InstitutUnser TeamMarc Wurz
Publikationsliste

Publikationen

Zeitschriften/Aufsätze (reviewed)

  • Long Y, Dencker F, Isaak A, Hermsdorf J, Wurz MC, Twiefel J (2018): Self-Cleaning Mechanisms in Ultrasonic Bonding of Al WireJournal of Materials Processing Technology, Vol 258 Weitere Informationen
    DOI: 10.1016/j.jmatprotec.2018.03.016
  • Long Y, Dencker F, Isaak A, Li C, Schneider F, Hermsdorf J, Wurz MC, Twiefel J, Wallaschek J (2018): Revealing of ultrasonic wire bonding mechanisms via metal-glass bondingMaterials Science and Engineering B: Solid-State Materials for Advanced Technology, Vol 236-237
    DOI: 10.1016/j.mseb.2018.11.010
  • Mishin M, Vorobyev A, Kondrateva A, Koroleva E, Karaseov P, Bespalova P, Shakhmin A, Glukhovskoy A, Wurz MC, Filimonov A (2018): The Mechanism of Charge Carrier Generation at the ТiO2 - n-Si Heterojunction Activated by Gold NanoparticlesSemiconductor Science and Technology, Vol 37(7)
    DOI: 10.1088/1361-6641/aac4f3
  • Schmelt AS, Hofmann V, Fischer EC, Wurz MC, Twiefel J (2018): Design and Characterization of the Lateral Actuator of a Bimodal Tactile Display With Two Excitation DirectionsDisplays, Vol 54
    DOI: 10.1016/j.displa.2018.09.002
  • Dinulovic D, Shousha M, Haug M, Beringer S, Wurz MC (2017): Comparative Study of Microfabricated Inductors/Transformers for High-Frequency Power ApplicationsIEEE Transactions on Magnetics (Volume: 53, Issue: 11, Nov. 2017) Weitere Informationen
    DOI: 10.1109/TMAG.2017.2734878
  • Hoff C, Venkatesh A, Schneider F, Hermsdorf J, Bengsch S, Wurz MC, Kaierle S, Overmeyer L (2017): Chip-Bonding of Low-melting Eutectic Alloys on Flexible Substrates by Transmitted Laser Radiation Advanced Optical Technologies, 2017; Vol. 6 (3-4) Weitere Informationen
    DOI: 10.1515/aot-2017-0011
  • van Drunen WJ, Lachheb SK, Glukhovskoy A, Twiefel J, Wurz MC, Lenarz T, Rau TS, Majdani O (2017): Investigation of intracochlear dual actuator stimulation in a scaled test rigCurrent Directions in Biomedical Engineering, Vol 3(2)
    DOI: 10.1515/cdbme-2017-0024
  • van Drunen WJ, Mueller M, Glukhovskoy A, Salcher R, Wurz MC, Lenarz T, Maier H (2017): Feasibility of Round Window Stimulation by a Novel Electromagnetic MicroactuatorBioMed Research International, Vol 2017
    DOI: 10.1155/2017/6369247
  • Johannes Rittinger, Piriya Taptimthong, Lisa Jogschies, Marc C. Wurz, Lutz Rissing (2016): Magnetic microstructure analysis of sputter deposited permalloy thin films on a spin-on polyimide substrateMicrosystem Technologies: 1-6.
    DOI: 10.1007/s00542-015-2792-0
  • M. Akin, M. Rezem, M. Rahlves, K. Cromwell, B. Roth, E. Reithmeier, M. Wurz, L. Rissing, H.-J. Maier (2016): Direct hot embossing of micro-elements by means of photostructurable polyimideJournal of Micro/Nanolithography, MEMS, and MOEMS (JM3)
  • L. Jogschies, D. Klaas, R. Kruppe, J. Rittinger, P. Taptimthong, A. Wienecke, L. Rissing, M. C. Wurz (2015): Recent Developments of Magnetoresistive Sensors for Industrial ApplicationsSensors, 15(11), 28665-28689
  • D. Dinulovic, M. Kaiser, A. Gerfer, O. Opitz, M.C. Wurz, L. Rissing (2014): Microtransformer with Closed Fe-Co Magnetic Core for High Frequency Power ApplicationsJournal of Applied Physics 115, 17A317
    DOI: 10.1063/1.4863930
  • D. Dinulovic, M. Kaiser, A. Gerfer, O. Opitz, M.C. Wurz, L. Rissing (2014): Thin-film Microtransformer for High Frequency Power ApplicationsAIP Journal of Applied Physics 115, 17A317
    DOI: 10.1063/1.4863930

