ISBN: 978-3-8007-3555-6
  • M. Stompe, S. Cvetkovic, L. Rissing (2013): Dicing study for high productive micro production of porcelain-based ceramic for MEMSProc.13th euspen Int. Conf., Berlin, Germany, pp. 92-95
  • M. Stompe, S. Cvetkovic, L. Rissing (2013): Dicing concept for mechanical structured materials and multi-layer-speciemsProc. 13th euspen Int. Conf., Berlin, Germany, pp.88-91
  • Markus Schomaker (2013): Plasmonenbasierte Zelltransfektion im Hochdurchsatz mittels ultrakurzer Laserpulse(entstanden in Zusammenarbeit mit dem LZH), Berichte aus dem LZH, Band 03/2013, TEWISS-Technik und Wissen GmbH, Garbsen More info
    ISBN: 978-3-944586-15-1
  • Q. Ramadan, H. Jafarpoorchekab, Ch. Huang, P. Silacci, S. Carrara, G. Koklü, J. Ghaye, J. Ramsden, C. Ruffert, G. Vergeres, M.A.M. Gijs (2013): NutriChip: nutrition analysis meets microfluidicsLab on a Chip, Vol. 13, pp. 196-203
  • R. Kruppe, A. Wienecke, L. Rissing (2013): Optimization of mechanical and magnetic properties in high, electroplated Co-Fe-flux guidesSoft Magnetic Materials Conference 2013 (SMM 2013), Budapest, Ungarn
  • S. Cvetkovic, R. Kruppe, J. Rittinger, L. Rissing (2013): Technology Development for Packaging of the GMR-Sensor via Eutectic BondingSmart System Integration SSI 2013, paper 107, Amsterdam, The Netherlands
    ISBN: ISBN 978-3-8007-3490-0
  • S. Holz, L. Rissing (2013): New Concept of integrating Nanowires in Technical Devices by Anodization of AluminiumProc. 13th euspen Int. Conf., Berlin, Germany, pp. 323-326
  • S. Krongelb, C. Bonhôte, S. R. Brankovic, H. H. Gatzen, P. J. Hesketh, Y. Kitamoto, T. Osaka, W. Schwarzacher, G. Zangari (Editors) (2013): Magnetic Materials Processes and Devices 12. ECS Transactions, Volume 50, Issue 10The Electrochemical Society, Pennington, NJ, USA
  • T. Creutzburg, S. Cvetkovic, J. Rittinger, L. Rissing (2013): Investigations on Eutectic Bonding of Polyimide Structures for MEMS ApplicationsSmart System Integration (SSI 2013), paper 106, Amsterdam, The Netherlands
    ISBN: 978-3-8007-3490-0
  • Tim Griesbach (2013): Technologieentwicklung zur Fertigung von Mikrosensoren auf flexiblen TrägersubstratenBerichte aus dem impt 01/2013, TEWISS - Technik und Wissen GmbH, Garbsen More info
    ISBN: 978-3-944586-40-3
  • A. Belski, M.C. Wurz, S. Cvetkovic, L. Rissing (2012): Surface Preparation for Sensing the Kerr-effect on NiFe81/19 LayersProc. 12th euspen Int. Conf. 2012, Stockholm, Sweden, pp. 279-282
  • A. Belski, P. Taptimthong, M. Wurz, L. Rissing (2012): Integration of the Read-after-write Method for GentelligentTM Applications1st Joint International Symposium on System-Integrated Intelligence (Sysint 2012), Hanover, Germany, pp. 49-51
  • C. Kelb, D. Hoheisel, E. Reithmeier, L. Rissing (2012): Optical and Mechanical Properties of a Polyimide Membrane for Tunable LensesProc. SPIE, 8489, Polymer Optics and Molded Glass Optics: Design, Fabrication and Materials II, 84890F
    DOI: 10.1117/12.929773
  • D. Hoheisel, L. Rissing (2012): Thermal and Magneto-optical Characterization of Optimized Stator Systems for a Ferrofluidic MicroactuatorProc. 13th Int. Conf. Actuator, Bremen, Germany, pp. 693-695
  • D. Hoheisel, L. Rissing (2012): System Integration of a Ferrofluidic MicroactuatorTagungsband Fünfter Workshop Optische Technologien – HOT 2011, Hanover, Germany, pp. 135-139
  • J. Chen, M. Wurz, L. Rissing (2012): Designs and Characterizations of Soft Magnetic Flux Guides in a 3D magnetic field sensorIEEE Transaction on Magnetics, Vol. 48, No. 4, pp. 1481-1484
  • J. Chen, S. Cvetkovic, L. Rissing (2012): Integration of Electroplated CoFe in Trench Type Flux Guides for Magnetic MEMS ApplicationsTrans. 222nd ECS Meeting, Honolulu, Hawaii, Vol. 50, No. 10, pp. 157-166
  • J. Rittinger, S. Cvetkovic, L. Rissing (2012): Slurry Comparison for Chemical-mechanical Polishing (CMP) of Silicon Carbide (SiC)Proc. 12th euspen Int. Conf. 2012, Stockholm, Sweden, pp. 145-148
  • L. Rissing, M. Wurz, S. Cvetkovic, F.-W. Bach (2012): Electroplating of Cu/Sn Layers for Hermetic Encapsulation for Vacuum ApplicationsTrans. 222nd ECS Meeting, Honolulu, Hawaii, Vol. 50, No. 10, pp. 207-216
  • M. Kaiser, J. Chen, P. Taptimthong, L. Rissing (2012): Separation of Magnetic Nano Beads by Using Soft Magnetic Flux ConcentratorsTrans. 222nd ECS Meeting, Honolulu, Hawaii, 50, No. 10, pp. 263-270
  • M. Kaiser, M.C. Wurz, S. Cvetkovic, L. Rissing (2012): Embossing of Soft-magnetic Structures and Influence on Magnetic PropertiesTrans. 222nd ECS Meeting, Honolulu, Hawaii, Vol. 50, No. 10, pp. 189-197
  • M. Stompe, P. v. Witzendorff, S. Cvetkovic, A. Moalem, U. Stute, L. Rissing (2012): Concept for Performance-Enhancement of Ultra-Precision Dicing for Bulk Hard and Brittle Materials in Micro Applications by Laser DressingMicroelectronic Engineering Journal (spec. issue), Proc. 37th Int. Conf. on Micro & Nanoeng., Berlin, Germany, Vol. 98, pp. 544-547
  • M. Stompe, S. Cvetkovic, P. Taptimthong, L. Rissing (2012): Ultra-precision Dicing Process Separation: Effect of Circumferential and Sidewall GrindingProc. 12th euspen Int. Conf. 2012, Stockholm, Sweden, pp. 169-172
  • M. Stompe, S. Cvetkovic, P. Taptimthong, L. Rissing (2012): Dressing Criteria for Inline Laser Dressing of Metal-bonded Dicing BladesProc. 12th euspen Int. Conf. 2012, Stockholm, Sweden, pp. 201-204
  • M. Wurz, A. Shaganov, L. Rissing, A. Filimonov, S. Vakhrushev (2012): Investigation of the Crystallization of FiFe81/19 Depending on the Annealing TemperatureTrans. 222nd ECS Meeting, Honolulu, Hawaii, Vol. 50, No. 10, pp. 147-156
  • M.C. Wurz, J. Chen, L. Rissing (2012): Magnetfeld-MessanordnungWO 2012116933 A1
  • M.C. Wurz, L. Rissing, S. Zimmermann (2012): Verfahren zum herstellen eines hermetisch abgeschlossenen GehäusesWO 2014023320 A1
  • S. Cvetkovic, R. Kruppe, L. Rissing (2012): Thinning Process Optimization for an Ultra-thin 3D Magnetic Field SensorSmart Systems Integration (SSI 2012), 6th Int. Conf. & Exhibition, Zurich, Swiss, paper 17
    ISBN: 978-3-8007-3423-8
  • T. Creutzburg, L. Rissing, T. Lenarz, G. Reuter (2012): Design and Fabrication of a Microactuator for a Hearing AidInt. Journal of Applied Electromagnetics and Mechanics, Vol. 39, pp. 471-477
  • T. Griesbach, M. Wurz, L. Rissing (2012): Development, fabrication, and test of a modular eddy current micro sensor on a flexible polymer foilProduct Engineering Research and Development
    DOI: DOI 10.1007/s11740-012-0415-5
  • T. Schultheis, D. Hoheisel, W. Xiao, L. Spani Molella, E. Reithmeier, L. Rissing, S. Hardt (2012): Performance of an Adaptive Liquid Microlens Controlled by a Microcoil ActuatorMicrofluidics and Nanofluidics, Springer Verlag, Vol. 13, Issue 2, pp 299-308
    DOI: 10.1007/s10404-012-0961-3
  • A. Belski, M. C. Wurz, L. Rissing (2011): Readout of Magnetic Tracks using Soft Magnetic MaterialAbstracts Book, SMM 2011, Kos Island, Greece, p. 481
  • A. Belski, M. Wurz, L.Rissing (2011): Redesign and Fabrication of a Magnetic Head for GentelligentTM Products11th Euspen International Conf. 2011, Como, Italy, 2011
  • A. Belski, M.C. Wurz, L. Rissing (2011): Process Development of an Electoplated Permalloy Layer on Magnetic Magnesium for Gentelligent ProductsECS Transactions, Vol. 33, Issue 34, Magnetic MEMS and Devices, 2011, pp. 93-104
  • C. Leng, C. Ruffert, L. Rissing (2011): Investigations on Micromolds for Dispensing Low Viscosity Epoxies for MEMS ApplicationsECS Transactions, Vol. 33, Issue 34, Magnetic MEMS and Devices, pp. 81-92
  • C. Ruffert, F. Pape, L. Rissing (2011): Investigations on Silicon Nitride Thin Films Deposited be PECVDEuropean Congress and Exhibition on Advanced Materials and Processes (Euromat 2011), Montpellier, France, 2011
  • C. Ruffert, J. Chen, L. Rissing (2011): Soft Magnetic Thin Films for MEMS ApplicationsEuropean Congress and Exhibition on Advanced Materials and Processes (Euromat 2011), Montpellier, France, 2011
  • D. Hoheisel, C. Leng, L. Rissing (2011): Simulation for Optimization of a Ferrofluidic MicroactuatorTagungsband Vierter Workshop Optische Technologien – HOT 2010, Hanover, Germany, pp. 310-314, 2011
  • D. Hoheisel, L. Rissing (2011): Characterization of a Stator System for a Ferrofluidic Microactuator and Design OptimizationProc. of Smart System Integration 2011, Dresden (2011)
    ISBN: 978-3-8007-3324-8
  • D. Hoheisel, T. Schultheis, L. Spani Molella, E. Reithmeier, L. Rissing (2011): Einsatz elektromagnetischer Antriebe in fluidischen Systemen5. Kolloquium Mikroproduktion, Karlsruhe, Deutschland, 2011
  • D. Hoheisel, T. Schultheis, L. Spani Molella, E. Reithmeier, L. Rissing (2011): Konzept und Fertigung von Komponenten eines ferrofluidischen MikroaktorsMikrosystemtechnik-Kongress (MST2011), Darmstadt, Deutschland, 2011
  • D. Miletic, J. Gäbler, L. Rissing (2011): Precision Grinding with CVD Diamond Coated Dicing Blades11th Euspen International Conf. 2011, Como, Italy, 2011
  • D. Miletic, S. Cvetkovic, L. Rissing (2011): Strukturabhängige Adaption von Waferhalter und Polierscheibe beim Chemisch-Mechanischen Polieren (CMP) von MEMS zur Verbesserung der globalen Planarität65. Ausgabe Jahrbuch Schleifen, Honen, Läppen und Polieren (SHLP), Vulkan Verlag,Essen, Kap. 3, S. 343-358
  • F. Pape, S. Cvetkovic, A. Kiesow, A. Kailer, L. Rissing (2011): Microtribological Evaluation of Unlubricated Sliding Bearings with Thin Si3N4 and PTFE Coatings18th Int. Conf. Wear of Materials. 3rd European Conf. on Tribology (ECOTRIB2011), Vienna, Austria, 2011, Vol. 2, pp. 747-752
  • F. Pape, S. Cvetkovic, L. Rissing (2011): Investigations on Sliding Bearings for Mirco ActuatorsProc. 11th Euspen International Conf. 2011, Como, Italy, pp. 72-75, 2011
  • H. H. Gatzen (2011): (Invited) Active Magnetic Micro and Nano Electro-Mechnical Systems (MNEMS)Magnetic Materials Processes and Devices 11. ECS Transactions, Volume 33, Issue 34, The Electrochemical Society, Pennington, NJ, USA
    DOI: 10.1149/1.3573588
  • H.H. Gatzen, T. Griesbach, M. C. Wurz, L. Rissing (2011): Considerations on Ultra-thin Substrateless Micro and Nano SystemsProc. ASME2011 & Exp. IMECE2011, Denver, CO, USA, 2011
  • Hansen, Stefan (2011): Fertigung und Charakterisierung eines modularen Mikro-Reluktanzschrittmotors More info
  • J. Chen, C. Ruffert, L. Rissing (2011): Fertigung und Charakterisierung hartmagnetischer DünnfilmschichtenMikrosystemtechnik-Kongress (MST2011), Darmstadt, Deutschland, 2011
  • J. Chen, D. Hoheisel, L. Rissing (2011): Sputtering of SmCo Thin Films and Integration into a Ferrofluidic MicroactuatorIEEE International Magnetics Conf. (Intermag 2011), Taipei, Taiwan, 2011
  • J. Chen, L. Rissing (2011): Electroplating Hard Magnetic SmCo for Magnetic Microactuators ApplicationsJournal of Applied Physics, Vol 109, No. 7, 2011
  • L. Overmeyer, L. Rissing, M. Dumke, S. Franke, T. Griesbach, A. Belski (2011): Component-Integrated Sensors and Communication for Gentelligent DevicesProc. IEEE Int. Conf. on Industrial Engineering and Engineering Management, Singapore, pp. 499-503
    DOI: 10.1109/IEEM.2011.6117967
  • M. C. Wurz, P. Wagner, L. Rissing, J. Caro (2011): Assembly and Embedding of Nanoparticles in a Ni-matrix.ECS Transactions, Vol. 33, Issue 34, Magnetic MEMS and Devices, 2011, pp. 33-42
