Relationship between Removal Rate and Friction Force of a CMP Process for MEMS
| Categories |
Konferenz (reviewed) |
| Year | 2009 |
| Authors | S. Cvetkovic, D. Miletic, H.H. Gatzen |
| Published in | Proc. euspen 9th Int. Conf. 2009, San Sebastian, Spain, Vol. 2, pp. 499-502 |