Beiträge in Büchern (reviewed)

  • A. Belski, M. C. Wurz, L. Rissing (2011): Readout of Magnetic Tracks using Soft Magnetic MaterialAbstracts Book, SMM 2011, Kos Island, Greece, p. 481

Beiträge zu Sammlungen

  • L. Rissing, M. C. Wurz, M. Stompe (2016): Präzisionsbearbeitung endkonturnaher Keramik im ungesinterten ZustandBeitrag für 67. Ausgabe Jahrbuch Schleifen, Honen, Läppen und Polieren, Vulkan Verlag, Essen, 2016
  • E. Asadi, A. Bouabid, M. C. Wurz, T. Grove, Be. Denkena, L. Rissing (2015): Neuartige Herangehensweise für eine Batchproduktion keramischer Mikrofräswerkzeuge.Diamond Business – Ausgabe 3.2015, S. 12-16, 2015

Beiträge in Büchern

  • Wurz, M. C., Ruffert, C., Rissing, L. (2011): Lehrbuch Mikrotechnologie : für Ausbildung, Studium und Weiterbildung (Kapitel 12: Ätzprozesse)Fachbuchverlag Leipzig im Carl-Hanser-Verlag, München
    ISBN: 978-3-446-42560-6
  • O. Traisigkhachol, H. Schmid, M.C. Wurz, H.H. Gatzen (2009): Applying SU-8TM to the Fabrication of Micro Electro Discharge Machining ElectrodesMicrosystem Technologies, Springer Verlag Berlin, Heidelberg, New York
  • K.-H. Wu, O. Traisigkhachol, M. C. Wurz, H. H. Gatzen (2007): Lesen und Schreiben magnetischer DatenSFB653 Kolloquium, Hannovermesse 2007, Hannover, Deutschland, S. 63-68

Konferenz (reviewed)

