Publikationen

Beiträge in Büchern (reviewed)

  • Hans H. Gatzen (2013): (Invited) Magnetic Micro and Nano Actuator SystemsMagnetic Materials, Processes, and Devices 12, ECS Transactions Volume 50, Issue 10, The Electrochemical Society, Pennington, NJ, USA
    DOI: 10.1149/05010.0119ecst
  • H. H. Gatzen (2011): (Invited) Active Magnetic Micro and Nano Electro-Mechnical Systems (MNEMS)Magnetic Materials Processes and Devices 11. ECS Transactions, Volume 33, Issue 34, The Electrochemical Society, Pennington, NJ, USA
    DOI: 10.1149/1.3573588

Bücher

  • Hans H. Gatzen, Volker Saile, Jürg Leuthold (2015): Micro and Nano Fabrication - Tools and ProcessesSpringer Berlin Heidelberg
  • S. Krongelb, C. Bonhôte, S. R. Brankovic, H. H. Gatzen, P. J. Hesketh, Y. Kitamoto, T. Osaka, W. Schwarzacher, G. Zangari (Editors) (2013): Magnetic Materials Processes and Devices 12. ECS Transactions, Volume 50, Issue 10The Electrochemical Society, Pennington, NJ, USA
  • S. Krongelb, S. R. Brankovic, Y. Kitamoto, W. Schwarzacher, C. Bonhôte, H. H. Gatzen, T. Osaka, G. Zangar (Editors) (2011): Magnetic Materials Processes and Devices 11. ECS Transactions, Volume 33, Issue 34The Electrochemical Society, Pennington, NJ, USA
  • H.H. Gatzen (1999): Mikrobearbeitung sprödharter Keramikwerkstoffe mittels Trenn- und Profilschleifen59. Jahrbuch Schleifen, Honen, Läppen und Polieren, Vulkan Verlag, Essen, Germany, pp. 190-204
  • H.H. Gatzen (1999): Thin Film Head Technologies in MEMS Applications Fabrication of a Dual Stripe MR-SensorProximity, Magnetic Storage Industry Source Book, Balzers Publication, pp. 34-35
  • H.H. Gatzen, J.C. Mätzig (1995): Ultrapräzisionsbearbeitung von technischen Keramiken mittels Nanoschleifen58. Jahrbuch, Schleifen, Honen, Läppen und Polieren, Vulkan-Verlag, Essen, Deutschland, pp. 227-241
  • H.H. Gatzen, M. Smallen, P.T. Tedrow (1987): Head-Media Wear in Rigid Disc DrivesSociety of Tribologists and Lubrication Engineers, Tribology and Mechanics of Magnetic Storage Systems, Park Ridge, Illinois, USA, Vol. 4, pp. 116-122

Beiträge in Büchern

  • C. Ruffert, H. Saalfeld, H.H. Gatzen (2010):Buchbeitrag PARMA – Slider with Integrated Microactuator (SLIM) for Second Stage Actuation in Hard Disk Drives. pp. 423-440
  • F. Pape, C. Ruffert, O. Traisigkhachol. A. Waldschick, M. Feldmann, T. Kohlmeier, V. Seidemann, S. Büttgenbach, H.H. Gatzen (2010):SFB 516 Buchbeitrag B7 - Fabrication of Excitation Coils for Electromagnetic Micro Actuators. pp.189-206
  • J. Chen, M. Bedenbecker, T. Budde, M. Föhse, C. Ruffert, R. Bandorf, M. Balke, H. Lüthje, B. Majjer, G. Bräuer, H.H. Gatzen (2010):SFB 516 Buchbeitrag B1 – Fabrication of Magnetic Layers for Electromagnetic Microactuators. pp. 167-188
  • R. Bandorf, D. Paulkowski, F. Pape, H.H. Gatzen, G. Bräuer (2010):SFB 516 Buchbeitrag C1 R – Wear Behaiour in Microactuator Interfaces. pp. 69-88
  • S. Hansen, M. Hahn, M. Föhse, H.H. Gatzen (2010):SFB 516 Buchbeitrag A1 – Development and Fabrication of Linear and Multi-Axis Microactuators. pp. 225-244
  • A. Waldschik, M. Feldmann, F. Pape, C. Ruffert, H.H. Gatzen, S. Büttgenbach (2009): Herstellung von Funktionskomponenten für den Einsatz in elektromagnetische MikroaktorenTagungsband 4. Kolloquium Mikroproduktion, BIAS Verlag, Bremen, Deutschland, ISBN:978-3-933762-32-0, S. 205-210
  • H. Gerdes, H.H. Gatzen (2009): Focused Ion Beam Core Hole Drilling for Stress Detection in Thin-filmsMicrosystem Technologies, Springer Verlag Berlin, Heidelberg, New York, Vol. 15, No. 1, pp. 151-153
