Evaluation of a Prototype CMP Machine for Improving the Global Planarization by MEMS
| Categories |
Konferenz (reviewed) |
| Year | 2009 |
| Authors | S. Cvetkovic, H.H. Gatzen |
| Published in | Proc. ASPE, 24th Ann. Meet. 2009, Monterey, CA, USA, pp. 315-318 |