  • Asadi E, Hockauf R, Denkena B, Grove T, Wurz MC (2018): Flexible mono- and multilayer micro grinding tools for ultra-high precision processing and micro machining18th International Conference & Exhibition proceedings, pp. 151-152, Venedig, Italien, June 2018
  • Bengsch S, Aue M, De Wall S, Wurz MC (2018): Structuring Methods of Polymers for Low Cost Sensor ManufacturingIEEE 68th Electronic Components and Technology Conference (ECTC) | Datei | Weitere Informationen
    DOI: 10.1109/ECTC.2018.00213
    ISBN: 978-1-5386-4999-2
  • Christ M, Kassner A, Smol R, Bawamia A, Peters A, Wurz MC, Rasel EM, Wicht A and Krutzik M (2018): Integrated Atomic Quantum Technologies in Demanding Environments: Development and Qualification of Miniaturized Optical Setups and Integration Technologies for UHV and Space OperationInternational Conference on Space Optics 2018, ICSO 2018
  • Hockauf R, Asadi E, Denkena B, Grove T, Wurz MC (2018): Grinding of riblets with “beaver tooth” multi-layer tools4th CIRP Conference on Surface Integrity, Tianjin, China, Juli 2018
  • Isaak A, Long Y, Asadi E, Wurz M, Twiefel J, Wallaschek J (2018): Fabrication and characterization of high-speed PZT sensors for the investigation of ultrasonic wire bonding processeuspen’s 18th International Conference & Exhibition
  • Long Y, Dencker F, Isaak A, Schneider F, Hermsdor J, Wurz MC, Twiefel J (2018): Visualization of Oxide Removal during Ultrasonic Wire Bonding ProcessIEEE Electronics Packaging Technology Conference (EPTC), Singapore, p. 1-4
  • Schlangen S, Bremer K, Isaak A, Wurz MC, Bonilla G, Neumann J, Roth B, Overmeyer L (2018): Mode-selective polished fiber couplers based on fiber gratingsThe Optical Fiber Communication Conference and Exhibition (OFC) Weitere Informationen
    DOI: 10.1364/OFC.2018.Th1K.6
    ISBN: 978-1-943580-38-5
  • Schlangen S, Bremer K, Zheng Y, Isaak A, Wurz MC (2018): Manufacturing and characterization of asymmetric evanescent field polished fiber couplers for fiber grating assisted mode selective couplingSPIE Photonics Europe Weitere Informationen
    DOI: 10.1117/12.2306772
  • Schmelt AS, Fischer EC, Wurz MC, Twiefel J (2018): Solid State Joint Actuator for a Vibro Tactile Line DisplayACTUATOR 2018, 16th International Conference on New Actuators, Bremen Weitere Informationen
    ISBN: 978-3-8007-4675-0
  • B. Denkena, M. C. Wurz, T. Grove, A. Bouabid, E. Asadi (2017): Mass production for micro end mills17th Euspen Int. Conf., S. 245-246, Hannover, 2017
  • Dencker F, Kolodziejczyk F, Wurz MC (2017): Electrical feed through for tool integrated high temperature applicationsInternational Conference and Exhibition on Integration Issues of Miniaturized Systems 2017, SSI 2017
    ISBN: 978-395735057-2
  • Dencker F, Schlenkrich A, Wurz MC (2017): Press hardening tool integrated thin film temperature sensorProceedings of the 17th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2017
    ISBN: 978-099577510-7
  • Long Y, Dencker F, Isaak A, Li C, Schneider F, Hermsdor J, Wurz MC, Twiefel J, Wallaschek J (2017): Analysis of the Wire/Substrate Interface during Ultrasonic Bonding ProcessIEEE CPMT Symposium Japan (ICSJ), Kyoto, Japan, p. 203-206
  • Long Y, Dencker F, Schneider F, Emde B, Li C, Hermsdorf J, Wurz MC, Twiefel J (2017): Investigations on the oxide removal mechanism during ultrasonic wedge-wedge bonding processProceedings of the 2016 IEEE 18th Electronics Packaging Technology Conference, EPTC 2016
    DOI: 10.1109/EPTC.2016.7861512
    ISBN: 978-150904368-2
  • Pyatishev E, Enns Y, Komarevtsev I, Glukhovskoy A, Wurz MC (2017): A micromechanical gyroscope with bistable suspension of microdriveProceedings of 24th Saint Petersburg International Conference on Integrated Navigation Systems (ICINS)