    DOI: 10.1149/1.3573586
  • M. Kaiser, E. Flick, L. Rissing (2011): Mikroaktor zur Manipulation von Nanopartikeln zum GentransferMikrosystemtechnik-Kongress (MST2011), Darmstadt, Deutschland, 2011
  • M. Stompe, S. Cvetkovic, F. Pape, L. Rissing (2011): Mechanical Characterization of Machining Results for Sintered Silicon-Carbide (SSiC)Proc. 11th Euspen International Conf. 2011, Como, Italy, pp. 357-360, 2011
  • M. Stompe, S. Cvetkovic, L. Rissing (2011): Blade Wear and Sidewall Quality by Dicing of Sintered Silicon Carbide (SSiC)Proc. 11th Euspen International Conf. 2011, Como, Italy, pp. 333-336, 2011
  • M. Wurz, L. Rissing (2011): Einsatz von Kupfer und Kupferlegierungen in der MikrosystemtechnikHochschulKupferSymposium, Hannover, Deutschland, Fachzeitschrift Metall, 65. Jg., Nov. 2011, S. 504-506
  • Pape, Florian (2011): Mikrotribologische Untersuchungen an Wälzlagern mit polymeradditiver Fettschmierung More info
  • S. Cvetkovic, A. Wienecke, L. Rissing (2011): Fabrication of MEMS on Printed Circuit BoardsECS Transactions, Vol. 33, Issue 34, Magnetic MEMS and Devices, 2011, pp. 69-80
  • S. Cvetkovic, C. Morsbach, L. Rissing (2011): Ultra-precision Dicing and Wire Sawing of Silicon Carbide (SiC)“Microelectronic Engineering” Journal (spec. issue), Proc. 36th International Conf. on Micro&Nanoengineering (MNE10), Genoa, Italy, Vol.88, Nr. 9, 2011, pp. 2500-2504
  • S. Cvetkovic, L. Rissing (2011): Planarization of Refrigerated Material Composites for MEMSProc. 11th euspen Int. Conf. 2011, Como, Italy, pp. 188-191
  • S. Cvetkovic, M. Stompe, L. Rissing (2011): Einfluss verschiedener Blatteigenschaften auf die Schnittqualität beim Präzisionstrennschleifen von mikrosystemtechnischen Materialienwt Werkstatttechnik online, Springer VDI Verlag, Ausgabe 1f1/12 des Jahrgangs 2011
  • S. Cvetkovic, M. Stompe, L. Rissing (2011): Ultrapräzisionstrennschleifen von Mikrosystemenwt Werkstattstechnik online, Springer-VDI-Verlag, Jahrgang 101 (2011) H.11/12, S.753-757
  • S. Krongelb, S. R. Brankovic, Y. Kitamoto, W. Schwarzacher, C. Bonhôte, H. H. Gatzen, T. Osaka, G. Zangar (Editors) (2011): Magnetic Materials Processes and Devices 11. ECS Transactions, Volume 33, Issue 34The Electrochemical Society, Pennington, NJ, USA
  • T. Creutzburg, S. Cvetkovic, L. Rissing (2011): Herstellung eines Mikroaktors zur Anregung der Perilymphe bei SchwerhörigkeitMikrosystemtechnik-Kongress (MST2011), Darmstadt, Deutschland, 2011
  • T. Griesbach, M. C. Wurz, L. Rissing (2011): Application of Sacrificial Layers fort he Modular Micro Sensor Fabrication on a Flexible Polymer SubstrateProc. CD, Sensor + Test Conf. 2011 – Sensor, Opto, IRS2, Nuremberg, Germany
    ISBN: 978-3-9810993-9-3
  • T. Griesbach, M. C. Wurz, L. Rissing (2011): Modular Eddy Current Micro SensorIEEE International Magnetics Conf. (Intermag 2011), Taipei, Taiwan, 2011
  • T. Griesbach, M. C. Wurz, L. Rissing (2011): Design and Fabrication of a Modular Eddy Current Micro SensorProc. 29th Progress In Electromagnetics Research Symposium (PIERS 2011), Marrakesh, Morocco, pp. 752-755, 2011
  • Traisighkachol, Ornwasa (2011): Fertigung von Werkzeugelektroden für die Mikrofunkenerosion (µ EDM) More info
  • Wurz, M. C., Ruffert, C., Rissing, L. (2011): Lehrbuch Mikrotechnologie : für Ausbildung, Studium und Weiterbildung (Kapitel 12: Ätzprozesse)Fachbuchverlag Leipzig im Carl-Hanser-Verlag, München
    ISBN: 978-3-446-42560-6
  • A. Wienecke, C. Ruffert, H.H. Gatzen (2010): A Programm to Attract Females to Hightech Fields like Nanotechnology and OpticsProc. CD, IAMOT 2010, Cairo, Egypt, 2010
  • B. Spasova, H.H. Gatzen (2010): Simulation of an Improved Microactuator with Discrete MSM ElementsMaterials Science Forum Vol. 635, pp. 181-186, Trans Tech Publications, Switzerland
  • B. Spasova, H.H. Gatzen (2010): Simulation of an Improved Microactuator with Discrete MSM ElementsMaterials Science Forum Vol. 635, pp. 181-186, Trans Tech Publications, Switzerland, 2010
  • B. Spasova, M. C. Wurz, C. Ruffert, J. Norpoth, Ch. Jooss, H.H. Gatzen (2010): Using Magnetooptical Measurements for the Evaluation of a Hybrid Magnetic Shape Memory (MSM) Based MicroactuatorTransactions on Magnetics, Vol. 46, Issue 6, pp. 2256-2259, 2010
  • B. Wielage, T. Mäder, D. Weber, A. Belski, H.H. Gatzen (2010): Analyses of Sensor Films on a Carbon FibreJournal FIB, 2010 (s.dazu auch Nr. 283!?)
  • B. Wielage, T. Mäder, D. Weber, A. Belski, H.H. Gatzen (2010): Analyses of Sensor Films on a Carbon FibreJournal of Materials Science and Engineering
  • B. Wielage, T. Mäder, D. Weber, A. Belski, H.H. Gatzen (2010): Analyses of Sensor Films on a Carbon FibreJournal of Materials Science and Engineering, Sept. 2010, Vol. 4, No. 9, (Serial No. 34), ISSN 1934-8959, USA, 2010
  • C. Ruffert, H. Saalfeld, H.H. Gatzen (2010): Buchbeitrag PARMA – Slider with Integrated Microactuator (SLIM) for Second Stage Actuation in Hard Disk Drives. pp. 423-440
  • Cvetkovic, Srecko (2010): Chemisch-Mechanisches Polieren (CMP) von Mirkosystemen More info
  • D. Dinulovic, C. Ruffert, H. Saalfeld, H.H. Gatzen (2010): Evaluation of a Slider with an Integrated Magnetic Mircroactuator Using Laser Doppler VibrometryProc. 12th Int. Conf. on New Actuators 2010, Bremen, Germany, pp. 774-777, 2010
  • D. Hoheisel, C. Leng, H.H. Gatzen (2010): Design, Modeling and Fabrication Sequence of a Ferrofluidic MicroactuatorProc. 12th Int. Conf. on New Actuators 2010, Bremen, Germany, pp. 361-364, 2010
  • D. Hoheisel, S. Cvetkovic, W. Kurniawan, E. Obermeier, H.H. Gatzen (2010): System Integration Challenges for a Slider with an Integrated MicroactuatorTransactions on Magnetics, Vol. 46, Issue 6, pp. 2163-2166, 2010
  • F. Klocke, H.H. Gatzen, S. Kamenzky, O. Traisigkhachol, J. Dieckmann, M. Garzon (2010): Micro Electro Discharge Machining (μEDM) with Novel Tool ElectrodesProc. 16th ISEM 2010, Press Shanghai Jiaotong University Press, ISBN 9787313056306, pp.577-582, Shanghai, China, 2010
  • F. Pape, C. Ruffert, O. Traisigkhachol. A. Waldschick, M. Feldmann, T. Kohlmeier, V. Seidemann, S. Büttgenbach, H.H. Gatzen (2010): SFB 516 Buchbeitrag B7 - Fabrication of Excitation Coils for Electromagnetic Micro Actuators. pp.189-206
  • F. Pape, L. Rissing, H.H. Gatzen (2010): Fabrication and Tribological Investigation of Fullerene C60/C70 Reinforced Epoxy Resin SU-8TMTagungsband, Tribologie-Fachtagung, Göttingen, Germany, 2010
  • F. Pape, T. Creutzburg, and H.H Gatzen (2010): Qualification of Membranes for MEMS Applications Applying NanoindentationNanobrücken / Hysitron User Meeting, pp. 57-58, Saarbrücken, Germany, 2010
  • Flick, Eva (2010): Elektromagnetischer Mikroaktor zur Nanopartikel-Manipulation in der Biomedizin More info
  • H.-H. Gatzen, E. Flick, G. Steinhoff (2010): Elektromagnetisches Mikrosystem zur Manipulation magnetischer Mikro- oder NanoperlenDE 102009004086 A1
  • H.H. Gatzen (2010): Electromagnetic Micro and Nano ActuatorsProc. 12th Int. Conf. on New Actuators 2010, Bremen, Germany, pp.346-351, 2010
  • H.H. Gatzen, P. Freitas, E. Obermeier, J. Robertson (2010): Second Stage Actuation for Hard Disc Drives through MEMS TechnologyIEEE Transactions on Magnetics, Vol. 46, No. 3, pp. 782- 789, 2010
  • Hahn, Matthias (2010): Fertigung und Untersuchungen zur Optimierung eines linearen Mikro-Hybridschrittmotors More info
  • J. Chen, E. Flick, H.H. Gatzen (2010): Minimizing Oxygen Inclusion when Electroplating High Saturation Density CoFe for Microelectromechanical SystemJournal of Applied Physics 107, Issue 9, pp. 09A311-09A311-3, 2010
  • J. Chen, M. Bedenbecker, T. Budde, M. Föhse, C. Ruffert, R. Bandorf, M. Balke, H. Lüthje, B. Majjer, G. Bräuer, H.H. Gatzen (2010): SFB 516 Buchbeitrag B1 – Fabrication of Magnetic Layers for Electromagnetic Microactuators. pp. 167-188
  • K.-H. Wu, E. Gastan, M Rodman, B.-A. Behrens, Fr.-W. Bach, H.H. Gatzen (2010): Development and Application of Magnetic Magnesium for Data Storage in Gentelligent ProductsJournal of Magnetism and Magnetic Material 322, Elsevier, pp. 1134-1136, 2010
  • M. C. Wurz, C. Ruffert, H.H. Gatzen (2010): Methodology for Concurrent Nano-Engineering. Proc. CD, IAMOT 2010, Cairo, Egypt, 2010Proc. CD, IAMOT 2010, Cairo, Egypt, 2010
  • O. Traisigkhachol, H. Schmid, M. C. Wurz, H.H. Gatzen (2010): Applying SU-8TM to the Fabrication of Micro Electro Discharge Machining ElectrodesMicrosystem Technologies, Springer Verlag, Berlin, Heidelberg, New York, Vol. 16, No. 8-9, pp. 1445-1450, 2010
  • O. Traisigkhachol, H.H. Gatzen (2010): Fabrication of Electroplated Cu Tool Electrodes for μ-EDM using a Si MicromoldProc. EUSPEN 2010, Delft, The Netherlands, pp. 355-358, 2010
  • O. Traisigkhachol, H.H. Gatzen (2010): High Aspect Ratio Micromolds for the Electroplating of Micro Electro Discharge Machining ToolsMicrosystem Technologies, Springer Verlag, Berlin, Heidelberg, New York, Vol. 16, No. 8-9, pp. 1377-1383, 2010
  • R. Bandorf, D. Paulkowski, F. Pape, H.H. Gatzen, G. Bräuer (2010): SFB 516 Buchbeitrag C1 R – Wear Behaiour in Microactuator Interfaces. pp. 69-88
  • S. Cvetkovic, F. Pape, H.H. Gatzen (2010): Creating Solid State Micro Joints through Micro MachiningProc. EUSPEN 2010, Delft, The Netherlands, pp. 189-192, 2010
  • S. Hansen, J. Norpoth, Ch. Jooss, L. Rissing, H.H. Gatzen (2010): Magneto-optical Characterization of the Stator of a Variable Reluctance (VR) Micro Step MotorProc. 12th Int. Conf. on New Actuators 2010, Bremen, Germany, pp. 706-709, 2010
  • S. Hansen, M. Hahn, M. Föhse, H.H. Gatzen (2010): SFB 516 Buchbeitrag A1 – Development and Fabrication of Linear and Multi-Axis Microactuators. pp. 225-244
  • S. Hansen, Z. Celinski, H.H. Gatzen (2010): Optimization of the Magnetic Performance of a Linear Variable Reluctance (VR) Micro Step MotorDigests, 11th Joint MMM-Intermag Conf. 2010, Washington, DC, USA, 2010
  • T. Creutzburg, H.H. Gatzen (2010): Mechanical and Thermal Simulations of a Microactuator for the Simulation of the PerilymphProc. CD, EuroSimE 2010, Bordeaux, France, 2010
  • T. Creutzburg, H.H. Gatzen (2010): Simulations of an Electromagnetic Microsystem used in Biomedical ApplicationsProc. CD, Piers 2010, Xi’an, China, 2010
  • V. Zagorodnii, A.J. Hutchison, S. Hansen, J. Chen, H.H. Gatzen, Z. Celinski (2010): Broad-band Ferromagnetic Resonance Characterization of Lossy Ferromagnetic Metallic ElementsJournal of Applied Physics 107, Issue 11, pp. 113906-113906-7, 2010
  • Wu, Karl-Heinz (2010): Magnetische Datenspeicherung auf Bauteiloberflächen More info
  • A. Belski, H.H. Gatzen (2009): Magnetoelastic Carbon Fiber Micro Strain SensorIEEE Transaction on Magnetics, Vol. 45, Issue 10, pp. 4522-4525
  • A. Waldschik, M. Feldmann, F. Pape, C. Ruffert, H.H. Gatzen, S. Büttgenbach (2009): Herstellung von Funktionskomponenten für den Einsatz in elektromagnetische MikroaktorenTagungsband 4. Kolloquium Mikroproduktion, BIAS Verlag, Bremen, Deutschland, ISBN:978-3-933762-32-0, S. 205-210
  • B. Denkena, H.H. Gatzen, H. Kayapinar, F. Pape (2009): Design, Fabrication and Calibration of Capacitive Air Gap Sensors for Application in Levitation based Guides for Microactuators.Proc. IEEE Sensors 2009, Christchurch, New Zealand, pp. 1915-1918
