Direct hot embossing of micro-elements by means of photostructurable polyimide
| Categories |
Zeitschriften/Aufsätze (reviewed) |
| Year | 2016 |
| Authors | M. Akin, M. Rezem, M. Rahlves, K. Cromwell, B. Roth, E. Reithmeier, M. Wurz, L. Rissing, H.-J. Maier |
| Published in | Journal of Micro/Nanolithography, MEMS, and MOEMS (JM3) |