    DOI: 10.23919/ICINS.2017.7995646
  • Schmelt AS, Hofmann V, Twiefel J, Fischer EC, Wurz MC (2017): Modeling and Characterization of a Bimodal Tactile DisplayInternational Workshop on Piezoelectric Materials and Applications in Actuators (IWPMA)
  • Bengsch S, Rechel M, Asadi E, Wurz MC (2016): Structuring Methods of Plastic Substrates for Electroplating Applications229th ECS Meeting, San Diego, 2016
  • Beringer S, Dinulovic D, Haug M, Rissing L, Wurz MC (2016): Development and Optimization of Thin-Film Technology Based Micro Inductors and TransformersECS Trans. 2016 volume 75,issue 2, 51-58 Weitere Informationen
    DOI: 10.1149/07502.0051ecst
  • Dencker F, Wurz MC, Dubrovskiy S, Koroleva E (2016): An application report: Protective thin film layers for high temperature sensor technologyProceedings of the 2016 IEEE North West Russia Section Young Researchers in Electrical and Electronic Engineering Conference, EIConRusNW 2016
    DOI: 10.1109/EIConRusNW.2016.7448110
    ISBN: 978-150900445-4
  • Jogschies L, Rittinger J,Klaas D, Wurz MC (2016): Stress Reduction in sputtered thin NiFe 81/19 layers for Magnetic Field Sensor3rd International Conference on System-integrated Intelligence: New Challenges for Product and Production Engineering, SysInt 2016, Procedia Technology 26, pp. 162-168 Weitere Informationen
    DOI: 10.1016/j.protcy.2016.08.022
  • Klaas D, Rein M, Wurz MC, Rissing L (2016): Development of a Humidity Sensor Element based on sputter-deposited Thin ZnO-Layers3rd International Conference on System-integrated Intelligence: New Challenges for Product and Production Engineering, SysInt 2016, Procedia Technology 26, pp. 27-34 Weitere Informationen
    DOI: 10.1016/j.protcy.2016.08.005
  • Kusch A, Rissing L, Wurz MC (2016): Concept Development and Evaluation of a hermetically sealed Ceramic PackageInternational Conference and Exhibition on Integration Issues of Miniaturized Systems (SSI2016), München, pp. 413-416
  • M. Stompe, E. Asadi, L. Rissing, M. C. Wurz (2016): Investigation for thinning-by-dicing of sintered and unsintered ceramics16th International Conference & Exhibition proceedings, pp. 325-326, Notthingham, June 2016
  • Taptimthong P, Düsing JF, Rissing L, Wurz MC (2016): Flexible Magnetic Reading/Writing System: Heat-Assisted Magnetic Recording3rd International Conference on System-integrated Intelligence: New Challenges for Product and Production Engineering, SysInt 2016, Procedia Technology 26, pp. 72-78 Weitere Informationen
    DOI: 10.1016/j.protcy.2016.08.011
  • Taptimthong P, Rissing L, Wurz MC (2016): Flexible Magnetic Reading/Writing System: Characterization of a Read/Write Head18. GMS/ITG-Fachtagung Sensoren und Messsysteme (SUM2016), Nürnberg, pp. 769-775 Weitere Informationen
    DOI: 10.5162/sensoren2016/P8.1
  • B. M. Mundotiya, M. C. Wurz, L. Rissing (2015): A Comparative Study of Saturation Induction with Current Density of Electrodeposited Fe-Ni-W AlloysECS Trans., Vol. 64, Issue No. 31, Magnetic Materials, Processes, and Devices 13, pp. 75-83
    DOI: 10.1149/06431.0075ecst
  • D. Dinulovic, A. Gerfer, M. Haug, M. Kaiser, M. C. Wurz, L. Rissing (2015): Improved Microtransformer Design Utilizing Fe-Co Magnetic Core20th Int. Conf. on Magnetism (ICM 2015), Elsevier, Physics Procedia, Vol. 75, pp. 1252-1258
  • D. Klaas, A. Wienecke, M.C. Wurz, L. Rissing, P. Freytag, H.J. Maier (2015): Smart System Integration: Moulding of Magnetic Field Sensors into AlSi9Cu3(Fe)-AlloysSMTA Pan Pacific Microelectronics Symposium, Kauai, HI, USA
  • D. Klaas, J. Rittinger, P. Taptimthong, J. F. Düsing, M. C. Wurz, L. Rissing (2015): Verwendung von Schattenmasken zur Direktstrukturierung individuell adaptierbarer Sensorik auf technischen OberflächenMST Kongress 2015, Karlsruhe, 26. - 28. Oktober 2015, pp. 338-341