  • B.-A. Behrens, H.H. Gatzen, I. Peshekhodov, F. Pape (2009): Investigation of the Mechanical Behavior of a PU-Based Coil-Coating System with the Help of Indentation and FE AnalysisKey Engineering Materials Vols. 410-411 (2009), pp. 217-224
  • Bedenbecker, Matthias (2009): Magnetische Eigenschaften mikrotechnischer Magnetkreise
  • C. Ruffert, H.H. Gatzen (2009): Concepts for the Apprenticeship and Advanced Training in MicrotechnologySensor und Test 2009, Nuremberg, Germany
  • D. Dinulovic, F. Pape, H. Saalfeld, W. Kurniawan, E. Obermeier, H.H. Gatzen (2009): Operating Range Optimization of a Slider with an Integrated Microactuator (SLIM) for Hard Disc DriversIEEE Transaction on Magnetics, Vol. 45, Issue 10, pp. 3769-3772
  • D. Dinulovic, H. Saalfeld, Z. Celinski, S. Field, H.H. Gatzen (2009): Evaluation of an Electromagnetic Microactuator using Scanning Hall Probe Microscopy MeasurementsJournal of Applied Physics, AIP, Vol. 105, 07F119-1
  • E. Flick, K. Feindt, H.H. Gatzen (2009): Mikro-Hysteresemesssensor zur Vermessung anisotroper Dünnfilme. Micro Hysteresis Sensor for Measuring Anisotropic Thin-FilmsProc. MST-Kongress 2009, Berlin, Deutschland, S. 389-392
  • E. Flick, V. Saile, H.H. Gatzen (2009): A Pladoyer for a Concurrent Nano EngineeringProc. COMS 2009, 14th Ann. Meet., Conf. CD, Copenhagen, Denmark
  • E. Flick, W.Z. Li, G. Steinhoff, H.H. Gatzen (2009): Controlling Nanoparticle Complexes in Gene Delivery ApplicationsBook of Abstracts, 1st Symposium of the SFB/TR 37, Aachen, Germany, pp.30
  • F. Klocke, H.H. Gatzen, S. Kamenzky, M. Garzon, O. Traisigkhachol (2009): Application of Electroplated Electrodes in Micro Electro Discharge Machining (EDM)Proc. euspen 9th Int. Conf. 2009, San Sebastian, Spain, Vol. 2, pp. 471-474
  • F. Pape, H.H. Gatzen (2009): Evaluation of a Concept for Professional Improvement by Study in Engineering SciencesProc. IAMOT, 18th Int. Assoc. for Manag. of Tech., Orlando, Fl., USA, Conf. CD, ISBN 0-9815817-2-2
  • F. Pape, H.H. Gatzen (2009): Resistance of Multilayer Diamond-like Carbon (DLC) Coatings for MEMS Applications against Oscillating WearProc. WTC 09, Kyoto, Japan, G-114, pp.112
  • F. Pape, T. Creutzburg, O. Traisigkhachol, H.H. Gatzen (2009): Dünnfilmtechnische Herstellung eines rotierenden Synchronmotors. Thin-film Fabrication of a Rotating Synchronous MotorProc. MST-Kongress 2009, Berlin, Deutschland, S. 828-831
  • H. Gerdes, H.H. Gatzen (2009): Focused Ion Beam Core Hole Drilling for Stress Detection in Thin-filmsMicrosystem Technologies, Springer Verlag Berlin, Heidelberg, New York, Vol. 15, No. 1, pp. 151-153
  • H. Saalfeld, D. Dinulovic, H.H. Gatzen (2009): Improved Fabrication of an Integrated Electromagnetic Second Stage Microactuator for a Hard Disk Recording HeadProc. (CD), ASME IMECE 2009, IMECE2009-11076, pp. 1-8, Lake Buena Vista, FL, USA
  • H. Saalfeld, D. Dinulovic, H.H. Gatzen (2009): Aktivteil eines Schreib-/Lesekopfes mit integriertem Mikroaktor (SLIM) für Festplattenspeicher. Active Part of a Read/Write Head with an Integrated Microactuator for Hard Disc Drives (HDD)Proc. MST-Kongress 2009, Berlin, Deutschland, S. 262-265
  • H.H. Gatzen, C. Ruffert (2009): Magnetic Micro Sensor Activities at the Leibniz University HanoverSensor und Test 14th Int. Conf. 2009, Nuremberg, Germany, Vol. 2, A6.4, pp. 35-40, ISBN 978-3-9810993-5-5
  • H.H. Gatzen, C. Ruffert, M.C. Wurz, E. Flick (2009): Magnetische Mikrosysteme für Wandleranwendungen. Magnetic Micro Electro-mechanical Systems (MEMS) for Transducer ApplicationsProc. MST-Kongress 2009, Berlin, Deutschland, S.425-428
  • H.H. Gatzen, S. Cvetkovic (2009): Cross Crown Nanogrinding of a Chiplet for a Slider with an integrated Microactuator (SLIM)Proc. ASPE, 24th Ann. Meet. 2009, Monterey, CA, USA, pp. 95
  • I. Peshekhodov, F. Pape, S. Cvetkovic, H.H. Gatzen, B.-A. Behrens (2009): Investigation of the Mechanical Response of a Polyurethane-based Coil Coatings System with the Help of Instrumented Indentation and FE AnalysisProc. Int. Symposium on Plasticity and its Current Applications, St. Thomas, Virgin Islands, USA, pp. 55-57, ISBN 0-9659463-9-8
  • M. Bedenbecker, H.H. Gatzen (2009): Investigations on the Permeability of soft magnetic Micro StructuresBook of Abstracts, SMM 19, Torino, Italy, G3-01
  • M. Gatzen, F. Pape, H.H. Gatzen, G. Poll (2009): Frictional Investigations on Ball Bearings Lubricated Using Greases with Polymer AdditivesProc. WTC 09, Kyoto, Japan, B2-414, pp. 812
  • M.C. Wurz, F. Pape, M. Wark, H.H. Gatzen (2009): Investigation of Fluidic Additives on the Nanohardness During PolishingProc. WTC 09, Kyoto, Japan, K-331, pp. 698
  • O. Traisigkhachol, H. Schmid, M.C. Wurz, H.H. Gatzen (2009): Applying SU-8TM to the Fabrication of Micro Electro Discharge Machining ElectrodesMicrosystem Technologies, Springer Verlag Berlin, Heidelberg, New York
  • O. Traisigkhachol, H.H. Gatzen (2009): High Aspect Ratio Micromolds for the Electroplating of Micro Electro Discharge Machining ToolsMicrosystem Technologies, Springer Verlag Berlin, Heidelberg, New York
  • R. Bandorf, D. Paulkowski, F. Pape, A. Phataralaoha, S. Büttgenbach, H.H. Gatzen, G. Bräuer (2009): MikrotribologieTagungsband 4. Kolloquium Mikroproduktion, BIAS Verlag, Bremen, Deutschland, ISBN:978-3-933762-32-0, S. 197-203
  • S. Cvetkovic, B. Spasova, H.H. Gatzen (2009): Challenges in Assembling a Magnetic Shape Memory (MSM) MicroactuatorProc. ASPE 24th Ann. Meet. 2009, Monterey, CA, USA, pp. 431-434
  • S. Cvetkovic, D. Miletic, H.H. Gatzen (2009): Relationship between Removal Rate and Friction Force of a CMP Process for MEMSProc. euspen 9th Int. Conf. 2009, San Sebastian, Spain, Vol. 2, pp. 499-502
  • S. Cvetkovic, H.H. Gatzen (2009): Evaluation of a Prototype CMP Machine for Improving the Global Planarization by MEMSProc. ASPE, 24th Ann. Meet. 2009, Monterey, CA, USA, pp. 315-318
  • S. Cvetkovic, H.H. Gatzen (2009): Technology Development for the Thinning of a Slider with an Integrated MicroactuatorProc. euspen 9th Int. Conf. 2009, San Sebastian, Spain, Vol. 2, pp. 455-458
  • S. Hansen, G. Janssen, C. Wiedemann, B. Ponick, A. Mertens, H.H. Gatzen (2009): Simulation, Herstellung und Ansteuerung von skalierbaren MikroreluktanzmotorenTagungsband 4. Kolloquium Mikroproduktion, BIAS Verlag, Bremen, Deutschland, ISBN:978-3-933762-32-0, S. 191-196
  • S. Hansen, S. Bütefisch, H.H. Gatzen (2009): Design, Fertigung und messtechnische Untersuchungen eines Mikroreluktanzaktors. Design, Fabrication and Characterization of a Variable Reluctance Micro ActuatorProc. MST-Kongress 2009, Berlin, Deutschland, S. 840-843
  • S. Hansen, Z. Celinski, H.H. Gatzen (2009): Influence of Vertical Magnetized MnBi Layers on the Permeability of Permalloy StructuresBook of Abstracts, SMM 19, Torino, Italy, F1-11
  • T. Mäder, D. Weber, A. Belski, H.H. Gatzen, B. Wielage (2009): Analyses of Sensor Films on a Carbon FibreProc. (CD), B8.13, 17th Int. Conf. on Composite Materials (ICCM), Edinburgh, United Kingdom
  • W.Z. Li, W.W. Wang, E. Delyagina, A. Kaminski, N. Ma, G. Steinhoff, E. Flick, M.C. Wurz, H.H. Gatzen, X.S. Gao, M. Alexe, D. Hesse (2009): Magnetic Polymer Nanoparticles in Gene Delivery ApplicationsBook of Abstracts, 1st Symposium of the SFB/TR 37, Aachen, Germany, pp. 3
  • Wurz, Marc C. (2009): Fertigung eines magneto-optischen Schreib-/Lesekopfes
  • A. Belski, W. Kammrath, H.H. Gatzen (2008): Focused Ion Beam Fiber Turning Lathe for Fabricating a Strain Gauge for Carbon FibersProc. euspen 8th Int. Conf. 2008, Zurich, Switzerland, Vol. 2, pp. 129-133
  • A. Neumeister, R. Himmelhuber, C. Materlik, T. Temme, F. Pape, H.H. Gatzen, A. Ostendorf (2008): Properties of Three-Dimensional Precision Objects Fabricated by Using Laser Based Micro Stereo LithographyJLMN-Journal of Laser Micro/Nanoengineering, Vol. 3, No. 2, pp. 67-72
  • B. Spasova, D. Dinulovic, H.H. Gatzen (2008): An Iterative Approach to Simulate Magnetic Micro Systems by Changing Magnetic PropertiesProc. Int. Conf. on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2008, Freiburg, Germany, pp.213-216
  • B. Spasova, M. Wurz, H.H. Gatzen (2008): Manufacturing Technology for the Fabrication a Discrete Actuator Using a Magnetic Shape Memory AlloyE-MRS-Symposium 2007, Warsaw, Poland, European Physics Journal, Springer Verlag Berlin Heidelberg New York, Special Topics 158, pp. 243-247
  • B. Spasova, M. Wurz. H.H. Gatzen (2008): Application of MSM Bulk Material in a Hybrid MicroactuatorEUROMAT 2007, Nürnberg, Germany, Physica Status Solidi (a) 205, No. 10, pp. 2307-2312 Wiley-VCH Verlag
  • B. Spasova, M.C. Wurz, H.H. Gatzen (2008): Fabrication and Characterization of Microactuators with Discrete MSM Bulk MaterialProc. 11th Int. Conf. on new Actuators 2008, Bremen, Germany, pp. 713-716
  • C. Ruffert, H.H. Gatzen (2008): Fabrication and Test of Multi Layer Micro Coils with a High Packaging DensityHARMST2007, Besançon, France, Microsystem Technologies, Springer Verlag Berlin Heidelberg New York, Vol. 14, No. 9-11, pp. 1589-1592
  • D. Dinulovic, H. Saalfeld, Z. Celinski, S. Field, H.H. Gatzen (2008): Evaluation of an Electro-magnetic Micro Actuator Using Scanning Hall Probe Microscopy Measurements53rd Conf. on Magnetics and Magn. Materials, Austin, TX, USA, Abstracts, FE-10
  • D. Dinulovic, H.H. Gatzen (2008): An Approach for Simulating Magnetic MicroactuatorsProc. of International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2008, Freiburg, Germany, pp.217-220
  • D. Miletic, S. Cvetkovic, C.-T. Weber, H.H. Gatzen (2008): Tribological Investigation of CMP for Electroplated NiFe MicrostructuresProc. euspen 8th, Int. Conf. 2008, Zurich, Switzerland, Vol. 1, pp. 138-142
  • D. Paulkowski, R. Bandorf, S. Achilles, F. Pape, H.H. Gatzen, G. Bräuer (2008): Studies on Diamond-like Carbon Coatings for the Application in Micro ActuatorsEUROMAT 2007, Nuremberg, Germany, (accepted for Advanced Engineering Materials), Wiley-VCH Verla
  • E. Flick, H.H. Gatzen (2008): Total Quality Management (TQM) Challenges for Incoming and Outgoing Goods in a University Micro Technilogy Fabrication LineProc. IAMOT 2008, 17th Int. Assoc. for Manag. of Tech., Conf. CD, Dubai, UAE
  • E. Flick, K. Feindt, H.H. Gatzen (2008): Micro Hysteresis Sensor for Wafer Level Testing of Magnetic FilmsIntermag, Conf. 2008, Madrid, Spain, BC-04
  • F. Pape, C. Ruffert, H.H. Gatzen (2008): Professional Improvement by Study in Engineering SciencesProc. IAMOT 2008, 17th Int. Assoc. for Manag. of Tech., Conf. CD, Dubai, UAE
  • F. Pape, H.H. Gatzen (2008): Tribological Behavior of Multilayer Diamond-like Carbon (DLC) CoatingsGöttinger Fachtagung Tribologie, Göttingen, Germany, Band I, Reibung, Schmierung und Verschleiß, ISBN 978-3-00-025676-9, 9/1-9/10
  • F. Pape, H.H. Gatzen (2008): Optimization of the Adhesion of Diamond-like Carbon on Glass Substrates for Microelectro Mechanical Systems by Nanoindentational StudiesLeeds-Lyon Symposium on Tribology 2008, Leeds, UK
  • F. Pape, H.H. Gatzen (2008): A Management Concept of Competencies Improvement for Students with Prior Vocational, Advanced Education, and Work Experience in Technical FieldsProc. Picmet, Vol. 2: "Technology Management for a Sustainable Economy." Cape Town, South Africa, Conf. CD