  • O. Traisigkhachol, H. Schmid, M.C. Wurz, H.H. Gatzen (2009): Applying SU-8TM to the Fabrication of Micro Electro Discharge Machining ElectrodesMicrosystem Technologies, Springer Verlag Berlin, Heidelberg, New York
  • O. Traisigkhachol, H.H. Gatzen (2009): High Aspect Ratio Micromolds for the Electroplating of Micro Electro Discharge Machining ToolsMicrosystem Technologies, Springer Verlag Berlin, Heidelberg, New York
  • R. Bandorf, D. Paulkowski, F. Pape, A. Phataralaoha, S. Büttgenbach, H.H. Gatzen, G. Bräuer (2009): MikrotribologieTagungsband 4. Kolloquium Mikroproduktion, BIAS Verlag, Bremen, Deutschland, ISBN:978-3-933762-32-0, S. 197-203
  • S. Hansen, G. Janssen, C. Wiedemann, B. Ponick, A. Mertens, H.H. Gatzen (2009): Simulation, Herstellung und Ansteuerung von skalierbaren MikroreluktanzmotorenTagungsband 4. Kolloquium Mikroproduktion, BIAS Verlag, Bremen, Deutschland, ISBN:978-3-933762-32-0, S. 191-196
  • F. Pape, H.H. Gatzen (2008): Tribological Behavior of Multilayer Diamond-like Carbon (DLC) CoatingsGöttinger Fachtagung Tribologie, Göttingen, Germany, Band I, Reibung, Schmierung und Verschleiß, ISBN 978-3-00-025676-9, 9/1-9/10
  • H.H. Gatzen, E. Flick (2008): Energieautarke Mikrosysteme in der BiomedizintechnikEnergy Harvesting, Essen, Deutschland, 2007, Expert Verlag, S. 78-87, ISBN 978-3-8169-2789-1
  • F. Pape, H.H. Yildiz-Ünveren, R. Küster, R. Bandorf, G. Bräuer, H.H. Gatzen (2007): Nano-Scratch Studies on Diamond-like Carbon Coatings on Various Materials Applied in Micro ActuatorsGFT Tribologie-Fachtagung 2007, Göttingen, Germany, Band l, S. 28/1 - 28/10
  • H.H. Gatzen, S. Cvetkovic (2007): Modellierung des CMP-Prozesses zum Planarisieren von MikrosystemenSHLP 2007, Braunschweig, Deutschland, 63. Jahrbuch Schleifen, Honen, Läppen und Polieren, Vulkan Verlag, Essen, Deutschland, S. 342-361
  • K.-H. Wu, O. Traisigkhachol, M. C. Wurz, H. H. Gatzen (2007): Lesen und Schreiben magnetischer DatenSFB653 Kolloquium, Hannovermesse 2007, Hannover, Deutschland, S. 63-68
  • S. Hansen, H. Gerdes, H.-H. Gatzen (2007): Modulare, mehrfunktionale Mikrosensorik- Mikrosensoren für Kraft- und DehnungsmessungSFB653 Kolloquium, Hannovermesse 2007, Hannover, Deutschland, S. 19-24
  • J. Koch, E. Fadeeva, M. Engelbrecht, C. Ruffert, H.H. Gatzen, A. Ostendorf, B.N. Chichkov (2006): Maskless Nonlinear Lithography with Femtosecond Laser PulsesApplied Physics A: Materials Science & Processing, Springer-Verlag GmbH, A 82, pp. 23-26, ISSN: 0947-8396
  • C. Ruffert, H.H. Gatzen (2005): Ausbildung von Fachkräften für die MikrosystemtechnikMikrosystemtechnik, Begleitband zum Kongress 2005, Freiburg, VDE Verlag, Berlin, S. 877-880
  • H.H. Gatzen (2005): Magnetische Mikrosystemtechnik – klein, robust, vielseitigBegleitband zum Hannover Kolloquium 2004, Hannover, Deutschland, S. 127-138, ISBN 3-936888-51-5
  • H.H. Gatzen, C. Morsbach (2005): Trenn- und Profilschleifen keramischer Mikrostrukturen62. Jahrbuch Schleifen, Honen, Läppen und Polieren, S. 332-341
  • H.H. Gatzen, M. Bedenbecker (2005): Herstellung polymergebundener Hartmagnete durch in SU 8 eingebrachte MagnetpulverMikrosystemtechnik, Begleitband zum Kongress 2005, Freiburg, VDE Verlag, Berlin, S. 581-584
  • M. Bedenbecker, R. Bandorf, H. Lüthje, G. Bräuer, H.H. Gatzen (2005): Entwicklung und Fertigung magnetischer SchichtenSFB-Kolloquium, Mainz Verlag Aachen, Germany, S. 285-293, ISBN3-86130-999-8
  • M. Feldmann, C. Ruffert, H.H. Gatzen, S. Büttgenbach (2005): Fertigung von Funktionskomponenten für elektromagnetische MikroaktorenSFB-Kolloquium, Mainz Verlag Aachen, Germany, S. 295-304, ISBN3-86130-999-8