    ISBN: 978-3-8007-4100-7
  • J. Rittinger, D. Klaas, M. C. Wurz, L. Rissing (2015): Hybrider Fertigungsprozess zur Integration von Drucksensoren auf die Oberfläche von TellerfedernMST Kongress 2015, Karlsruhe, 26. - 28. Oktober 2015, pp. 563-566
    ISBN: 978-3-8007-4100-7
  • J. Rittinger, P. Taptimthong, L. Jogschies, M. C. Wurz, L. Rissing (2015): Impact of different polyimide-based substrates on the soft magnetic properties of NiFe thin filmsSPIE Microtechnologies (pp. 95171R-95171R). International Society for Optics and Photonics
  • Meriem Akin, Joe Corea, Simon Scott, Ana Claudia Arias, Marc Wurz, Lutz Rissing (2015): Hybrid packaging of circuits and devices onto flexible screen printed electrical interconnectsSMTA Pan Pacific Microelectronics Symposium, Kauai, HI, USA
    DOI: 10.13140/RG.2.1.2064.9763/1
  • P. Taptimthong, J. Rittinger, M. C. Wurz, L. Rissing (2015): Flexibles magnetisches Lese-/Schreibsystem: Design eines SchreibkopfesMST Kongress 2015, Karlsruhe, 26. - 28. Oktober 2015, pp. 684-687
    ISBN: 978-3-8007-4100-7
  • A. Wienecke, M. C. Wurz, L. Rissing (2014): Integrierte Sensorik für HochtemperaturumgebungenGMM, VDI/VDE-IT (eds) Tagungsband: MikroSystemTechnikKongress 2013. Von Bauelementen zu Systemen, 14.-16. Oktober 2013 in Aachen, pp. 555–558
  • L. Rissing, A.Belski, T. Creutzburg, T. Griesbach, M. Kaiser, A. Wienecke, M. C. Wurz (2014): Magnetic MEMSSemicon Russia 2014, St. Petersburg, St. Petersburg State Polytechnical University Journal 5 (205), pp. 21-35
  • P. Taptimthong, J. Rittinger, M. C. Wurz, L. Rissing (2014): Flexible Magnetic Writing / Reading System: Polyimide Film as Flexible SubstrateProcedia Technology, Vol. 15, 2014, pp. 230–237
    DOI: 10.1016/j.protcy.2014.09.076
  • A. Belski, M. Wurz, J. Rittinger, L. Rissing (2013): Development, Micro Fabrication and Test of Flexible Magnetic Write Head for Gentelligent ApplicationsMicroelectronic Engineering Journal, (spec. issue), Proc. 38th Int. Conf. on Micro & Nanoengineering, Toulouse, France
  • A. Belski, P. Taptimthong, M. C. Wurz, L. Rissing (2013): High permeability flexible bulk material for magnetic micro head applicationsJEMS 2012, EPJ Web Conferences, Volume 40, Parma, Italy
    DOI: 10.1051/epjconf/20134016003
  • D. Dinulovic, M. Kaiser, A. Gerfer, O. Opitz, M.C. Wurz, L. Rissing (2013): Thin-film Microtransformer for High Frequency Power ApplicationsJoint European Magnetic Symposia 2013 (JEMS), Rhodos, Greece, p. 153
  • D. Dinulovic, M. Kaiser, A. Gerfer, O. Opitz, M.C. Wurz, L. Rissing (2013): MEMS Fabricated Microtransformer with Closed Fe-Co Magnetic Core for High Frequency Power Applications58th Magnetism & Magnetic Materials (MMM2013), Chicago, USA, p. 352
  • A. Belski, M.C. Wurz, S. Cvetkovic, L. Rissing (2012): Surface Preparation for Sensing the Kerr-effect on NiFe81/19 LayersProc. 12th euspen Int. Conf. 2012, Stockholm, Sweden, pp. 279-282
  • A. Belski, P. Taptimthong, M. Wurz, L. Rissing (2012): Integration of the Read-after-write Method for GentelligentTM Applications1st Joint International Symposium on System-Integrated Intelligence (Sysint 2012), Hanover, Germany, pp. 49-51
  • J. Chen, M. Wurz, L. Rissing (2012): Designs and Characterizations of Soft Magnetic Flux Guides in a 3D magnetic field sensorIEEE Transaction on Magnetics, Vol. 48, No. 4, pp. 1481-1484
  • L. Rissing, M. Wurz, S. Cvetkovic, F.-W. Bach (2012): Electroplating of Cu/Sn Layers for Hermetic Encapsulation for Vacuum ApplicationsTrans. 222nd ECS Meeting, Honolulu, Hawaii, Vol. 50, No. 10, pp. 207-216
