An Investigation on Technologies to Fabricate Microcoils for Miniaturized Actuator Systems
| Categories |
Beiträge in Büchern |
| Year | 2004 |
| Authors | T. Kohlmeier, V. Seidemann, S. Büttgenbach, H.H. Gatzen |
| Published in | Microsystem Technologies, Springer Verlag Berlin Heidelberg New York, Vol.10, No. 3, pp.175-185 |
