Considerations on Ultra-thin Substrateless Micro and Nano Systems
| Categories |
Konferenz (reviewed) |
| Year | 2011 |
| Authors | H.H. Gatzen, T. Griesbach, M. C. Wurz, L. Rissing |
| Published in | Proc. ASME2011 & Exp. IMECE2011, Denver, CO, USA, 2011 |