  • M. Kaiser, M.C. Wurz, S. Cvetkovic, L. Rissing (2012): Embossing of Soft-magnetic Structures and Influence on Magnetic PropertiesTrans. 222nd ECS Meeting, Honolulu, Hawaii, Vol. 50, No. 10, pp. 189-197
  • M. Wurz, A. Shaganov, L. Rissing, A. Filimonov, S. Vakhrushev (2012): Investigation of the Crystallization of FiFe81/19 Depending on the Annealing TemperatureTrans. 222nd ECS Meeting, Honolulu, Hawaii, Vol. 50, No. 10, pp. 147-156
  • A. Belski, M. Wurz, L.Rissing (2011): Redesign and Fabrication of a Magnetic Head for GentelligentTM Products11th Euspen International Conf. 2011, Como, Italy, 2011
  • H.H. Gatzen, T. Griesbach, M. C. Wurz, L. Rissing (2011): Considerations on Ultra-thin Substrateless Micro and Nano SystemsProc. ASME2011 & Exp. IMECE2011, Denver, CO, USA, 2011
  • T. Griesbach, M. C. Wurz, L. Rissing (2011): Application of Sacrificial Layers fort he Modular Micro Sensor Fabrication on a Flexible Polymer SubstrateProc. CD, Sensor + Test Conf. 2011 – Sensor, Opto, IRS2, Nuremberg, Germany
    ISBN: 978-3-9810993-9-3
  • T. Griesbach, M. C. Wurz, L. Rissing (2011): Modular Eddy Current Micro SensorIEEE International Magnetics Conf. (Intermag 2011), Taipei, Taiwan, 2011
  • T. Griesbach, M. C. Wurz, L. Rissing (2011): Design and Fabrication of a Modular Eddy Current Micro SensorProc. 29th Progress In Electromagnetics Research Symposium (PIERS 2011), Marrakesh, Morocco, pp. 752-755, 2011
  • B. Spasova, M. C. Wurz, C. Ruffert, J. Norpoth, Ch. Jooss, H.H. Gatzen (2010): Using Magnetooptical Measurements for the Evaluation of a Hybrid Magnetic Shape Memory (MSM) Based MicroactuatorTransactions on Magnetics, Vol. 46, Issue 6, pp. 2256-2259, 2010
  • M. C. Wurz, C. Ruffert, H.H. Gatzen (2010): Methodology for Concurrent Nano-Engineering. Proc. CD, IAMOT 2010, Cairo, Egypt, 2010Proc. CD, IAMOT 2010, Cairo, Egypt, 2010
  • O. Traisigkhachol, H. Schmid, M. C. Wurz, H.H. Gatzen (2010): Applying SU-8TM to the Fabrication of Micro Electro Discharge Machining ElectrodesMicrosystem Technologies, Springer Verlag, Berlin, Heidelberg, New York, Vol. 16, No. 8-9, pp. 1445-1450, 2010
  • H.H. Gatzen, C. Ruffert, M.C. Wurz, E. Flick (2009): Magnetische Mikrosysteme für Wandleranwendungen. Magnetic Micro Electro-mechanical Systems (MEMS) for Transducer ApplicationsProc. MST-Kongress 2009, Berlin, Deutschland, S.425-428
  • M.C. Wurz, F. Pape, M. Wark, H.H. Gatzen (2009): Investigation of Fluidic Additives on the Nanohardness During PolishingProc. WTC 09, Kyoto, Japan, K-331, pp. 698
  • W.Z. Li, W.W. Wang, E. Delyagina, A. Kaminski, N. Ma, G. Steinhoff, E. Flick, M.C. Wurz, H.H. Gatzen, X.S. Gao, M. Alexe, D. Hesse (2009): Magnetic Polymer Nanoparticles in Gene Delivery ApplicationsBook of Abstracts, 1st Symposium of the SFB/TR 37, Aachen, Germany, pp. 3
  • B. Spasova, M.C. Wurz, H.H. Gatzen (2008): Fabrication and Characterization of Microactuators with Discrete MSM Bulk MaterialProc. 11th Int. Conf. on new Actuators 2008, Bremen, Germany, pp. 713-716
  • M. Wurz, D. Dinulovic, J. Chen, E. Flick, K. Bade, V. Saile, H.H. Gatzen (2008): Design of Experiment (DOE) for Optimizing a NiFe 45/55 Electroplating ProcessPRiME 2008 Meeting, Honolulu, HI, USA, The Electrochemical Society, MA 2008-2, Abs. 2583.pdf
  • M. Wurz, T. Oeckermann, P. Wagner, C. Ruffert, J. Caro, H.H. Gatzen (2008): Investigations on Embedding Nanoparticles by ElectroplatingPRiME 2008 Meeting, Honolulu, HI, USA, The Electrochemical Society, MA 2008-2, Abs. 2595.pdf
  • M.C. Wurz, D. Dinulovic, H.H. Gatzen (2004): Investigation of the permeability on electroplated and sputtered permalloyProc. 8th Int. Symposium on Magnetic Materials, Processes and Devices, 206th Meet. of The Electrochemical Society 2004, Honolulu, Hawaii, USA, pp. 526-536