  • M. Hahn, R. Gehrking, B. Ponick, H.H. Gatzen (2005): Auslegung aktiver MikrosystemeSFB-Kolloquium Mikroproduktion, Mainz Verlag Aachen, Germany, S. 253-262, ISBN3-86130-999-8
  • R. Bandorf, R. Küster, C. Henke, H. Lüthje, J.-H. Sick, C. Neumeister, A. Phataralaoha, S. Büttgenbach, H.H. Gatzen, G. Bräuer (2005): Tribologie von MEMS-KomponentenSFB-Kolloquium, Mainz Verlag Aachen, Deutschland, S. 225-232, ISBN3-86130-999-8
  • R. Gehrking, C. Ruffert, S. Demmig, H.H. Gatzen, B. Ponick (2005): Entwicklung einer magnetischen Führung für MikroaktorenMikrosystemtechnik, Begleitband zum Kongress 2005, Freiburg, VDE Verlag, Berlin, S. 383-386
  • R. Küster, R. Bandorf, H. Lüthje, G. Bräuer, H.H. Gatzen, C. Neumeister (2005): Verschleißarme Beschichtungen für MikroaktorenMikrosystemtechnik, Begleitband zum Kongress 2005, Freiburg, VDE Verlag, Berlin, S. 119-121
  • H.H. Gatzen (2004): Magnetische Mikrosystemtechnik – klein, robust, vielseitigBegleitband zum Hannover Kolloquium 2004, Hannover, Deutschland, S. 127-138
    ISBN: 3-936888-51-5
  • H.H. Gatzen, C. Morsbach, C. Kourouklis (2004): Chemisch-Mechanisches Polieren von Wafern für Mikrosysteme61. Jahrbuch Schleifen, Honen, Läppen und Polieren, Vulkan Verlag, Essen, pp. 317-329
  • T. Kohlmeier, V. Seidemann, S. Büttgenbach, H.H. Gatzen (2004): An Investigation on Technologies to Fabricate Microcoils for Miniaturized Actuator SystemsMicrosystem Technologies, Springer Verlag Berlin Heidelberg New York, Vol.10, No. 3, pp.175-185
  • R. Bandorf, H. Lüthje, K. Schiffmann, M. Beck, H.H. Gatzen, M. Schmidt, S. Büttgenbach, G. Bräuer (2003): Submikrometerschichten für mikrotribologische AnwendungenSFB-Kolloquium, Vulkan Verlag Braunschweig, S. 75-83
  • S.B. Wiendl, W.-R. Zabel, H.H. Gatzen, G. Poll: (2003): Grenzschichtuntersuchungen an schnelllaufenden fettgeschmierten SchrägkugellagernGFT Tribologie Fachtagung 2003, Band 2, Göttingen
  • T. Budde, M. Föhse, B. Majjer, H. Lüthje, G. Bräuer, H.H. Gatzen (2003): Fertigung magnetischer SchichtenSFB-Kolloquium, Vulkan Verlag Braunschweig, S. 85-94
  • V. Seidemann, T. Kohlmeier, S. Büttgenbach, H.H. Gatzen (2003): Fertigung von ErregerspulenSFB-Kolloquium Mikroproduktion, Vulkan Verlag Braunschweig
  • H.H. Gatzen, C. Morsbach (2002): Minimierung der Schnittbreite beim Trennschleifen von Wafern60. Jahrbuch Schleifen, Honen, Läppen und Polieren, Vulkan-Verlag, Essen, pp. 301-309
  • G. Poll, H.H. Gatzen, S. Wiendl, M. Gronitzki, M. Spreckels (2000): Korrelation mikrotribologischer Eigenschaften mit dem makroskopischen Reibungsverhalten am Beispiel von SynchronisierungenProc. 12th Int. Colloquium Tribology 2000-Plus, Stuttgart, Tribologie und Schmierungstechnik, S. 13-17

Vortrag

  • C. Ruffert, H.H. Gatzen (2009): Concepts for the Apprenticeship and Advanced Training in MicrotechnologySensor und Test 2009, Nuremberg, Germany

Konferenz (reviewed)

  • N. Bader, F. Pape, H. H. Gatzen, G. Poll (2015): Examination of friction and wear of a 100Cr6 ball against a bearing ring in a micro-pin-on-disk testerWIT Transactions on Engineering Sciences, Vol 91: 57 - 68
    DOI: 10.2495/SECM150051
  • H.H. Gatzen, T. Griesbach, M. C. Wurz, L. Rissing (2011): Considerations on Ultra-thin Substrateless Micro and Nano SystemsProc. ASME2011 & Exp. IMECE2011, Denver, CO, USA, 2011
  • A. Wienecke, C. Ruffert, H.H. Gatzen (2010): A Programm to Attract Females to Hightech Fields like Nanotechnology and OpticsProc. CD, IAMOT 2010, Cairo, Egypt, 2010
  • B. Spasova, H.H. Gatzen (2010): Simulation of an Improved Microactuator with Discrete MSM ElementsMaterials Science Forum Vol. 635, pp. 181-186, Trans Tech Publications, Switzerland, 2010
