Nonevaporable getter-MEMS for generating UHV conditions in small volumina
| Categories |
Zeitschriften/Aufsätze (reviewed) |
| Year | 2022 |
| Authors | L. Diekmann, A. Kassner, F. Dencker, M. Wurz |
| Published in | Journal of Vacuum Science & Technology B |
| DOI | 10.1116/6.0001991 |
