Mechanical Micromachining of High Aspect Ratio Microstructures
| Categories |
Konferenz (reviewed) |
| Year | 2002 |
| Authors | H.H. Gatzen, C. Morsbach, A. Karyazin |
| Published in | Proc. ASPE 2002, 17th Ann. Meet. 2002, St. Louis, Missouri, USA, pp. 562-566 |