  • B. Spasova, M. C. Wurz, C. Ruffert, J. Norpoth, Ch. Jooss, H.H. Gatzen (2010): Using Magnetooptical Measurements for the Evaluation of a Hybrid Magnetic Shape Memory (MSM) Based MicroactuatorTransactions on Magnetics, Vol. 46, Issue 6, pp. 2256-2259, 2010
  • D. Dinulovic, C. Ruffert, H. Saalfeld, H.H. Gatzen (2010): Evaluation of a Slider with an Integrated Magnetic Mircroactuator Using Laser Doppler VibrometryProc. 12th Int. Conf. on New Actuators 2010, Bremen, Germany, pp. 774-777, 2010
  • D. Hoheisel, C. Leng, H.H. Gatzen (2010): Design, Modeling and Fabrication Sequence of a Ferrofluidic MicroactuatorProc. 12th Int. Conf. on New Actuators 2010, Bremen, Germany, pp. 361-364, 2010
  • D. Hoheisel, S. Cvetkovic, W. Kurniawan, E. Obermeier, H.H. Gatzen (2010): System Integration Challenges for a Slider with an Integrated MicroactuatorTransactions on Magnetics, Vol. 46, Issue 6, pp. 2163-2166, 2010
  • F. Klocke, H.H. Gatzen, S. Kamenzky, O. Traisigkhachol, J. Dieckmann, M. Garzon (2010): Micro Electro Discharge Machining (μEDM) with Novel Tool ElectrodesProc. 16th ISEM 2010, Press Shanghai Jiaotong University Press, ISBN 9787313056306, pp.577-582, Shanghai, China, 2010
  • F. Pape, L. Rissing, H.H. Gatzen (2010): Fabrication and Tribological Investigation of Fullerene C60/C70 Reinforced Epoxy Resin SU-8TMTagungsband, Tribologie-Fachtagung, Göttingen, Germany, 2010
  • H.H. Gatzen (2010): Electromagnetic Micro and Nano ActuatorsProc. 12th Int. Conf. on New Actuators 2010, Bremen, Germany, pp.346-351, 2010
  • H.H. Gatzen, P. Freitas, E. Obermeier, J. Robertson (2010): Second Stage Actuation for Hard Disc Drives through MEMS TechnologyIEEE Transactions on Magnetics, Vol. 46, No. 3, pp. 782- 789, 2010
  • M. C. Wurz, C. Ruffert, H.H. Gatzen (2010): Methodology for Concurrent Nano-Engineering. Proc. CD, IAMOT 2010, Cairo, Egypt, 2010Proc. CD, IAMOT 2010, Cairo, Egypt, 2010
  • O. Traisigkhachol, H. Schmid, M. C. Wurz, H.H. Gatzen (2010): Applying SU-8TM to the Fabrication of Micro Electro Discharge Machining ElectrodesMicrosystem Technologies, Springer Verlag, Berlin, Heidelberg, New York, Vol. 16, No. 8-9, pp. 1445-1450, 2010
  • O. Traisigkhachol, H.H. Gatzen (2010): Fabrication of Electroplated Cu Tool Electrodes for μ-EDM using a Si MicromoldProc. EUSPEN 2010, Delft, The Netherlands, pp. 355-358, 2010
  • O. Traisigkhachol, H.H. Gatzen (2010): High Aspect Ratio Micromolds for the Electroplating of Micro Electro Discharge Machining ToolsMicrosystem Technologies, Springer Verlag, Berlin, Heidelberg, New York, Vol. 16, No. 8-9, pp. 1377-1383, 2010
  • S. Cvetkovic, F. Pape, H.H. Gatzen (2010): Creating Solid State Micro Joints through Micro MachiningProc. EUSPEN 2010, Delft, The Netherlands, pp. 189-192, 2010
  • S. Hansen, J. Norpoth, Ch. Jooss, L. Rissing, H.H. Gatzen (2010): Magneto-optical Characterization of the Stator of a Variable Reluctance (VR) Micro Step MotorProc. 12th Int. Conf. on New Actuators 2010, Bremen, Germany, pp. 706-709, 2010
  • S. Hansen, Z. Celinski, H.H. Gatzen (2010): Optimization of the Magnetic Performance of a Linear Variable Reluctance (VR) Micro Step MotorDigests, 11th Joint MMM-Intermag Conf. 2010, Washington, DC, USA, 2010
  • T. Creutzburg, H.H. Gatzen (2010): Mechanical and Thermal Simulations of a Microactuator for the Simulation of the PerilymphProc. CD, EuroSimE 2010, Bordeaux, France, 2010
  • T. Creutzburg, H.H. Gatzen (2010): Simulations of an Electromagnetic Microsystem used in Biomedical ApplicationsProc. CD, Piers 2010, Xi’an, China, 2010