  • G. Janssen, O. Traisigkhachol, H.H. Gatzen, B. Ponick (2008): Design and Fabrication of a Rotary Micro Synchronus MotorProc. 11th Int. Conf. on New Actuators 2008, Bremen, Germany, pp. 457-460
  • H.H. Gatzen (2008): Magnetic Micro Electro-Mechanical Systems (MEMS) for Sensor and Actuator ApplicationsPRiME 2008 Meeting, Honolulu, HI, USA, The Electrochemical Society, MA 2008-2, Abs. 2601.pdf
  • H.H. Gatzen, E. Flick (2008): Energieautarke Mikrosysteme in der BiomedizintechnikEnergy Harvesting, Essen, Deutschland, 2007, Expert Verlag, S. 78-87, ISBN 978-3-8169-2789-1
  • H.H. Gatzen, E. Flick (2008): Biomedizinische Anwendungen energieautarker MikrosystemeCD 2, Fachveranstaltung Energy Harvesting, Haus der Technik, Essen, Deutschland
  • H.H. Gatzen, E. Flick, V. Saile (2008): A Management of Technology (MOT) Concept for Handling Disruptive TechnologiesProc. COMS 2007, Melbourne, Australia, Conf. CD
  • H.H. Gatzen, F. Klocke, S. Kamenzky, O. Traisigkhachol (2008): Electroplated Cu Micro Electrode for Application in Micro Electrostatic Discharge Machining (EDM)PRiME 2008 Meeting, Honolulu, HI, USA, The Electrochemical Society, MA 2008-2, Abs. 2604.pdf
  • H.H. Gatzen, F. Pape, C. Ruffert (2008): ANKOM-Projekt "ProfIS" - Professional Improvement by Study in Engineering SciencesHIS Hochschul-Informations-System GmbH, Forum Hochschule, ISSN 1863-5563, 13/2008, pp. 81-89
  • H.H. Gatzen, H. Gerdes, D. Miletic (2008): Electromagnetic Dual-position Microactuator for Measurement ApplicationsProc. 11th Int. Conf. on new Actuators 2008, Bremen, Germany, pp. 774-777
  • H.H. Gatzen, P. J. P. Freitas, E. Obermeier, J. Robertson (2008): Electromagnetic Second Stage Microactuator for a Hard Disc Recording HeadProc. Innovative Mass Storage Technology Workshop (IMST), Leuven, Belgium
  • H.H. Gatzen, Paulo J.P. de Freitas, E. Obermeier, J. Robertson (2008): A Slider with an Integrated Microactuator (SLIM) for Second Stage Actuation in Hard Disc DrivesIntermag, Conf. 2008, Madrid, Spain, DF-05 IEEE Trans. on Magn., Vol. 44, No. 11, pp. 3730-3733
  • H.H. Gatzen, T. Griesbach, V. Saile (2008): A Concept for Complementary Micro NanoTechnology Education in UniversitiesProc. COMS 2007, Melbourne, Australia,Conf. CD
  • I. Peshekhodov, F. Pape, K. B. Sidhu, H.H. Gatzen, B.-A. Behrens (2008): Investigation of a Thermoplastic Polyurethane Coating on Galvanized Sheet Steel with the Help of Numerical and Experimental NanoindentationProceedings (CD), Numisheet 2008, Interlaken, Switzerland
  • J. Chen, S. Hansen, H.H. Gatzen (2008): Long Term Investigations on NiFe Electroplating ProcessPRiME 2008 Meeting, Honolulu, HI, USA, The Electrochemical Society, MA 2008-2, Abs. 2584.pdf
  • K.-H. Wu, E. Gastan, M. Rodman, Fr.-W. Bach, B.-A. Behrens, H.H. Gatzen (2008): Development of Magnetic Magnesium for Data Storage in Gentelligent ProductsJEMS 2008, Dublin, Ireland (submitted)
  • K.-H. Wu, H.H. Gatzen (2008): Development of a System for Data Storage on Machine Components Proc. (CD), I PROMS 2008, the 4th Virtual Conf. of the EU-funded FP6 I PROMS Network of Excellence on Innovative Production Machines and Systems, pp. 454-459, Wales, UK
  • K.-H. Wu, H.H. Gatzen (2008): Fabrication and Assembly of a Magnetic Recirding HeadProc. euspen 8th Int. Conf. 2008, Zurich, Switzerland, Vol. 2, pp. 143-147
  • K.-H. Wu, O. Traisigkhachol, H.H. Gatzen (2008): A Concept for Magnetic Data Recording on Genetically Intelligent ("Gentelligent") ComponentsEUROMAT 2007, Nuremberg, Germany, Physica Status Solidi (c) 5, No. 11, pp. 3547-3550, Wiley-VCH Verlag
  • K.-H. Wu, R. Schäfer, H.H. Gatzen (2008): Investigations on a Permalloy Keeper Layer for the Readout of Magnetically Stored Data based on the Magneto-optical Kerr Effect53rd Conf. on Magnetics and Magn. Materials, Austin, TX, USA, Abstracts, BG-10
  • K.-H. Wu, S. Cvetkovic, H.H. Gatzen (2008): Dicing Process Optimization for Sapphire and AlticProc. euspen 8th Int. Conf. 2008, Zurich, Switzerland, Vol. 1, pp. 121-125
  • M. Bedenbecker, H.H. Gatzen (2008): Investigation on a NiFe Alloy with a Coefficient of Thermal Expansion Matching the One of SiliconMMM 2007, Tampa, FL, USA, Journal of Applied Physics, Vol. 103, 07E731
  • M. Bedenbecker, H.H. Gatzen (2008): Investigations on the Permeability of Thin-Film Soft Magnetic Structures53rd Conf. on Magnetics and Magn. Materials, Austin, TX, USA, Abstracts, FE-10
  • M. Bedenbecker, R. Bandorf, G. Bräuer, H. Lüthje, H.H. Gatzen (2008): Hard and Soft Magnetic Materials for Electromagnetic MicroactuatorsMicrosystem Technologies, Springer Verlag Berlin Heidelberg New York, Vol. 14, No. 12, pp. 1949-1954
  • M. Feldmann, A. Waldschick, C. Ruffert, H.H. Gatzen, S. Büttgenbach (2008): Fabrication of Drive and Guide Components for MicromotorsMicrosystem Technologies, Springer Verlag Berlin Heidelberg New York, Vol. 14, No. 12, pp. 1941-1947
  • M. Gatzen, F. Pape, C. Bruening, H.H. Gatzen, H.F. Arlinghaus, G. Poll (2008): Correlation between Performance and Boundary Layers in Grease Lubricated High speed BearingsiCAT, 2nd Intern. Conf. on Advanced Tribology, Singapore, Ext. Abstracts, pp. 186-188
  • M. Wurz, D. Dinulovic, J. Chen, E. Flick, K. Bade, V. Saile, H.H. Gatzen (2008): Design of Experiment (DOE) for Optimizing a NiFe 45/55 Electroplating ProcessPRiME 2008 Meeting, Honolulu, HI, USA, The Electrochemical Society, MA 2008-2, Abs. 2583.pdf
  • M. Wurz, T. Oeckermann, P. Wagner, C. Ruffert, J. Caro, H.H. Gatzen (2008): Investigations on Embedding Nanoparticles by ElectroplatingPRiME 2008 Meeting, Honolulu, HI, USA, The Electrochemical Society, MA 2008-2, Abs. 2595.pdf
  • O. Traisigkhachol, L. Rissing, H.H. Gatzen (2008): A Concept for Characterization and Analysis of the readout of Soft Magnetic Thin-FilmsPRiME 2008 Meeting, Honolulu, HI, USA, The Electrochemical Society, MA 2008-2, Abs. 2605.pdf
  • S. Cvetkovic, H. Saalfeld, H.H. Gatzen (2008): Dicing Process for the Device Separation of a Slider with an Integrated Microactuator (SLIM)Proc. ASPE 23rd Ann. Meet. 2008 and 12th ICPE, Portland, OR, USA, pp. 380-383
  • S. Demmig, R. Gehrking, M. Hahn, K. Wiedmann, B. Ponick, H.H. Gatzen, A. Mertens (2008): Technical Progress in Designing and Controlling of Active Micro SystemsMicrosystem Technologies, Springer Verlag Berlin Heidelberg New York, Vol. 14, No. 12, pp. 1925-1931
  • S. Hansen, L. Rissing, H.H: Gatzen (2008): Temperature Characteristics of a Magnetic Micro Strain GaugeEUROMAT 2007, Nuremberg, Germany, Symposium A23: Magnetic Thin Films, Physica Status Solidi (c) 5, No. 11, pp. 3551-3554, Wiley-VCH Verlag
  • T. Griesbach, L. Rissing, H.H. Gatzen (2008): Integration of a Temperature Sensor into a Modular, Multifunctional Micro Sensor FamilyProc. (CD), I PROMS 2008, the 4th Virtual Conference, of the EU-funded FP6 I PROMS Network of Excellence on Innovative Production Machines and Systems, pp. 472-476, Wales, UK
  • A. Neumeister, R. Himmelhuber, C. Materlik, T. Temme, F. Pape, H. H. Gatzen, A. Ostendorf (2007): Three-dimensional Micro Fabrication of Mechanical Systems Using Layer Based Stereo LithographyProc. 8th LPM 2007, Vienna, Austria
  • B. Kuanr, Y. Khivintsev, I. Harward, R.E. Camley, Z. Celinski, M. Bedenbecker, H.H. Gatzen (2007): Increasing Operational Frequency in Microwave Devices by Using [SmCo/NiFe] Multilayered StructuresIEEE Trans. on Magn., Vol. 43, No. 6, pp. 2648-2650
  • Becker, Christian (2007): "Fertigungstechnologieentwicklung für Giant Magnetoresistive (GMR-) Sensoren zur Magnetfeldmessung"
  • C. Ruffert, H.H. Gatzen (2007): Alternatives for Fabricating Aerostatic Micro GuidesProc. Smart Systems Integration 2007, European Conference & Exhibition on integration issues of miniaturized systems – MEMS, MOEMS, ICs and electronic components, Paris, France, pp. 604-607
  • C. Ruffert, H.H. Gatzen (2007): Miniaturized Cryoprobe for the Local Deactivation of Neural NetworksProc. EUSPEN 7th Int. Conf. 2007, Bremen, Germany, Vol. 1, pp. 73-77
  • C. Ruffert, H.H. Gatzen (2007): Design and Technology of a Magnetic Levitation System for Linear Micro ActuatorsProc. ASME 2007, Las Vegas, NV, USA, DETC2007-34676, ISBN 0-7918-3806-4
  • C. Ruffert, J. Li, B. Denkena, H.H. Gatzen (2007): Development and Evaluation of an Active Magnetic Guide for Microsystems with an Integrated Air Gap Measurement SystemIEEE Trans. on Magn., Vol. 43, No. 6, pp. 2716-2718
  • C. Ruffert, M. Feldmann, A. Waldschick, S. Büttgenbach, H.H. Gatzen (2007): Fertigung von Anrtiebs- und Führungskomponenten für MikromotorenKolloquium Mikroproduktion, Forschungzentrum Karlsruhe GmbH, Karlsruhe, Deutschland, S. 165-170
  • D. Dinulovic, H. Gerdes, H. Mucha, B. Wielage, H.H. Gatzen (2007): Carbon Fiber with Magnetoelastic Sensing Capability for Composite MaterialsSensor Letters, Vol. 5, No. 1, pp. 218-221
  • Dinulovic, Dragan (2007): Entwurf und Fertigung eines linearen induktiven Mikrowegmesssensors
  • E. Flick, H.H. Gatzen (2007): A Study on Determining of the Current and Future Need for Specialists in High Technology IndustriesBook of Abstracts and Proc. 16th Int. Assoc. for Manag. of Tech. IAMOT 2007, Miami, Florida, USA
  • F. Pape, D. Miletic, H.H. Gatzen (2007): Recognition of Professional Qualifications for University Students in Engineering SciencesBook of Abstract. 16th Int. Assoc. for Manag. of Tech. IAMOT 2007, Miami, FL, USA
  • F. Pape, H.H. Gatzen (2007): Stress, Friction and Life in Micro Actuator Contact SurfacesLeeds-Lyon Symposium on Tribology 2007, France
  • F. Pape, H.H. Yildiz-Ünveren, R. Küster, R. Bandorf, G. Bräuer, H.H. Gatzen (2007): Nano-Scratch Studies on Diamond-like Carbon Coatings on Various Materials Applied in Micro ActuatorsGFT Tribologie-Fachtagung 2007, Göttingen, Germany, Band l, S. 28/1 - 28/10
  • H. Gerdes, H.H. Gatzen (2007): Focused Ion Beam Core Hole Drilling for Stress Detection in Thin-filmsMicroNanoReliability 2007, Berlin, Germany, Micromaterials and Nanomaterials, Microsystem Technologies, Springer Verlag Berlin Heidelberg New York, Vol. 15, No. 1, pp. 151-153
  • H.H. Gatzen , C. Ruffert (2007): Advances in Magnetic Micro Thin-film TransducersSymposium on Magnetic Materials, Processes and Devices, 210th Meet. of The Electrochemical Society, Cancun, Mexico, 2006, ecs transactions, Vol. 3, Issue 25, pp. 203-221
  • H.H. Gatzen, D. Dinulovic, E. Flick, H. Gerdes, K. Feindt, M. Eccarius (2007): Concept for a Wafer Level Test System for Measuring Magnetic Film PropertiesSymposium on Magnetic Materials, Processes and Devices, 210th Meet. of The Electrochemical Society, Cancun, Mexico, 2006, ecs transactions, Vol. 3, Issue 25, pp. 165-177
  • H.H. Gatzen, K.-H. Wu, O. Traisigkhachol (2007): Development of a Recording Head for Magnetic Storage of Information on Machine ComponentsSymposium on Magnetic Materials, Processes and Devices, 210th Meet. of The Electrochemical Society, Cancun, Mexico, 2006, ecs transactions, Vol. 3, Issue 25, pp. 191-202
  • H.H. Gatzen, P.J.P. de Freitas, E. Obermeier, J. Robertson (2007): A Slider with an Integrated Microactuator (SLIM) for Second Stage Actuation in Hard Disc DrivesProc. IMST 2007 FIM XV, Eindhoven, The Netherlands
  • H.H. Gatzen, S. Cvetkovic (2007): Modellierung des CMP-Prozesses zum Planarisieren von MikrosystemenSHLP 2007, Braunschweig, Deutschland, 63. Jahrbuch Schleifen, Honen, Läppen und Polieren, Vulkan Verlag, Essen, Deutschland, S. 342-361
