Mikro-Hysteresemesssensor zur Vermessung anisotroper Dünnfilme. Micro Hysteresis Sensor for Measuring Anisotropic Thin-Films
| Categories |
Konferenz (reviewed) |
| Year | 2009 |
| Authors | E. Flick, K. Feindt, H.H. Gatzen |
| Published in | Proc. MST-Kongress 2009, Berlin, Deutschland, S. 389-392 |
