Modeling CMP - Investigation of the Mechanical Removal Mechanism
| Categories |
Konferenz (reviewed) |
| Year | 2005 |
| Authors | S. Cvetkovic, K.-H. Wu, H.H. Gatzen |
| Published in | Proc. ASPE 20th Ann. Meet. 2005, Norfolk, Virginia, USA, pp. 500-503 |