  • E. Flick, K. Feindt, H.H. Gatzen (2009): Mikro-Hysteresemesssensor zur Vermessung anisotroper Dünnfilme. Micro Hysteresis Sensor for Measuring Anisotropic Thin-FilmsProc. MST-Kongress 2009, Berlin, Deutschland, S. 389-392
  • E. Flick, V. Saile, H.H. Gatzen (2009): A Pladoyer for a Concurrent Nano EngineeringProc. COMS 2009, 14th Ann. Meet., Conf. CD, Copenhagen, Denmark
  • E. Flick, W.Z. Li, G. Steinhoff, H.H. Gatzen (2009): Controlling Nanoparticle Complexes in Gene Delivery ApplicationsBook of Abstracts, 1st Symposium of the SFB/TR 37, Aachen, Germany, pp.30
  • F. Klocke, H.H. Gatzen, S. Kamenzky, M. Garzon, O. Traisigkhachol (2009): Application of Electroplated Electrodes in Micro Electro Discharge Machining (EDM)Proc. euspen 9th Int. Conf. 2009, San Sebastian, Spain, Vol. 2, pp. 471-474
  • F. Pape, H.H. Gatzen (2009): Evaluation of a Concept for Professional Improvement by Study in Engineering SciencesProc. IAMOT, 18th Int. Assoc. for Manag. of Tech., Orlando, Fl., USA, Conf. CD, ISBN 0-9815817-2-2
  • F. Pape, H.H. Gatzen (2009): Resistance of Multilayer Diamond-like Carbon (DLC) Coatings for MEMS Applications against Oscillating WearProc. WTC 09, Kyoto, Japan, G-114, pp.112
  • F. Pape, T. Creutzburg, O. Traisigkhachol, H.H. Gatzen (2009): Dünnfilmtechnische Herstellung eines rotierenden Synchronmotors. Thin-film Fabrication of a Rotating Synchronous MotorProc. MST-Kongress 2009, Berlin, Deutschland, S. 828-831
  • H. Saalfeld, D. Dinulovic, H.H. Gatzen (2009): Aktivteil eines Schreib-/Lesekopfes mit integriertem Mikroaktor (SLIM) für Festplattenspeicher. Active Part of a Read/Write Head with an Integrated Microactuator for Hard Disc Drives (HDD)Proc. MST-Kongress 2009, Berlin, Deutschland, S. 262-265
  • H.H. Gatzen, C. Ruffert (2009): Magnetic Micro Sensor Activities at the Leibniz University HanoverSensor und Test 14th Int. Conf. 2009, Nuremberg, Germany, Vol. 2, A6.4, pp. 35-40, ISBN 978-3-9810993-5-5
  • H.H. Gatzen, C. Ruffert, M.C. Wurz, E. Flick (2009): Magnetische Mikrosysteme für Wandleranwendungen. Magnetic Micro Electro-mechanical Systems (MEMS) for Transducer ApplicationsProc. MST-Kongress 2009, Berlin, Deutschland, S.425-428
  • H.H. Gatzen, S. Cvetkovic (2009): Cross Crown Nanogrinding of a Chiplet for a Slider with an integrated Microactuator (SLIM)Proc. ASPE, 24th Ann. Meet. 2009, Monterey, CA, USA, pp. 95
  • I. Peshekhodov, F. Pape, S. Cvetkovic, H.H. Gatzen, B.-A. Behrens (2009): Investigation of the Mechanical Response of a Polyurethane-based Coil Coatings System with the Help of Instrumented Indentation and FE AnalysisProc. Int. Symposium on Plasticity and its Current Applications, St. Thomas, Virgin Islands, USA, pp. 55-57, ISBN 0-9659463-9-8
  • M. Bedenbecker, H.H. Gatzen (2009): Investigations on the Permeability of soft magnetic Micro StructuresBook of Abstracts, SMM 19, Torino, Italy, G3-01
  • M. Gatzen, F. Pape, H.H. Gatzen, G. Poll (2009): Frictional Investigations on Ball Bearings Lubricated Using Greases with Polymer AdditivesProc. WTC 09, Kyoto, Japan, B2-414, pp. 812
  • M.C. Wurz, F. Pape, M. Wark, H.H. Gatzen (2009): Investigation of Fluidic Additives on the Nanohardness During PolishingProc. WTC 09, Kyoto, Japan, K-331, pp. 698
  • S. Cvetkovic, B. Spasova, H.H. Gatzen (2009): Challenges in Assembling a Magnetic Shape Memory (MSM) MicroactuatorProc. ASPE 24th Ann. Meet. 2009, Monterey, CA, USA, pp. 431-434
  • S. Cvetkovic, D. Miletic, H.H. Gatzen (2009): Relationship between Removal Rate and Friction Force of a CMP Process for MEMSProc. euspen 9th Int. Conf. 2009, San Sebastian, Spain, Vol. 2, pp. 499-502
