Development of a Humidity Sensor Element based on sputter-deposited Thin ZnO-Layers
| Categories |
Konferenz (reviewed) |
| Year | 2016 |
| Authors | Klaas D, Rein M, Wurz MC, Rissing L |
| Published in | 3rd International Conference on System-integrated Intelligence: New Challenges for Product and Production Engineering, SysInt 2016, Procedia Technology 26, pp. 27-34 |
| DOI | 10.1016/j.protcy.2016.08.005 |
| More info | |
