Investigations on Silicon Nitride Thin Films Deposited be PECVD
| Categories |
Konferenz (reviewed) |
| Year | 2011 |
| Authors | C. Ruffert, F. Pape, L. Rissing |
| Published in | European Congress and Exhibition on Advanced Materials and Processes (Euromat 2011), Montpellier, France, 2011 |