  • S. Cvetkovic, H.H. Gatzen (2009): Evaluation of a Prototype CMP Machine for Improving the Global Planarization by MEMSProc. ASPE, 24th Ann. Meet. 2009, Monterey, CA, USA, pp. 315-318
  • S. Cvetkovic, H.H. Gatzen (2009): Technology Development for the Thinning of a Slider with an Integrated MicroactuatorProc. euspen 9th Int. Conf. 2009, San Sebastian, Spain, Vol. 2, pp. 455-458
  • S. Hansen, S. Bütefisch, H.H. Gatzen (2009): Design, Fertigung und messtechnische Untersuchungen eines Mikroreluktanzaktors. Design, Fabrication and Characterization of a Variable Reluctance Micro ActuatorProc. MST-Kongress 2009, Berlin, Deutschland, S. 840-843
  • S. Hansen, Z. Celinski, H.H. Gatzen (2009): Influence of Vertical Magnetized MnBi Layers on the Permeability of Permalloy StructuresBook of Abstracts, SMM 19, Torino, Italy, F1-11
  • T. Mäder, D. Weber, A. Belski, H.H. Gatzen, B. Wielage (2009): Analyses of Sensor Films on a Carbon FibreProc. (CD), B8.13, 17th Int. Conf. on Composite Materials (ICCM), Edinburgh, United Kingdom
  • W.Z. Li, W.W. Wang, E. Delyagina, A. Kaminski, N. Ma, G. Steinhoff, E. Flick, M.C. Wurz, H.H. Gatzen, X.S. Gao, M. Alexe, D. Hesse (2009): Magnetic Polymer Nanoparticles in Gene Delivery ApplicationsBook of Abstracts, 1st Symposium of the SFB/TR 37, Aachen, Germany, pp. 3
  • A. Belski, W. Kammrath, H.H. Gatzen (2008): Focused Ion Beam Fiber Turning Lathe for Fabricating a Strain Gauge for Carbon FibersProc. euspen 8th Int. Conf. 2008, Zurich, Switzerland, Vol. 2, pp. 129-133
  • B. Spasova, D. Dinulovic, H.H. Gatzen (2008): An Iterative Approach to Simulate Magnetic Micro Systems by Changing Magnetic PropertiesProc. Int. Conf. on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2008, Freiburg, Germany, pp.213-216
  • B. Spasova, M.C. Wurz, H.H. Gatzen (2008): Fabrication and Characterization of Microactuators with Discrete MSM Bulk MaterialProc. 11th Int. Conf. on new Actuators 2008, Bremen, Germany, pp. 713-716
  • D. Dinulovic, H. Saalfeld, Z. Celinski, S. Field, H.H. Gatzen (2008): Evaluation of an Electro-magnetic Micro Actuator Using Scanning Hall Probe Microscopy Measurements53rd Conf. on Magnetics and Magn. Materials, Austin, TX, USA, Abstracts, FE-10
  • D. Dinulovic, H.H. Gatzen (2008): An Approach for Simulating Magnetic MicroactuatorsProc. of International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2008, Freiburg, Germany, pp.217-220
  • D. Miletic, S. Cvetkovic, C.-T. Weber, H.H. Gatzen (2008): Tribological Investigation of CMP for Electroplated NiFe MicrostructuresProc. euspen 8th, Int. Conf. 2008, Zurich, Switzerland, Vol. 1, pp. 138-142
  • E. Flick, H.H. Gatzen (2008): Total Quality Management (TQM) Challenges for Incoming and Outgoing Goods in a University Micro Technilogy Fabrication LineProc. IAMOT 2008, 17th Int. Assoc. for Manag. of Tech., Conf. CD, Dubai, UAE
  • E. Flick, K. Feindt, H.H. Gatzen (2008): Micro Hysteresis Sensor for Wafer Level Testing of Magnetic FilmsIntermag, Conf. 2008, Madrid, Spain, BC-04
  • F. Pape, C. Ruffert, H.H. Gatzen (2008): Professional Improvement by Study in Engineering SciencesProc. IAMOT 2008, 17th Int. Assoc. for Manag. of Tech., Conf. CD, Dubai, UAE
  • F. Pape, H.H. Gatzen (2008): Optimization of the Adhesion of Diamond-like Carbon on Glass Substrates for Microelectro Mechanical Systems by Nanoindentational StudiesLeeds-Lyon Symposium on Tribology 2008, Leeds, UK
  • F. Pape, H.H. Gatzen (2008): A Management Concept of Competencies Improvement for Students with Prior Vocational, Advanced Education, and Work Experience in Technical FieldsProc. Picmet, Vol. 2: "Technology Management for a Sustainable Economy." Cape Town, South Africa, Conf. CD