Konferenz

  • Kassner A, Rechel M, Heine H, Herr W, Christ M, Krutzik M, Rasel EM, Wurz MC (2019): Atom Chip technology for use under UHV conditionsSmart Systems Integration; 13th International Conference and Exhibition on Integration Issues of Miniaturized Systems, Barcelona, Spain, 2019, pp. 1-7 Weitere Informationen
    ISBN: 978-3-8007-4919-5
  • Glukhovskoy A, Schnebeck T, Holz S, Fischer EC, Wurz MC (2018): A laser-based, in-line chlorine dioxide concentration sensorProceedings of Symposium on Automated Systems and Technologies, Hanover, Germany (TEWISS Verlag)
    ISBN: 978-3-95900-223-3
  • Papakonstantinou A, Heine H, Le Gonidec M, Kassner A, Rechel M, Herr W, Wurz MC, Ertmer W, Rasel EM (2018): Next Generation Atom Chip DevelopmentDPG Spring meeting 2018 Weitere Informationen
  • Behrens BA, Hübner S, Niemeyer H, Moritz J, Pfeffer C, Wölki K, Dencker F, Wurz MC, Wolter B, Müller T, Niese F (2017): Hot stamping process reliability – Innovative sensor technology for inline quality assuranceConference Strategies in Car Body Engineering, 22-23 March 2017, Bad Nauheim
  • Beringer S, Dinulovic D, Bengsch S, Haug M, Wurz MC (2017): Anodische Auflösung von Aluminium als Downsizing Technik für Mikro-InduktivitätenMikroSystemTechnik Kongress 2017 · 23. – 25. Oktober 2017 in München (Seite 624-627)
    ISBN: 978-3-8007-4491-6
  • Fischer EC, Glukhovskoy A, Schmelt AS, Twiefel J, Wurz MC (2017): Mikroaktorik für ein Taktiles DisplayProceedings of the MikroSystemTechnik Kongress 2017, München, pp. 515-518 Weitere Informationen
    ISBN: 978-3-8007-4491-6
  • Heine H, Matthias J, Grove N, Sahelgozin M, Kassner A, Rechel M, Abend S, Seidel ST, Herr W, Wurz MC, Müller J, Ertmer W, Rasel EM (2017): Atom-Chip based BEC sources for compact and transportable experiments Weitere Informationen
  • Klaas D, Pehrs F, Wurz MC (2017): Reaktives Ionentiefenätzen von Schattenmasken für die Sensordirektabscheidung mit einer neuartigen BeschichtungsanlageProceedings of the MikroSystemTechnik Kongress 2017, München, pp. 680-683 Weitere Informationen
    ISBN: 978-3-8007-4491-6
  • Pyatishev E, Wurz MC, Enns Y, Glukhovskoy A, Fischer EC, Odintsov A, Kleimanov R (2017): Elektromechanischer Mikro-Biegeaktor als optischer ShutterProceedings of the MikroSystemTechnik Kongress 2017, München Weitere Informationen
    ISBN: 978-3-8007-4491-6
  • Rechel M, Taptimthong P, Arndt M, Wurz MC (2017): Mikrofluidische Galvanik zur Herstellung magnetoresistiver SchichtenMikroSystemTechnik Kongress München
    ISBN: 978-3-8007-4491-6
  • B. Denkena, M. Wurz, T. Grove, A. Bouabid, E. Asadi (2016): Manufacturing of micro end mills by batch processing of silicon carbide16th International Conference & Exhibition proceedings, pp. 327-328, Notthingham, June 2016
  • C. Hoff, K. Cromwell, J. Hermsdorf, M. Akin, M. C. Wurz, S. Kaierle, H. J. Maier, L. Overmeyer (2016): Transmission laser bonding of low melting eutectic alloysSPIE High-Power Laser Materials Processing: Lasers, Beam Delivery, Diagnostics, and Applications
    DOI: 10.1117/12.2230399
  • Dinulovic D, Shousha M, Haug M, Beringer S, Wurz MC (2016): Thin-Film Based Microtransformer Suitable for High Switching Frequency Power ApplicationsPCIM Europe 2016; International Exhibition and Conference for Power Electronics, Intelligent Motion, Renewable Energy and Energy Management; Proceedings of Weitere Informationen
    ISBN: 978-3-8007-4186-1
  • Rechel M, Bengsch S, Wurz MC (2016): Electroplating through Fluidic Channels as Production Technology for 3D Interconnect Devices and Sensing StructuresECS Transactions. 2016 volume 75, issue 7, 25-32 Weitere Informationen
    DOI: 10.1149/07507.0025ecst
  • Rechel M, Hofmann V, Twiefel J, Wurz MC (2016): Normal force actuator for a tactile display using a micromechanically built spring element made of PolyimideACTUATOR 2016, 15th International Conference on New Actuators, Bremen Weitere Informationen
    ISBN: 978-3-933339-26-3
  • M. Kaiser, M. Rechel, J. Goldmann, L. Rissing, M. C. Wurz (2015): Design und Herstellung eines akustischen Wandlers mit einer PolymermembranMikrosystemtechnik-Kongress (MST2015), Karlsruhe, Deutschland, VDE Verlag GmbH – Berlin – Offenbach, S. 606-609
    ISBN: 978-3-8007-4100-7
  • M. Kaiser, M. Rechel, M. Stiesch-Scholz, L. Rissing, M. C. Wurz (2015): Fertigung eines Gitterelektroden-Arrays zur selektiven hyperthermischen Manipulation von BiofilmenMikrosystemtechnik-Kongress (MST2015), Karlsruhe, Deutschland, VDE Verlag GmbH – Berlin – Offenbach, S.824-827
    ISBN: 978-3-8007-4100-7
  • M. Rechel, L. Rissing, V. Hofmann, A. Tarnowsky, F.-E. Wolter, J. Wallaschek, M. C. Wurz (2015): Entwurf und Fertigung eines elektromagnetischen Normalkraftaktors in hybrider Bauform für tactile Displays.Mikrosystemtechnik-Kongress (MST2015), Karlsruhe, Deutschland, VDE Verlag GmbH – Berlin – Offenbach, S. 761-764