  • H.H. Gatzen, S. Hansen, L. Rissing (2007): A Concept for a Toolbox of Components for Modular Magnetic MicrosensorsSymposium on Magnetic Materials, Processes and Devices, 210th Meet. of The Electrochemical Society, Cancun, Mexico, 2006, ecs transactions, Vol. 3, Issue 25, pp. 235-246
  • K.-H. Wu, H.A. Adams, H.H. Gatzen (2007): Combination of Mechanical Micromachining and Glass Bonding to Fabricate Robust Micro Structures for Painless Drug DeliveryProc. ASPE 22th Ann. Meet. 2007, Dallas, TX, USA, pp. 147-150
  • K.-H. Wu, O. Traisigkhachol, M. C. Wurz, H. H. Gatzen (2007): Lesen und Schreiben magnetischer DatenSFB653 Kolloquium, Hannovermesse 2007, Hannover, Deutschland, S. 63-68
  • Kourouklis, Christos (2007): Entwicklung und Fertigung von Nano-Raunormalen
  • M. Bedenbecker, M. Hahn, C. Ruffert, H.H. Gatzen (2007): Linear Synchronous Micro Motor with Further Miniaturized DimensionsProc. ASME 2007, Las Vegas, NV, USA, DETC2007-34677, ISBN 0-7918-3806-4
  • M. Bedenbecker, R. Bandorf, G. Bräuer, H. Lüthje, H.H. Gatzen (2007): Hart- und weichmagnetische Materialien für elektromagnetische MikroaktorenKolloquium Mikroproduktion, Forschungzentrum Karlsruhe GmbH, Karlsruhe, Deutschland, S. 159-164
  • M. Bedenbecker, Z. Celinski, H.H. Gatzen (2007): Directional Permeability Dependence in Electroplated Permalloy LayersSymposium on Magnetic Materials, Processes and Devices, 210th Meet. of The Electrochemical Society, Cancun, Mexico, 2006, ecs transactions, Vol. 3, Issue 25, pp. 123-135
  • M. Hahn, M. Bedenbecker, H.H. Gatzen (2007): Evaluation of a Linear Hybrid Microstep Motor by Means of Magnetic Flux Measurements10th Joint MMM/Intermag Conf. 2007, Baltimore, MD, USA, FU-04 IEEE Trans. on Magn., Vol. 43, No. 6, pp. 2588-2590
  • N. Münter, S. Knappmann, C. Morsbach, H.H. Gatzen (2007): Acoustic Emission (AE) Measurements to Determine the Dynamic Flying Characteristics of Optical SlidersMicrosystem Technologies, Springer Verlag Berlin Heidelberg New York, Vol. 13, No. 2, pp. 173-175
  • Ruffert, Christine (2007): Entwicklung und Aufbau einer Magnetführung für einen Mikrolinearmotor
  • S. Cvetkovic, C. Ruffert, H.H. Gatzen (2007): Assembly Concept of a Magnetic Levitation System for a Linear Micro ActuatorProc. ASME 2007, Las Vegas, NV, USA 2007, DETC2007-35266, ISBN 0-7918-3806-4
  • S. Cvetkovic, H.H. Gatzen (2007): Challenges and Solutions for the Assembly of a Linear Micro Step MotorProc. EUSPEN 7th Int. Conf. 2007, Bremen, Germany, Vol. 2, pp. 384-387
  • S. Cvetkovic, H.H. Gatzen (2007): Effect of Feed Rate and Grain Concentration on Ductile to Brittle Transition by Silicon DicingProc. EUSPEN 7th Int. Conf. 2007, Bremen, Germany, Vol. 2, pp. 380-383
  • S. Cvetkovic, H.H. Gatzen (2007): Investigation on the Impact on Process Quality When Utilizing Different Pads during Chemical-Mechanical Polishing of MEMSProc. ASPE 22nd Ann. Meet. 2007, Dallas, TX, USA, pp. 469-472
  • S. Cvetkovic, H.H. Gatzen (2007): Concept for Distinction Between the Circumferential and Sidewall Effects during Dicing of Single Crystal SiliconProc. ASPE 22nd Ann. Meet. 2007, Dallas, TX, USA, pp. 386-389
  • S. Demmig, R. Gehrking, M. Hahn, K. Wiedemann, B. Ponick, H.H. Gatzen, A. Mertens (2007): Fortschritte bei der Auslegung und Regelung aktiver MikrosystemeKolloquium Mikroproduktion, Forschungszentrum Karlsruhe GmbH, Karlsruhe, Deutschland, S. 171-178
  • S. Hansen, H. Gerdes, H.-H. Gatzen (2007): Modulare, mehrfunktionale Mikrosensorik- Mikrosensoren für Kraft- und DehnungsmessungSFB653 Kolloquium, Hannovermesse 2007, Hannover, Deutschland, S. 19-24
  • S. Hansen, L. Rissing, H.H. Gatzen (2007): Modularly Designed Magnetoelastic Micro Strain Gauge10th Joint MMM/Intermag Conf. 2007, Baltimore, MD, USA, IEEE Trans. on Magn., Vol. 43, No. 6, pp. 2385-2387
  • S. Hansen, L. Rissing, H.H. Gatzen (2007): Temperature Characteristics of a Magnetic Micro Strain GaugeEUROMAT 2007, Nürnberg, Germany, Physica Status Solidi (c), Symposium A23: Magnetic Thin Films. Wiley-VCH Verlag
  • S. Krongelb, C. Bonhote, S. Brankovic, H.H. Gatzen, Y. Kitamoto (2007): Magnetic Materials, Processes and Devices 9ECS Transactions, Vol. 3, Issue 25
  • A. Ben Amor, T. Budde, H.H. Gatzen (2006): A Magnetoelastic Microtransformer Based Micro Strain Gauge5th European Magnetic Sensor & Actuator Conf. EMSA 2004, Sensors and Actuators A129 (2006) No. 1-2, pp. 41-44
  • Budde, Thomas (2006): Entwicklung von Samarium-Kobalt-Magneten
  • C. Ruffert, M. Feldmann, S. Büttgenbach, H.H. Gatzen (2006): Fabrication of Functional Components forEelectromagnetic MicroactuatorsMicrosystem Technologies, Springer Verlag Berlin Heidelberg New York, Vol. 12, No.7, pp. 670-675
  • C. Ruffert, R. Gehrking, B. Ponick, H.H. Gatzen (2006): Magnetic Levitation Assisted Guide for a Linear MicroactuatorIEEE Trans. on Magn., Vol. 42, No. 11, pp. 3785-3787
  • D. Dinulovic, D. Hermann, J. Flügge, H.H. Gatzen (2006): Development of a Linear Micro Inductosyn SensorIEEE Trans. on Magn., Vol. 42, No. 10, pp. 2830-2832
  • D. Dinulovic, E. Flick, H. Gerdes, K. Feindt, M. Eccarius, H.H. Gatzen (2006): Concept for a Wafer Level Test System for Measuring Magnetic Film Properties210th Meet. of The Electrochemical Society 2006, Cancun, Mexico
  • D. Dinulovic, H.H. Gatzen (2006): Microfabricated Inductive Micropositioning Sensor for Measurement of a Linear MovementIEEE Sensors Journal, Vol. 6, No. 6, pp. 1482-1487
  • D. Herrmann, D. Milletic, H.H. Gatzen (2006): Recognition of Professional Qualification for University Students in Engineering SciencesBook of Abstract 15th Int. Ass. for Manag. of Tech. IAMOT 2006, Beijing, P.R. China
  • Günzel, Gerald (2006): Untersuchungen zum Dünnen und Vereinzeln dünner Siliziumwafer
  • H. Gerdes, D. Dinulovic, H.H. Gatzen (2006): Electromagnetic Dual-position Actuator for Measurement ApplicationsProc. Actuator 2006, 10th Int. Conf. on New Actuators, Bremen, Germany, pp. 824-827
  • H.H. Gatzen, C. Ruffert (2006): Microcoils in Thin-film TechnologyProc. Inductica 2006, Berlin, Germany
  • H.H. Gatzen, C. Ruffert (2006): Advances in Magnetic Micro Thin-film Transducers210th Meet. of The Electrochemical Society, Cancun, Mexico, 2006
  • H.H. Gatzen, E. Flick (2006): Total Quality Management System for a Micro and Nano Technology Oriented University InstitutionProc. 15th Int. Ass. for Manag. of Tech. IAMOT 2006, Beijing, P.R. China
  • H.H. Gatzen, M. Hahn, K. Ullakko (2006): Characterization of Magnetic Shape Memory (MSM) Material and its Application in a Hybrid Micro ActuatorProc. Actuator 2006, 10th Int. Conf. on New Actuators, Bremen, Germany, pp. 406-409
  • H.H. Gatzen, M. Hahn, M. Bedenbecker, B. Ponick, R. Gehrking, S. Demmig (2006): Advances in the Development of a Linear Hybrid Micro ActuatorProc. Actuator 2006, 10th Int. Conf. on New Actuators, Bremen, Germany, pp. 207-210
  • H.H. Gatzen, S. Cvetkovic (2006): Modeling CMP - Investigation of the Chemical Attack on the Mechanical Properties of Bulk MaterialProc. EUSPEN 6th Int. Conf. 2006, Baden, Austria
  • Imt (2006): Spritzen ohne SchmerzenPresse Info PZH
  • J. Koch, E. Fadeeva, M. Engelbrecht, C. Ruffert, H.H. Gatzen, A. Ostendorf, B.N. Chichkov (2006): Maskless Nonlinear Lithography with Femtosecond Laser PulsesApplied Physics A: Materials Science & Processing, Springer-Verlag GmbH, A 82, pp. 23-26, ISSN: 0947-8396
  • K. Halalo, H.H. Gatzen (2006): Ceramic Micro Needle Array for Painless Drug Delivery and Biological SensingProc. EUSPEN 6th Int. Conf. 2006, Baden, Austria Sensing
  • K. Halalo, H.H. Gatzen (2006): Combining Mechanical Micromachining and Glass Bonding to Fabricate Robust Micro StructuresProc. EUSPEN 6th Int. Conf. 2006, Baden, Austria
  • K.-H. Wu, O. Traisigkhachol, H.H. Gatzen (2006): Development of a MIG-Head for Magnetic Storage of Information on Machine Components210th Meet. of The Electrochemical Society 2006, Cancun, Mexico
  • M. Bedenbecker, H.H. Gatzen (2006): Electroplated CoFe Thin Films for Electromagnetic MicroactuatorsMMM 2005, San Jose, CA, USA, Journal of Applied Physics, Vol. 99, 08M308
  • M. Bedenbecker, R. Bandorf, H. Lüthje, G. Bräuer, H.H. Gatzen (2006): Development and Fabrication of Magnetic Thin FilmsMicrosystem Technologies, Springer Verlag Berlin Heidelberg New York, Vol. 12, No.7, pp. 655-658
  • M. Bedenbecker, Z. Celinski, H.H. Gatzen (2006): Directional Permeability Dependence in Electroplated Permalloy LayersProc. 210th Meet. of The Electrochemical Society, Cancun, Mexico, ecs transactions, Vol. 3, Issue 25, pp. 123-135
  • M. Hahn, R. Gehrking, B. Ponick, H.H. Gatzen (2006): Design Improvements for a Linear Hybrid Step Micro-actuatorMicrosystem Technologies, Springer Verlag Berlin Heidelberg New York, Vol. 12, No.7, pp. 646-649
  • M. Wurz, C. Ruffert, Z. Mrowka, S. Knappmann, H.H. Gatzen (2006): Fabrication of a Micro Coil for Magneto-Optical Data StorageIEEE Trans. on Magn., Vol. 42, No. 10, pp. 2468-2470
  • R. Bandorf, R. Küster, C. Henke, H. Lüthje, J.-H. Sick, C. Neumeister, A. Phataralaoha, S. Büttgenbach, H.H. Gatzen, G. Bräuer (2006): Tribology of MicrosystemsMicrosystem Technologies, Springer Verlag Berlin Heidelberg New York, Vol. 12, No.7, pp. 680-684
  • S. Hansen, L. Rissing, H.H. Gatzen (2006): A Concept for a Toolbox for Modular Magnetic Microsensors210th Meet. of The Electrochemical Society 2006, Cancun, Mexico
  • S. Hansen, M.C. Wurz, H.H. Gatzen (2006): Baukasten multifunktionaler Mikrosensoren für Messaufgaben in der Fertigungstechnikwt Werkzeugtechnik online, Jahrgang 96, H. 11/12, S. 866-870
  • T. Budde, H.H. Gatzen (2006): Thin Film SmCo Magnets for use in Electromagnetic MicroactuatorsMMM 2005, San Jose, CA, USA, Journal of Applied Physics, Vol. 99, 08N304
  • Andreeva, Ekaterina (2005): Aufbau und Erprobung eines Mikro-Wirbelstromsensors zur Abstandsmessung
  • C. Neumeister, S. Walsh, H.H. Gatzen (2005): A Business Process Model for MEMS14th Int. Ass. for Manag. of Tech. IAMOT 2005, Vienna, Austria
  • C. Ruffert, H.H. Gatzen (2005): Ausbildung von Fachkräften für die MikrosystemtechnikMikrosystemtechnik, Begleitband zum Kongress 2005, Freiburg, VDE Verlag, Berlin, S. 877-880
  • D. Dinulovic, H.H. Gatzen (2005): Thin Film Inductive Micropositioning SensorProc. XIX Eurosensors Conf., Barcelona, Spain, Vol. II (W), pp. WPb25
  • Föhse, Martin (2005): Entwurf und Fertigung eines linearen elektromagnetischen Mikromotors nach dem Synchronprinzip
  • H.-H. Gatzen, T. Budde, D. Dinulovic (2005): Sensor und Verfahren zum Messen einer Position, eines Weges und/oder einer BewegungsrichtungDE 10338578 A1
  • H.H. Gatzen (2005): Magnetische Mikrosystemtechnik – klein, robust, vielseitigBegleitband zum Hannover Kolloquium 2004, Hannover, Deutschland, S. 127-138, ISBN 3-936888-51-5
  • H.H. Gatzen, C. Morsbach (2005): Magnetische Werkstoffe in Mikrosystemenwt Werkstofftechnik-online, Jahrgang 94, H. 11/12, S. 631-635
  • H.H. Gatzen, C. Morsbach (2005): Kerf Sidewall Grove Formation during Ductile Dicing of Ceramic MaterialsProc. ASPE 20th Ann. Meet. 2005, Norfolk, Virginia, USA, pp. 387-390
  • H.H. Gatzen, C. Morsbach (2005): Trenn- und Profilschleifen keramischer Mikrostrukturen62. Jahrbuch Schleifen, Honen, Läppen und Polieren, S. 332-341
