Rauheitsmessungen im Subnanometerbereich: Vergleich optischer und tastender Messverfahren (Roughness Measurement in the Subnanometer Range – a Comparison between Optical and Tactile Methods)
| Categories |
Konferenz (reviewed) |
| Year | 1997 |
| Authors | H.H. Gatzen, J.C. Mätzig, H. Siekmann |
| Published in | Proc. Workshop 1997: New Developments and Applications in Scanning Probe Microscopy, Dresden, Germany |