Berichte

  • S. Hansen, M.C. Wurz, H.H. Gatzen (2006): Baukasten multifunktionaler Mikrosensoren für Messaufgaben in der Fertigungstechnikwt Werkzeugtechnik online, Jahrgang 96, H. 11/12, S. 866-870

Zeitschriften/Aufsätze

  • Christ M, Kassner A, Smol R, Bawamia A, Heine H, Herr W, Peters A, Wurz MC, Rasel EM, Wicht A und Krutzik M (2019): Integrated atomic quantum technologies in demanding environments: development and qualification of miniaturized optical setups and integration technologies for UHV and spaceCEAS Space Journal, pp. 1-6
    DOI: 10.1007/s12567-019-00252-0
  • Mundotiya BM, Rissing L, Wurz MC (2016): Effect of Substrate Temperature on Magnetic Properties of Electroplated 82Ni-15Fe-3W Alloy FilmsIEEE Trans. on Magnetics, Vol. 52, Issue 8 Weitere Informationen
    DOI: 10.1109/TMAG.2016.2549987
  • Mundotiya BM, Rissing L, Wurz MC (2016): Effect of Annealing Temperature on the Coercivity and the Electrical resistivity of the Electroplated Ni-Fe-W alloy filmECS Trans., Vol. 75, Issue No. 2, Magnetic Materials, Processes, and Devices, pp. 59-65 Weitere Informationen
    DOI: 10.1149/07502.0059ecst
  • A. Belski, M.C. Wurz, L. Rissing (2011): Process Development of an Electoplated Permalloy Layer on Magnetic Magnesium for Gentelligent ProductsECS Transactions, Vol. 33, Issue 34, Magnetic MEMS and Devices, 2011, pp. 93-104
  • M. C. Wurz, P. Wagner, L. Rissing, J. Caro (2011): Assembly and Embedding of Nanoparticles in a Ni-matrix.ECS Transactions, Vol. 33, Issue 34, Magnetic MEMS and Devices, 2011, pp. 33-42
    DOI: 10.1149/1.3573586
  • M. Wurz, L. Rissing (2011): Einsatz von Kupfer und Kupferlegierungen in der MikrosystemtechnikHochschulKupferSymposium, Hannover, Deutschland, Fachzeitschrift Metall, 65. Jg., Nov. 2011, S. 504-506
  • B. Spasova, M. Wurz, H.H. Gatzen (2008): Manufacturing Technology for the Fabrication a Discrete Actuator Using a Magnetic Shape Memory AlloyE-MRS-Symposium 2007, Warsaw, Poland, European Physics Journal, Springer Verlag Berlin Heidelberg New York, Special Topics 158, pp. 243-247
  • B. Spasova, M. Wurz. H.H. Gatzen (2008): Application of MSM Bulk Material in a Hybrid MicroactuatorEUROMAT 2007, Nürnberg, Germany, Physica Status Solidi (a) 205, No. 10, pp. 2307-2312 Wiley-VCH Verlag
  • M. Wurz, C. Ruffert, Z. Mrowka, S. Knappmann, H.H. Gatzen (2006): Fabrication of a Micro Coil for Magneto-Optical Data StorageIEEE Trans. on Magn., Vol. 42, No. 10, pp. 2468-2470

Doktorarbeiten

  • Wurz, Marc C. (2009): Fertigung eines magneto-optischen Schreib-/Lesekopfes

Verschiedenes

  • K. A. Saalbach, M. C. Wurz, J. Twiefel, L. Rissing, J. Wallaschek (2015): Custom Lithium Niobate Transducer Arrays for Detecting Material Distribution of Hybrid WorkpiecesEnergy Harvesting and Systems, Vol. 1
    DOI: 10.1515/ehs-2014-0045