Investigation on the Impact on Process Quality When Utilizing Different Pads during Chemical-Mechanical Polishing of MEMS
| Categories |
Konferenz (reviewed) |
| Year | 2007 |
| Authors | S. Cvetkovic, H.H. Gatzen |
| Published in | Proc. ASPE 22nd Ann. Meet. 2007, Dallas, TX, USA, pp. 469-472 |