  • G. Janssen, O. Traisigkhachol, H.H. Gatzen, B. Ponick (2008): Design and Fabrication of a Rotary Micro Synchronus MotorProc. 11th Int. Conf. on New Actuators 2008, Bremen, Germany, pp. 457-460
  • H.H. Gatzen (2008): Magnetic Micro Electro-Mechanical Systems (MEMS) for Sensor and Actuator ApplicationsPRiME 2008 Meeting, Honolulu, HI, USA, The Electrochemical Society, MA 2008-2, Abs. 2601.pdf
  • H.H. Gatzen, E. Flick, V. Saile (2008): A Management of Technology (MOT) Concept for Handling Disruptive TechnologiesProc. COMS 2007, Melbourne, Australia, Conf. CD
  • H.H. Gatzen, F. Klocke, S. Kamenzky, O. Traisigkhachol (2008): Electroplated Cu Micro Electrode for Application in Micro Electrostatic Discharge Machining (EDM)PRiME 2008 Meeting, Honolulu, HI, USA, The Electrochemical Society, MA 2008-2, Abs. 2604.pdf
  • H.H. Gatzen, H. Gerdes, D. Miletic (2008): Electromagnetic Dual-position Microactuator for Measurement ApplicationsProc. 11th Int. Conf. on new Actuators 2008, Bremen, Germany, pp. 774-777
  • H.H. Gatzen, Paulo J.P. de Freitas, E. Obermeier, J. Robertson (2008): A Slider with an Integrated Microactuator (SLIM) for Second Stage Actuation in Hard Disc DrivesIntermag, Conf. 2008, Madrid, Spain, DF-05 IEEE Trans. on Magn., Vol. 44, No. 11, pp. 3730-3733
  • H.H. Gatzen, T. Griesbach, V. Saile (2008): A Concept for Complementary Micro NanoTechnology Education in UniversitiesProc. COMS 2007, Melbourne, Australia,Conf. CD
  • J. Chen, S. Hansen, H.H. Gatzen (2008): Long Term Investigations on NiFe Electroplating ProcessPRiME 2008 Meeting, Honolulu, HI, USA, The Electrochemical Society, MA 2008-2, Abs. 2584.pdf
  • K.-H. Wu, E. Gastan, M. Rodman, Fr.-W. Bach, B.-A. Behrens, H.H. Gatzen (2008): Development of Magnetic Magnesium for Data Storage in Gentelligent ProductsJEMS 2008, Dublin, Ireland (submitted)
  • K.-H. Wu, H.H. Gatzen (2008): Development of a System for Data Storage on Machine Components Proc. (CD), I PROMS 2008, the 4th Virtual Conf. of the EU-funded FP6 I PROMS Network of Excellence on Innovative Production Machines and Systems, pp. 454-459, Wales, UK
  • K.-H. Wu, H.H. Gatzen (2008): Fabrication and Assembly of a Magnetic Recirding HeadProc. euspen 8th Int. Conf. 2008, Zurich, Switzerland, Vol. 2, pp. 143-147
  • K.-H. Wu, R. Schäfer, H.H. Gatzen (2008): Investigations on a Permalloy Keeper Layer for the Readout of Magnetically Stored Data based on the Magneto-optical Kerr Effect53rd Conf. on Magnetics and Magn. Materials, Austin, TX, USA, Abstracts, BG-10
  • K.-H. Wu, S. Cvetkovic, H.H. Gatzen (2008): Dicing Process Optimization for Sapphire and AlticProc. euspen 8th Int. Conf. 2008, Zurich, Switzerland, Vol. 1, pp. 121-125
  • M. Bedenbecker, H.H. Gatzen (2008): Investigations on the Permeability of Thin-Film Soft Magnetic Structures53rd Conf. on Magnetics and Magn. Materials, Austin, TX, USA, Abstracts, FE-10
  • M. Wurz, D. Dinulovic, J. Chen, E. Flick, K. Bade, V. Saile, H.H. Gatzen (2008): Design of Experiment (DOE) for Optimizing a NiFe 45/55 Electroplating ProcessPRiME 2008 Meeting, Honolulu, HI, USA, The Electrochemical Society, MA 2008-2, Abs. 2583.pdf
  • M. Wurz, T. Oeckermann, P. Wagner, C. Ruffert, J. Caro, H.H. Gatzen (2008): Investigations on Embedding Nanoparticles by ElectroplatingPRiME 2008 Meeting, Honolulu, HI, USA, The Electrochemical Society, MA 2008-2, Abs. 2595.pdf
  • O. Traisigkhachol, L. Rissing, H.H. Gatzen (2008): A Concept for Characterization and Analysis of the readout of Soft Magnetic Thin-FilmsPRiME 2008 Meeting, Honolulu, HI, USA, The Electrochemical Society, MA 2008-2, Abs. 2605.pdf