  • H.H. Gatzen, C. Neumeister (2005): GoPro, a business process model to support the development for MEMSCOMS 2005, Baden-Baden, pp. 256-260
  • H.H. Gatzen, G. Günzel (2005): Investigations on the Influence of the Substrate’s Thickness on the Cut Quality During Dicing of thin Silicon WafersProc. euspen 5th Int. Conf. and 7th Ann. Gen. Meet. 2005, Montpellier, France, Vol. 2, pp. 589-590
  • H.H. Gatzen, M. Bedenbecker (2005): Magnetic Micro Systems – small, robust, versatileCOMS 2005, Baden-Baden, pp. 444-448
  • H.H. Gatzen, M. Bedenbecker (2005): Herstellung polymergebundener Hartmagnete durch in SU 8 eingebrachte MagnetpulverMikrosystemtechnik, Begleitband zum Kongress 2005, Freiburg, VDE Verlag, Berlin, S. 581-584
  • H.H. Gatzen, M. Bedenbecker (2005): Magnetic Micro Systems – small, robust, versatileM2EMS Workshop Kreta
  • H.H. Gatzen, M. Bedenbecker, C. Ruffert (2005): Magnetische MikrobauteileProc. 8. Symposium Magnetoresistive Sensoren; Grundlagen - Herstellung - Anwendungen, 2005, Sensitec GmbH, Georg-Ohm-Str.1, D35633 Lahnau, pp. 28-36
  • H.H. Gatzen, N. Münter, B. Ma, C. Morsbach (2005): Thermal Sensor for In-situ Flying Height Measurements of Optical Flying HeadsTribology International 38, pp. 594-598
  • H.H. Gatzen, S. Knappmann, C. Neumeister, J. Mössner, Z. Mrowka, C. Morsbach (2005): Thermo-resistive Flight Attitude Measurements of Flying Heads in Near Field Magneto-optical Data StorageIEEE Trans. on Magn. Vol. 41, No. 10, pp. 2863-2865
  • Iswahjudi, Heri (2005): "Simulationen zur Entwicklung eines Mikro-Wirbelstromsensors zur Abstandsmessung"
  • L. Zhou, M. Beck, H. H. Gatzen, K. Altshuler, F. E. Talke (2005): Slider Vibration Reduction Using Slider Surface Texture.Microsystem Technologies, Vol. 11, No. 8-10, pp. 857-866
  • M. Bedenbecker, R. Bandorf, H. Lüthje, G. Bräuer, H.H. Gatzen (2005): Entwicklung und Fertigung magnetischer SchichtenSFB-Kolloquium, Mainz Verlag Aachen, Germany, S. 285-293, ISBN3-86130-999-8
  • M. Feldmann, C. Ruffert, H.H. Gatzen, S. Büttgenbach (2005): Fertigung von Funktionskomponenten für elektromagnetische MikroaktorenSFB-Kolloquium, Mainz Verlag Aachen, Germany, S. 295-304, ISBN3-86130-999-8
  • M. Hahn, E. Pagounis, H.H. Gatzen (2005): Evaluation of a Micro Motor with Integrated MSM Material Digest IEEE Intermag Conf. 2005, Nagoya, Japan, GF12, pp. 1683-1684
  • M. Hahn, R. Gehrking, B. Ponick, H.H. Gatzen (2005): Auslegung aktiver MikrosystemeSFB-Kolloquium Mikroproduktion, Mainz Verlag Aachen, Germany, S. 253-262, ISBN3-86130-999-8
  • Neumeister, Claudia (2005): Methode zur zielorientierten Varianten-Findung bei der Entstehung mikrotechnischer Produkte
  • R. Bandorf, R. Küster, C. Henke, H. Lüthje, J.-H. Sick, C. Neumeister, A. Phataralaoha, S. Büttgenbach, H.H. Gatzen, G. Bräuer (2005): Tribologie von MEMS-KomponentenSFB-Kolloquium, Mainz Verlag Aachen, Deutschland, S. 225-232, ISBN3-86130-999-8
  • R. Gehrking, C. Ruffert, S. Demmig, H.H. Gatzen, B. Ponick (2005): Entwicklung einer magnetischen Führung für MikroaktorenMikrosystemtechnik, Begleitband zum Kongress 2005, Freiburg, VDE Verlag, Berlin, S. 383-386
  • R. Küster, R. Bandorf, H. Lüthje, G. Bräuer, H.H. Gatzen, C. Neumeister (2005): Verschleißarme Beschichtungen für MikroaktorenMikrosystemtechnik, Begleitband zum Kongress 2005, Freiburg, VDE Verlag, Berlin, S. 119-121
  • S. Cvetkovic, K.-H. Wu, H.H. Gatzen (2005): Modeling CMP - Investigation of the Mechanical Removal MechanismProc. ASPE 20th Ann. Meet. 2005, Norfolk, Virginia, USA, pp. 500-503
  • A. Ben Amor, C. Ruffert, H.H. Gatzen (2004): NiFe 45/55 and its Application in a Strain Gauge SensorProc. 8th Int. Symposium on Magnetic Materials, Processes and Devices, 206th Meet. of The Electrochemical Society 2004, Honolulu, Hawaii, USA, pp. 481-492
  • A. Ben Amor, C. Ruffert, S. Knappmann, H.H. Gatzen (2004): Write heads with a micro coil for magneto-optical data storageIEEE Trans. on Magn. Vol. 40, No. 4, pp. 3207-3210
  • A. Ben Amor, T. Budde, H.H. Gatzen (2004): Magnetoelastic microtransformer with an improved sensor designDigests 9th Joint MMM-Intermag Conf. 2004, Anaheim, CA, USA, GP-15
  • Beck, Michael (2004): Erhöhung der Verschleißfestigkeit von Mikrobauteilen
  • C. Morsbach, N. Münter, R.J.M. Vullers, H.H. Gatzen (2004): Application of Far Field and Near Field Sliders in Optical Data StorageDigest 9th Joint MMM-Intermag Conf. 2004, Anaheim, CA, USA, GP-13
  • C. Neumeister, H.H. Gatzen (2004): Computer-Aided Variants FindingProc. 13th Int. Ass. for Manag. Of Tech. IAMOT 2004, Washington, D.C. USA
  • D. Dinulovic, H.H. Gatzen (2004): Microfabricated Inductive Linear Micro Positioning SensorProc. 3rd IEEE Int. Conf. on sensors, IEEE Sensors 2004, Vienna, Austria, ISBN 0-7803-8692-2
  • D. Dinulovic, H.H. Gatzen (2004): Microfabricated Inductive Sensor for Position MeasurementsProc. 8th Int. Symposium on Magnetic Materials, Processes and Devices, 206th Meet. of The Electrochemical Society 2004, Honolulu, Hawaii, USA, pp. 471-480
  • H.-H. Gatzen (2004): Schreib-/Lesekopf mit integriertem MikroaktorDE 10260009 A1
  • H.H. Gatzen (2004): Magnetische Mikrosystemtechnik – klein, robust, vielseitigBegleitband zum Hannover Kolloquium 2004, Hannover, Deutschland, S. 127-138
    ISBN: 3-936888-51-5
  • H.H. Gatzen (2004): Magnetic Materials in Thin Film Sensors and ActuatorsProc. 8th Int. Symposium on Magnetic Materials, Processes and Devices, 206th Meet. of The Electrochemical Society 2004, Honolulu, Hawaii, USA, pp. 457-470
  • H.H. Gatzen, C. Kourouklis (2004): Mechanical Machining of Thin Polycrystalline Diamond FilmsASPE 19th Ann. Meet. Orlando, Florida, USA, pp. 594-697
  • H.H. Gatzen, C. Morsbach, C. Kourouklis (2004): Chemisch-Mechanisches Polieren von Wafern für Mikrosysteme61. Jahrbuch Schleifen, Honen, Läppen und Polieren, Vulkan Verlag, Essen, pp. 317-329
  • H.H. Gatzen, G. Günzel (2004): Improved Dicing Method for Thin Silicon WafersProc. 4th euspen Int. Conf. and 6th Ann. Gen. Meet. 2004, Glasgow, UK, pp. 143-144
  • H.H. Gatzen, G. Günzel (2004): Dicing of thin stacked wafer packagesProc. 7th Int. Symposium on Advances in Abrasive Technology 2004, Bursa, Turkey, pp. 443-446
  • H.H. Gatzen, H.-D. Stölting, B. Ponick (2004): Alternatives for Micro-machined Linear ActuatorsProc. 9th Int. Conf. on New Actuators 2004, Bremen, Germany, pp. 665-668
  • Kohlmeier, Thomas (2004): Entwicklung eines elektromagnetischen Antriebsssystems für einen optischen Mikroschalter unter besonderer Berücksichtigung von Fertigungstechniken und ihrer Weiterentwicklung
  • M. Hahn, M. Bedenbecker, U. Brand, H.H. Gatzen (2004): Evaluation of a Linear Hybrid Micro Step MotorProc. 8th Int. Symposium on Magnetic Materials, Processes and Devices, 206th Meet. of The Electrochemical Society 2004, Honolulu, Hawaii, USA, pp. 493-505
  • M.C. Wurz, D. Dinulovic, H.H. Gatzen (2004): Investigation of the permeability on electroplated and sputtered permalloyProc. 8th Int. Symposium on Magnetic Materials, Processes and Devices, 206th Meet. of The Electrochemical Society 2004, Honolulu, Hawaii, USA, pp. 526-536
  • R. Bandorf, H. Lüthje, K. Schiffmann, M. Beck, H.H. Gatzen, M. Schmidt, S. Büttgenbach, G. Bräuer (2004): Submicron coatings for micro-tribological applicationsMicrosystem Technologies, Springer Verlag Berlin Heidelberg New York, Vol. 10, No. 3, pp. 223-226
  • S. Seidemann, T. Kohlmeier, M. Föhse, H.H. Gatzen, S. Büttgenbach (2004): High Aspect Ratio Spiral and Meander Micro Coils for Actuator ApplicationsHARMST 2003, Monterey, CA, USA, Microsystem Technologies Vol. 10, No. 6-7, pp. 564-567
  • S.B. Wiendl, W.-R. Zabel, H.H. Gatzen, G. Poll (2004): The Influence of Boundary Layer Properties on Grease Lubricated High-Speed Ball Bearing PerformanceTransient Processes in Tribology, Tribology Series, 43, Elsevier, Amsterdam, Netherlands, pp. 441-447
  • T. Budde, H.H. Gatzen (2004): Magnetic Properties of an SmCo/NiFe System for Magnetic MicroactuatorsJournal of Magnetism and Magnetic Materials, Vol. 272-276, Part 3
  • T. Budde, H.H. Gatzen (2004): Patterning Techniques for Thick SmCo LayersProc. 18th International Workshop on High-Performance Magnets and Their Applications 2004, Annecy, France, pp. 805-816
  • T. Budde, M. Föhse, B. Majjer, H. Lüthje, G. Bräuer, H.H. Gatzen (2004): An Investigation on Technologies to Fabricate Magnetic Microcomponents for Miniaturized Actuator SystemsMicrosystem Technologies, Springer Verlag Berlin Heidelberg New York, Vol.10, No. 3, pp. 237-240
  • T. Budde, M. Hahn, M. Föhse, J. Edler, H.-D. Stölting, H.H. Gatzen (2004): Design, Fabrication, and Characterization of a Hybrid Linear Micro Step MotorProc. 9th Int. Conf. on New Actuators 2004, Bremen, Germany, pp. 665-668
  • T. Kohlmeier, V. Seidemann, S. Büttgenbach, H.H. Gatzen (2004): An Investigation on Technologies to Fabricate Microcoils for Miniaturized Actuator SystemsMicrosystem Technologies, Springer Verlag Berlin Heidelberg New York, Vol.10, No. 3, pp.175-185
  • W.-R Zabel, S.B. Wiendl, H.H. Gatzen, G. Poll (2004): Einfluss von Antioxidantien auf die Schmierfettgebrauchsdauer in schnelllaufenden WälzlagernMineralöltechnik, Band 49, Heft 7, Hohenheim, Deutschland, S. 1-18
  • W.-R. Zabel, S.B. Wiendl, U. Gunst, G. Poll, H.H. Gatzen, H.F. Arlinghaus (2004): The Influence of Chemical and Physical Boundary Layer Properties on the Tribological Performance of Rolling Element BearingsProc. of 14th Int. Colloquium on Tribology 2004, Stuttgart/Ostfildern, pp. 1385-1393
  • Wiendl, Sonja (2004): Mikrotribologische Untersuchungen an fettgeschmierten Wälzlagern
  • B. Ma, C. Morsbach, H.H. Gatzen (2003): A Novel Flying Height Measurement Approach for Optical SlidersIEEE Proc. of AsiaSENSE 2003, Kuala Lumpur, Malaysia, pp. 29-32
  • C. Kourouklis, T. Kohlmeier, H.H. Gatzen (2003): The Application of Chemical-Mechanical Polishing for Planarizing a SU-8/Permalloy Combination Used in MEMS DevicesSensors & Actuators A: Physical, Vol. 106, No. 1-3, pp. 268-271
  • C. Morsbach, C. Dubarry, M. Gabriel, M. Hoyer, S. Knappmann, F. Piazza, J. Robertson, R. Vullers, H.H. Gatzen (2003): Flyable Media for Slider Based Ultra High Density Optical RecordingIEE Proc. Science, Measurement and Technology, Vol. 150, No. 5, pp. 203-206
  • C. Morsbach, N. Münter, S. Knappmann, H.H. Gatzen: (2003): Concepts for In-situ Flight Attitude Measurements of Optical Flying HeadsProc. Innovative Mass Storage Technology Workshop (IMST) 2003, Grenoble, France, Or 41
  • C. Neumeister, H.H. Gatzen (2003): Combined Matrix Selection to Support the Development of ProductsProc. 12th Int. Ass. for Manag. of Tech. IAMOT 2003, Nancy, France
  • D. Dinulovic, T. Budde, H.H. Gatzen (2003): Design and fabrication of an inductive micro position sensorStatusseminare BMBF-Verbundvorhaben, Microtec, München, S. 295-300
  • H.-H. Gatzen (2003): Microtechnically Produced swiveling platform with magnetic drive and stop positionsUS 20050127588 A1
  • H.-W. Hoffmeister, M. Hlavac, H.H. Gatzen, C. Morsbach (2003): Mikrostrukturierung durch SchleifenMikromechanische Produktionstechnik, Abschlusskolloquium DFG Schwerpunktprogramm 1012. Shaker, Aachen, S. 39-54
