Application of UV Depth Lithography and 3D-Microforming for High Aspect Ratio Electromagnetic Microactuator Components
| Categories |
Zeitschriften/Aufsätze |
| Year | 2002 |
| Authors | T. Kohlmeier, V. Seidemann, S. Büttgenbach H.H. Gatzen |
| Published in | Microsystem Technologies, Springer Verlag Berlin Heidelberg New York, Vol. 8, No.4-5, pp. 304-307 |
