Design, Fabrication and Calibration of Capacitive Air Gap Sensors for Application in Levitation based Guides for Microactuators.
| Categories |
Verschiedenes |
| Year | 2009 |
| Authors | B. Denkena, H.H. Gatzen, H. Kayapinar, F. Pape |
| Published in | Proc. IEEE Sensors 2009, Christchurch, New Zealand, pp. 1915-1918 |