  • H.H. Gatzen, C. Kourouklis (2003): Nano-Roughness Standards with a Very Low Roughness ValueProc. euspen 4th Int. Top. Conf. 2003, Aachen, Germany, Vol. 2, pp. 495-498
  • H.H. Gatzen, C. Morsbach (2003): Precision Profile Grinding of High Aspect Ratio MicrostructuresProc. euspen Int. Top. Conf. 2003, Aachen, Germany, pp. 349-352
  • H.H. Gatzen, C. Morsbach, C. Kourouklis (2003): Chemical-mechanical Planarization of a SU-8/Copper combination for MEMSProc. ASPE 18th Ann. Meet. 2003, Portland, Oregon, USA, Sensors & Actuators A: Physical, Vol. 106, No. 1-3, pp. 268-271
  • H.H. Gatzen, E. Obermeier, T. Kohlmeier, T. Budde, H.D. Ngo, B. Mukhopadhyay, M. Farr (2003): An Electromagnetically Actuated Bi-stable MEMS Optical MicroswitchProc. Transducers 03, Boston, MA, USA, pp. 1514-1517
  • H.H. Gatzen, G. Günzel (2003): Optimization of Chemical Mechanical Polishing of Thin Silicon WafersProc. euspen Int. Top. Conf. 2003, Aachen, Germany, Vol. 1, pp. 293-296
  • H.H. Gatzen, G.M Jones, C. Morsbach, G. Günzel, A. Karyazin (2003): Investigations Regarding the Interdependence of Spindle Load and Machine Performance During SlicingProc. ASPE 18th Ann. Meet. 2003, Portland, Oregon, USA, pp. 435-438
  • H.H. Gatzen, M. Beck (2003): Wear of Single Crystal Silicon as a Function of Surface RoughnessWear, Vol. 254, No. 9, pp. 907-910
  • H.H. Gatzen, M. Beck (2003): Investigations on the Friction Force Anisotropy of the Silicon LatticeWear, Vol. 254, No. 11, pp. 1122-1126
  • H.H. Gatzen, M. Beck (2003): Triological Investigation of Micromachined Silicon SlidersTribology Int., Vol. 36, No. 4-6, pp. 279-283
  • L. Zhou, M. Beck, H.H. Gatzen, G. Vurens, F. E. Talke (2003): Tribology of textured pico-slider at a flying height of 5 nmProc. TISD 2003, Monterey, CA, USA
  • L. Zhou, M. Beck, H.H. Gatzen, K. Altshuler, and F. E. Talke (2003): Dynamics of Textured Pico-Sliders during Contact Start/StopIEEE Trans. on Magn., Vol. 39, No.5, pp. 2426-2428
  • L. Zhou, M. Beck, H.H. Gatzen, K. Altshuler, F. E. Talke: (2003): Slider Vibration Reduction Using Slider Surface TextureProc. Joint Conf. on MIPE 2003, Japan
  • M. Balke, H. Lüthje, T. Budde, H.H. Gatzen, G. Bräuer (2003): Non-reactive and reactive ion etching processes for patterning magnetic MEMS componentsProc. of the 2nd MICRO.tec Conf. 2003, Munich, pp. 51-52
  • M. Föhse, H.H. Gatzen: (2003): Erzeugung magnetischer NiFe-Dünnfilme durch galvanische Abscheidung mit Pulse-PlatingOberflächentage 2003, DGO-Veranstaltung, Tagungsband, Bremen
  • M. Föhse, J. Edler, H.D. Stölting, H.H. Gatzen (2003): A batch fabricated linear synchronous motorProc. Int. Mech. Eng. Congr. and Expo IMECE 2003, Washington D.C., USA, pp. 1-8
  • R. Bandorf, H. Lüthje, K. Schiffmann, M. Beck, H.H. Gatzen, M. Schmidt, S. Büttgenbach, G. Bräuer (2003): Submikrometerschichten für mikrotribologische AnwendungenSFB-Kolloquium, Vulkan Verlag Braunschweig, S. 75-83
  • R. Bandorf, M. Beck, H. Lüthje, J.-H. Sick, H.H. Gatzen (2003): Influence of the initial surface roughness on the wear behaviour of micro probes under rotating and oscillating flat micro contactProc. 2nd MICRO.tec Conf. 2003, Munich, pp. 477-478
  • S.B. Wiendl, W.-R. Zabel, H.H. Gatzen, G. Poll: (2003): Grenzschichtuntersuchungen an schnelllaufenden fettgeschmierten SchrägkugellagernGFT Tribologie Fachtagung 2003, Band 2, Göttingen
  • T. Budde, H.H. Gatzen (2003): Thick Sputter Deposited NiFe 45/55 Films for Flux Guides In Magnetic MEMSProc. 16th Soft Magnetic Materials Conf. 2003, Düsseldorf, Germany, pp. 867-872
  • T. Budde, M. Föhse, B. Majjer, H. Lüthje, G. Bräuer, H.H. Gatzen (2003): Fertigung magnetischer SchichtenSFB-Kolloquium, Vulkan Verlag Braunschweig, S. 85-94
  • V. Seidemann, T. Kohlmeier, S. Büttgenbach, H.H. Gatzen (2003): Fertigung von ErregerspulenSFB-Kolloquium Mikroproduktion, Vulkan Verlag Braunschweig
  • C. Becker, A. Bartos, H.H. Gatzen (2002): Exchange Biasing of Oxidized NiFe 81/19IEEE Trans. on Magn. Vol. 38, No. 5, pp. 2770-2772
  • C. Morsbach, R. Golloch, U. Kessen, G.P. Merker, H.H. Gatzen (2002): Messen in anderen Dimensionen - Entwicklung, Fertigung und Erprobung eines induktiven Miniatur-AbstandssensorsF&M Messtechnik, Carl Hanser, Munich, Vol. 110, No. 5, pp. 36-40
  • D. Dinulovic, H.H. Gatzen (2002): Entwicklung eines Wegmesssensors zur Überwachung eines MikropositionierersProc. 47th Internationales Wissenschaftliches Kolloquium 2002, Ilmenau, S. 673-674
  • H. Iswahjudi, H.H. Gatzen (2002): FEM Simulation for Design and Evaluation of an Eddy Current MicrosensorProc. 14th European Simulation Symposium and Exhibition 2002, Dresden, Germany, pp. 201-205
  • H.H. Gatzen (2002): Technologien für MikromotorenInvited paper, Proc. MTT 2002, Erfurt, S. 37-41
  • H.H. Gatzen (2002): Advances in European Magnetic MEMS TechnologyInvited paper, Proc. 7th Int. Symposium on Magnetic Materials, Processes and Devices, 202nd Meet. of The Electrochemical Society 2002, Salt Lake City, UT, USA, pp. 90-108
  • H.H. Gatzen, C. Morsbach (2002): Minimierung der Schnittbreite beim Trennschleifen von Wafern60. Jahrbuch Schleifen, Honen, Läppen und Polieren, Vulkan-Verlag, Essen, pp. 301-309
  • H.H. Gatzen, C. Morsbach, A. Karyazin (2002): High Precision Machining of a Longitudinal Bearing for a Linear MicroactuatorProc. 3rd Int. euspen Conf. 2002, Eindhoven, The Netherlands, pp. 325-328
  • H.H. Gatzen, C. Morsbach, A. Karyazin (2002): Mechanical Micromachining of High Aspect Ratio MicrostructuresProc. ASPE 2002, 17th Ann. Meet. 2002, St. Louis, Missouri, USA, pp. 562-566
  • H.H. Gatzen, E. Andreeva, H. Iswahjudi (2002): Eddy Current Microsensor Based on Thin - film TechnologyIEEE Trans. on Magn., Vol. 38, No. 5, pp. 3368-3370
  • H.H. Gatzen, G. Günzel (2002): Dicing of Ultra-thin Silicon WafersProc. ASPE 2002, 17th Ann. Meet. 2002, St. Louis, Missouri, USA, pp. 557-561
  • H.H. Gatzen, G. M. Jones, A. Karyazin (2002): Chipping Minimization during Dicing and SlicingProc. ASPE 2002, 17th Ann. Meet. 2002, St. Louis, Missouri, USA, pp. 551-556
  • J. Edler, M. Föhse, H.D. Stölting, H.H. Gatzen (2002): A Linear Microactuator with Enhanced DesignMicrosystem Technologies, Springer Verlag Berlin Heidelberg New York, Vol. 7, No.5-6, pp. 261-264
  • L. Zhou, M. Beck, H.H. Gatzen, K. Kato, G. Vurens, F. E. Talke (2002): Tribology of Textured Sliders in Near Contact SituationsIEEE Trans. on Magn., Vol. 38, No. 5, pp. 2159-2161
  • L. Zhou, M. Beck, H.H. Gatzen, K. Kato, G. Vurens, F. E. Talke (2002): The effect of Slider Texture on the Tribology of Near Contact Recording SlidersProc. Austrib 2002, Perth, Australia, pp. 229-126
  • M. Föhse, H.H. Gatzen (2002): Optimizing the Magnetic Properties of Electroplated Permalloy for Flux Guides in MicromotorsProc. 7th Int. Symposium on Magnetic Materials, Processes and Devices, 202nd Meet. of The Electrochemical Society 2002, Salt Lake City, UT, USA, pp. 125-136
  • M. Föhse, J. Edler, H.D. Stölting, H.H. Gatzen (2002): Design, Fabrication, and Characterization of a Miniature Linear Asynchronous MotorProc. Actuator 2002, Bremen, Germany, pp. 176-179
  • M. Föhse, J. Edler, H.D. Stölting, H.H. Gatzen (2002): Investigations on the Pole Geometry Optimization of a Variable Reluctance Microactuator47. Internationales Wissenschaftliches Kolloqium, Ilmenau, Germany, pp. 215-216
  • T. Budde, H.H. Gatzen (2002): Patterned Sputter Deposited SmCo-Films for MEMS ApplicationsJournal of Magnetism and Magn. Mat., Vol. 242-245
  • T. Budde, H.H. Gatzen (2002): Magnetic Properties of Thick Sputter Deposited SmCo-Films for MEMS-ApplicationsDigest Intermag Europe 2002, Amsterdam, The Netherlands, GD05
  • T. Kohlmeier, H.H. Gatzen (2002): Challenges in Using Photosensitive Embedding Material to Planarize Multi-layer Coils for Actuator SystemsJournal of Magnetism and Magn. Mat., Vol. 242-245, pp. 1149-1152
  • T. Kohlmeier, H.H. Gatzen (2002): Ni Electroplating in SU-8 Microforms for Fabricating Self Supporting MicrostructuresProc. 7th Int. Symposium on Magnetic Materials, Processes and Devices, 202nd Meet. of The Electrochemical Society 2002, Salt Lake City, UT, USA, pp. 137-148
  • T. Kohlmeier, T. Budde, H.H. Gatzen (2002): Electromagnetic Bearing System for Integration in a Linear MicroactuatorProc. Eurosensors XVI, The 16th European Conf. on Solid-State Transducers 2002, Prague, Czech Republic, pp. 1217-1220
  • T. Kohlmeier, V. Seidemann, S. Büttgenbach H.H. Gatzen (2002): Application of UV Depth Lithography and 3D-Microforming for High Aspect Ratio Electromagnetic Microactuator ComponentsMicrosystem Technologies, Springer Verlag Berlin Heidelberg New York, Vol. 8, No.4-5, pp. 304-307
  • U. Gunst, S.B. Wiendl, W.-R. Zabel, H.F. Arlinghaus, H.H. Gatzen, G. Poll (2002): Characterization of High-Speed Rolling Element Bearing, Greases and Additives with TOF-SIMSProc. SIMS Europe, Münster, Germany, pp. 32
  • C.W. Chang, T. Budde, H.H. Gatzen, R.S. Muller (2001): A Magnetically Actuated Scanner for Intravascular Ultrasound ImagingProc. ASME IMECE 2001, Int. Mechanical Engineering Congress and Exposition, New York, USA, Vol. 2, MEMS 23914
  • H.H. Gatzen (2001): Dicing Challenges in Microelectronics and Micro Electro-Mechanical Systems (MEMS)Microsystem Technologies Vol. 7, pp. 151-154
  • H.H. Gatzen, C. Kourouklis (2001): The Fabrication of Nano-Roughness Standards for the Calibration of Atomic Force MicroscopesProc. ASPE 16th Ann. Meet. 2001, Virginia, USA, pp. 493-496
  • H.H. Gatzen, C. Kourouklis, R. Krüger-Sehm (2001): Roughness Standards for the Calibration of SPM- from Design to Comparison MeasurementProc. 5th Seminar on Quantitative Microscopy, Nanoscale 2001, Bergisch Gladbach, pp. 7-13
  • H.H. Gatzen, C. Morsbach, G.M. Jones (2001): Investigations Regarding the Operating Range of Ultrathin Grinding Wheels on AlTiCProc. 10th ICPE 2001, Yokohama, Japan
  • H.H. Gatzen, C. Morsbach, M. Tricard (2001): Dual Wheel Miniature Gang for Silicon Wafer DicingProc. euspen 2nd Intern. Conf. 2001, Turin, Italy, pp. 722-725
  • H.H. Gatzen, M. Beck (2001): DLC Coating Technology for Cutting ToolsProc. 2nd Int. Conf. 2001 THE Coatings, Hanover, C2-1-7
  • J. Edler, M. Föhse, H.-D. Stölting, H.H. Gatzen (2001): Elektromagnetischer MikrolinearmotorInnovative Klein- und Mikroantriebe 2001 (Innovative Miniature and Micro Drives), GMM-Fachbericht 33, VDE-Verlag, Mainz, S.117-121
  • M. Föhse, T. Kohlmeier, H.H. Gatzen (2001): Thinfilm Technologies to Fabricate a Linear MicroactuatorSensors and Actuators A91, No. 1-2, pp. 145-149
  • Zeadan, Jeihad (2001): Einfluss des Kühlschmiermittels auf die Fertigung keramischer Mikrobauteile durch Hochpräzisionstrennschleifen
  • G. Poll, H.H. Gatzen, S. Wiendl, M. Gronitzki, M. Spreckels (2000): Korrelation mikrotribologischer Eigenschaften mit dem makroskopischen Reibungsverhalten am Beispiel von SynchronisierungenProc. 12th Int. Colloquium Tribology 2000-Plus, Stuttgart, Tribologie und Schmierungstechnik, S. 13-17
  • H.-H. Gatzen (2000): Micromechanical, rotating device with a magnetic drive and method for the production thereofWO 0247241 A1
  • H.H. Gatzen (2000): Rigid Disk Slider Micromachining Challenges to Meet Microtribology NeedsInvited paper, Tribology International, Vol. 33, pp. 347-342
