Technological Challenges in Ultraprecision Grinding of Flexural Microsensor
| Categories |
Konferenz (reviewed) |
| Year | 1999 |
| Authors | H.H. Gatzen, M. Beck, J. Zeadan |
| Published in | Proc. euspen 1st Int. Conf. 1999, Bremen, Germany, Vol. 1, pp. 538-541 |
