Magnetic MEMS
| Categories |
Konferenz (reviewed) |
| Year | 2014 |
| Authors | L. Rissing, A.Belski, T. Creutzburg, T. Griesbach, M. Kaiser, A. Wienecke, M. C. Wurz |
| Published in | Semicon Russia 2014, St. Petersburg, St. Petersburg State Polytechnical University Journal 5 (205), pp. 21-35 |