  • H.H. Gatzen, C. Morsbach, J. Zeadan (2000): Advances in Dicing Wafers for Micro Electro-Mechanical Systems (MEMS)Proc. Micro.tec Conf. 2000, Hanover, VDE Publication, Vol. 2, pp. 621-625
  • H.H. Gatzen, C. Morsbach, J. Zeadan: (2000): Diamond Wear during Precision Grinding of Brittle MaterialsAdvances in Abrasive Technology III, 2000, Soc. of Grinding Engineers, Tokyo, Japan
  • H.H. Gatzen, H. Siekmann (2000): Investigations on the Tool Plate Preparation for NanogrindingProc. ASPE 15th Ann. Meet. Scottsdale, AZ, USA, pp. 90-93
  • H.H. Gatzen, H.-D. Stölting, S. Büttgenbach, H. Dimigen (2000): A Novel Variable Reluctance Micromotor for Linear ActuationProc. Actuator 2000, Bremen, Germany, pp. 363-366
  • H.H. Gatzen, J. Zeadan (2000): Investigations on the Coolant Supply in Precision DicingProc. ASPE 15th Ann. Meet. 2000, Scottsdale, AZ, USA, pp. 90-93
  • Siekmann, Heiko (2000): Arbeitsscheibenoptimierung beim Nanoschleifen
  • W. Bach, K. Möhwald, H.H. Gatzen, C. Morsbach (2000): Metall-Kapillardruckgießen: ein neues Urformverfahren für die Mikromechanik (Metal Capillary Casting, a New Micromechanical Technology)7. Werkstoffwissenschaftliches Kolloquium, Innovative Werkstofftechnologie 1999, Aachen, Werkstoffwissenschaftliche Schriftenreihe, Band 41, S. 67-73
  • Wiendl, Wulf (2000): Produktintegritätskonzept zum Einsatz in Concurrent Engineering
  • C. Morsbach, H.H. Gatzen (1999): Investigations on the Wear Profile of Dicing WheelsProc. ASPE 14th Ann. Meet. 1999, Monterey, CA, USA, pp. 67-70
  • H.-H. Gatzen (1999): Sensor zur Bestimmung thermischer Effekte im Lagerbereich von Gleitkörpern, Gleitlagern und LuftlagernDE 19749092 A1
  • H.-H. Gatzen (1999): Induktiver Mikrosensor zur Messung von DehnungDE 19809794 A1
  • H.H. Gatzen (1999): Anwendung der Mikrotechnologie in der MesstechnikTechnisches Messen, Band 66, Heft 12, S. 476-484
  • H.H. Gatzen (1999): Mikrobearbeitung sprödharter Keramikwerkstoffe mittels Trenn- und Profilschleifen59. Jahrbuch Schleifen, Honen, Läppen und Polieren, Vulkan Verlag, Essen, Germany, pp. 190-204
  • H.H. Gatzen (1999): Thin Film Head Technologies in MEMS Applications Fabrication of a Dual Stripe MR-SensorProximity, Magnetic Storage Industry Source Book, Balzers Publication, pp. 34-35
  • H.H. Gatzen (1999): Fabrication Considerations when Dicing Silicon WafersMaterials Mechanics-Fracture Mechanics-Micromechanics 1999, Fraunhofer Institute for Reliability and Microintegration, Berlin
  • H.H. Gatzen, H. Siekmann (1999): Plate Topography Influence on the Nanogrinding Process.Proc. ASPE 14th Ann. Meet. Monterey, CA, USA, pp. 83-86
  • H.H. Gatzen, J. Zeadan, G. Jones (1999): Kerf Sidewall Phenomena in Slicing Processes of Thin Film HeadsProc. euspen 1st Int. Conf. 1999, Bremen, pp. 548-461
  • H.H. Gatzen, L. Rissing (1999): Composition Dependent Magnetostrictive Properties of NiFe FilmsProc. ASME Ann. Meet. 1999, Nashville, Tennessie, USA, pp. 151-155
  • H.H. Gatzen, L. Rissing, T. Woywod (1999): Magnetoelastic Microtransformer with an Improved Core DesignDigest IEEE Intermag Conf. 1999, Kyongju, South Korea, GF-02, ISBN:0-7803-5555-5
  • H.H. Gatzen, M. Beck, J. Zeadan (1999): Technological Challenges in Ultraprecision Grinding of Flexural MicrosensorProc. euspen 1st Int. Conf. 1999, Bremen, Germany, Vol. 1, pp. 538-541
  • K. Möhwald, C. Morsbach, F.-W. Bach, H.H. Gatzen (1999): Investigations on Capillary Action Microcasting of MetalsProc. EUSPEN 1st Int. Conf. 1999, Bremen, Germany, Vol. 1, pp. 490-493
  • Rissing, Lutz (1999): Entwicklung und Herstellung eines magnetoelastischen Mikrosensors
  • Schwabe, Michael (1999): Doppelstreifige magnetoresistive Sensoren mit hoher Formanisotropie
  • Zielke, Steven (1999): Mikromagnetische Simulationen von kleinen Strukturen
  • H.H. Gatzen, C. Morsbach, H. Siekmann, J. Zeadan (1998): Slicing Induced ABS Cambering in Thin Film PicoslidersIEEE Trans. on Magn., Vol. 35, No. 5, pp. 2427-2429
  • H.H. Gatzen, H.K. Tönshoff (1998): Risk Management and Product Integrity – A Simple Approach to Concurrent EngineeringProc. TMCE 1998, Manchester, UK
  • H.H. Gatzen, L. Ruhbach (1998): Mechanical Microprofiling Mechanisms of Advanced CeramicsProc. 13th Ann. Meet. 1998, St Louis, MO, USA, pp. 69-75
  • H.H. Gatzen, M.S. Schwabe (1998): Dual Stripe Sensor on a Picoslider for In-Contact Thermal Asperity TestingIEEE Trans. on Magn., Vol. 34, No. 4, pp. 1702-1704
  • L. Rissing, S.A. Zielke, H.H. Gatzen (1998): Inductive Microtransformer Exploiting the Magnetoelastic EffectIEEE Trans. on Magn. Vol. 34, No. 4, pp. 1378-1380
  • Ruhbach, Lars (1998): Erzeugung hochgenauer Kanten beim Präzisionstrennschleifen von Keramik
  • T. Hellmold, L.P. Ruhbach, J. Zeadan, H.H. Gatzen (1998): Ductile Mode Cutting of Silicon MicropartsProc. ASPE Spring Topical Meet. 1998, Monterey, CA, USA
  • H.H. Gatzen (1997): Precision Engineering Requirements in Magnetic Memory Disc File SystemsInvited paper, Proc. 9th Precision Engineering Seminar 1997, Braunschweig
  • H.H. Gatzen (1997): Challenges in thin film head machiningData Storage, Vol. 3, pp. 85-90
  • H.H. Gatzen, H.K. Tönshoff (1997): Risk Management and Product Integrity – A Simple Approach to Concurrent EngineeringProc. TMCE 1998, Manchester, UK, 1997
  • H.H. Gatzen, J.C. Mätzig, H. Siekmann (1997): Applying Scanning Probe Microscopy to Ultraprecision-MachiningProc. european Workshop on Microtechnology and Scanning Probe Microscopy 1997, Mainz
  • H.H. Gatzen, J.C. Mätzig, H. Siekmann (1997): Rauheitsmessungen im Subnanometerbereich: Vergleich optischer und tastender Messverfahren (Roughness Measurement in the Subnanometer Range – a Comparison between Optical and Tactile Methods)Proc. Workshop 1997: New Developments and Applications in Scanning Probe Microscopy, Dresden, Germany
  • H.H. Gatzen, J.C. Mätzig, L.P. Ruhbach (1997): White Light Interferometry and Atomic Force Microscopy Grinding Tool Topography Measurements - A ComparisonProc. 4th Int. Conf. on Ultraprecision in Manufacturing Engineering 1997, Braunschweig, Germany
  • H.H. Gatzen, J.C. Mätzig, L.P. Ruhbach (1997): Grinding Tool Topography Analysis by White Light Interferometry and Atomic Force MicroscopyProc. 9th Precision Engineering 1997, Braunschweig
  • H.H. Gatzen, J.C. Mätzig, L.P. Ruhbach (1997): Ultraprecision Grinding of High Aspect Ratio MicropartsProc. ASPE 12th Ann. Meet. 1997, Norfolk, UK, VA, pp. 454-457
  • H.H. Gatzen, M.S. Schwabe (1997): Technological Investigations for the Manufacture of Giant Magnetoresistive (GMR) StructuresProc. SICAN Fall Conf. 1997, Hanover, Germany
  • H.H. Gatzen, S.A. Zielke (1997): Finite Element Analysis of Dual Magnetic Field SensorsSICAN Fall Conf. 1997, Hanover
  • Mätzig, Christoph (1997): Ultrapräzisionsbearbeitung von Strukturkeramiken mittels Nanoschleifen
  • H.H. Gatzen, J.C. Mätzig (1996): Nanogrinding Proc. ASPE 11th Ann. Meet. 1996, Monterey, California, USA, and J. of the American Society for Precision Engineering, Vol. 21, pp. 134-139
  • H.H. Gatzen, J.C. Mätzig (1996): Minimierung der Rauheit beim Nanoschleifen isostatisch heißgepreßter Keramikwerkstoffe (Roughness Minimization during Nanogrinding of Hot Isostatic Pressed Ceramics)Proc. 8th Precision Engineering, Braunschweig, pp. 22.1-22.21
  • H.H. Gatzen, J.C. Mätzig, M.K. Schwabe (1996): Precision Machining of Rigid Disk Head SlidersInvited paper, IEEE Trans. on Magn., Vol. 32, No. 3, pp. 1843-1849
  • H.H. Gatzen, X. Ma, M. Scherge, M.S. Jhon, C.L. Bauer (1996): Observations Regarding the Tribological Properties of SiC Sliders Compared to ALTiC SlidersIEEE Trans. on Magn., Vol. 32, No. 5, pp. 3783-3785
  • H.H. Gatzen (1995): Microtechnology and its Application in Data Storage - An OverviewProc. SICAN and CAD/CAT Lower Saxony Conf. 1995, Germany
  • H.H. Gatzen (1995): Time to Market - Schlüssel zum Erfolg bei Hochtechnologieprodukten (Time to Market - The Key to Success with High Technology Products)Proc. SICAN and CAD/CAT Lower Saxony Conf. 1995, Germany
  • H.H. Gatzen (1995): Magnetic Micromechanics Activities in GermanyInvited paper, Proc. 4th Int. Symposium on Materials, Processes and Devices 1995, Chicago, Illinois, USA
  • H.H. Gatzen, J.C. Mätzig (1995): Ultrapräzisionsbearbeitung von technischen Keramiken mittels Nanoschleifen58. Jahrbuch, Schleifen, Honen, Läppen und Polieren, Vulkan-Verlag, Essen, Deutschland, pp. 227-241
  • H.H. Gatzen, G.F. Hughes (1987): Flight Attitude and Take-off/Landing Behavior of a Miniature Winchester Head for Rotary ActuatorsProc. ASLE Tribology Conf. 1987, San Antonio, Texas, USA, pp. 133-137
  • H.H. Gatzen, M. Smallen, P.T. Tedrow (1987): Head-Media Wear in Rigid Disc DrivesSociety of Tribologists and Lubrication Engineers, Tribology and Mechanics of Magnetic Storage Systems, Park Ridge, Illinois, USA, Vol. 4, pp. 116-122
  • H.H. Gatzen, L.W. Fay (1982): Positional Accuracy and Acoustic Noise Problems in High Track Density Floppy Disk Drives with a Step Motor Driven Band ActuatorProc. 11th Ann. Symposium on Incremental Motion Control Systems and Devices 1982, Chicago, Illinois, USA, pp. 197-207
  • H.H. Gatzen (1980): Technologie der Schreib-Lese-Köpfe für digitale Magnetschichtspeicher (Technology of Read/Write Heads for Digital Magnetic Storage Devices)Proc. Constronic '80, Budapest, Ungarn, pp. 197-207
  • H.H. Gatzen (1980): Theoretische Ermittlung des Kopfprofils eines Schreib-Lese-Kopfes für Magnetbandspeicher mit hoher Bandgeschwindigkeit. (A Theoretical Approach to determine the Head Profile of a Read/Write Head for High Speed Tape Drives)Feinwerktechnik No. 7, pp. 361-364
  • H.H. Gatzen (1980): Schreib-Leseköpfe für Magnetplattenspeicher in konventioneller und Dünnfilm-Technologie. Ein Vergleich in Aufbau, Wirkungsweise und Leistungsmerkmalen (Read/Write Heads for Magnetic Disk Files in Conventional and Thin-Film Technology. A Comparison of Design, Principle, and Specification) Feinwerktechnik 2, pp. 53-59
  • H.H. Gatzen, W. Berghof (1980): Sputter Deposited Multilayer Thin-Film HeadIEEE Trans. on Magn., Vol. 16, No. 5, pp. 782-785
  • H.H. Gatzen (1979): Wandel in der Feinwerktechnik: Elektronik in klassischen Bereichen der Feinwerktechnik, Feinwerktechnik in der Elektronik (Changes in Precision Mechanics: Electronics in the Field of Precision Mechanics, Precision Mechanics in the Field of Electronics)Feinwerktechnik No. 8, pp. 357-364
  • H.H. Gatzen (1977): Bütykös tárcsa felületeinek egyenetlensége és érdessége által létrehozott zavaró gyorsulások (Disturbing Accelerations caused by Waviness and Roughness of the Cam Surface)Finommechanika Microtechnika 12
  • H.H. Gatzen, J. Heinzl (1977): Dynamik schnellaufender Kurvengetriebe (Dynamics of High Speed Cam Follower Systems)Proc. Second Symposium on Linkages and Computer Aided Design Methods, Vol. 3, No. 1, paper 24, Bucharest, Rumänien and I-Magazine No. 281, Düsseldorf, pp. 163-169
  • H.H. Gatzen (1976): Die quantitative Abschätzung der Störbeschleunigungen bei Kurvengetrieben (A Quantitative Analysis of Disturbing Accelerations in Cam Follower Systems)Proc. Constronic '76, Budapest, Ungarn, pp. 327-336
  • H.H. Gatzen (1976): Bestimmung der Nutz- und Störbeschleunigungen bei Kurvengetrieben. (Determination of the Disturbing and Effective Accelerations in Cam Follower Systems)Dissertation, RWTH Aachen