  • S. Cvetkovic, H. Saalfeld, H.H. Gatzen (2008): Dicing Process for the Device Separation of a Slider with an Integrated Microactuator (SLIM)Proc. ASPE 23rd Ann. Meet. 2008 and 12th ICPE, Portland, OR, USA, pp. 380-383
  • T. Griesbach, L. Rissing, H.H. Gatzen (2008): Integration of a Temperature Sensor into a Modular, Multifunctional Micro Sensor FamilyProc. (CD), I PROMS 2008, the 4th Virtual Conference, of the EU-funded FP6 I PROMS Network of Excellence on Innovative Production Machines and Systems, pp. 472-476, Wales, UK
  • A. Neumeister, R. Himmelhuber, C. Materlik, T. Temme, F. Pape, H. H. Gatzen, A. Ostendorf (2007): Three-dimensional Micro Fabrication of Mechanical Systems Using Layer Based Stereo LithographyProc. 8th LPM 2007, Vienna, Austria
  • C. Ruffert, H.H. Gatzen (2007): Alternatives for Fabricating Aerostatic Micro GuidesProc. Smart Systems Integration 2007, European Conference & Exhibition on integration issues of miniaturized systems – MEMS, MOEMS, ICs and electronic components, Paris, France, pp. 604-607
  • C. Ruffert, H.H. Gatzen (2007): Miniaturized Cryoprobe for the Local Deactivation of Neural NetworksProc. EUSPEN 7th Int. Conf. 2007, Bremen, Germany, Vol. 1, pp. 73-77
  • C. Ruffert, H.H. Gatzen (2007): Design and Technology of a Magnetic Levitation System for Linear Micro ActuatorsProc. ASME 2007, Las Vegas, NV, USA, DETC2007-34676, ISBN 0-7918-3806-4
  • C. Ruffert, M. Feldmann, A. Waldschick, S. Büttgenbach, H.H. Gatzen (2007): Fertigung von Anrtiebs- und Führungskomponenten für MikromotorenKolloquium Mikroproduktion, Forschungzentrum Karlsruhe GmbH, Karlsruhe, Deutschland, S. 165-170
  • E. Flick, H.H. Gatzen (2007): A Study on Determining of the Current and Future Need for Specialists in High Technology IndustriesBook of Abstracts and Proc. 16th Int. Assoc. for Manag. of Tech. IAMOT 2007, Miami, Florida, USA
  • F. Pape, D. Miletic, H.H. Gatzen (2007): Recognition of Professional Qualifications for University Students in Engineering SciencesBook of Abstract. 16th Int. Assoc. for Manag. of Tech. IAMOT 2007, Miami, FL, USA
  • F. Pape, H.H. Gatzen (2007): Stress, Friction and Life in Micro Actuator Contact SurfacesLeeds-Lyon Symposium on Tribology 2007, France
  • H.H. Gatzen, P.J.P. de Freitas, E. Obermeier, J. Robertson (2007): A Slider with an Integrated Microactuator (SLIM) for Second Stage Actuation in Hard Disc DrivesProc. IMST 2007 FIM XV, Eindhoven, The Netherlands
  • M. Bedenbecker, M. Hahn, C. Ruffert, H.H. Gatzen (2007): Linear Synchronous Micro Motor with Further Miniaturized DimensionsProc. ASME 2007, Las Vegas, NV, USA, DETC2007-34677, ISBN 0-7918-3806-4
  • M. Bedenbecker, R. Bandorf, G. Bräuer, H. Lüthje, H.H. Gatzen (2007): Hart- und weichmagnetische Materialien für elektromagnetische MikroaktorenKolloquium Mikroproduktion, Forschungzentrum Karlsruhe GmbH, Karlsruhe, Deutschland, S. 159-164
  • S. Cvetkovic, C. Ruffert, H.H. Gatzen (2007): Assembly Concept of a Magnetic Levitation System for a Linear Micro ActuatorProc. ASME 2007, Las Vegas, NV, USA 2007, DETC2007-35266, ISBN 0-7918-3806-4
  • S. Cvetkovic, H.H. Gatzen (2007): Challenges and Solutions for the Assembly of a Linear Micro Step MotorProc. EUSPEN 7th Int. Conf. 2007, Bremen, Germany, Vol. 2, pp. 384-387
  • S. Cvetkovic, H.H. Gatzen (2007): Effect of Feed Rate and Grain Concentration on Ductile to Brittle Transition by Silicon DicingProc. EUSPEN 7th Int. Conf. 2007, Bremen, Germany, Vol. 2, pp. 380-383
  • S. Cvetkovic, H.H. Gatzen (2007): Investigation on the Impact on Process Quality When Utilizing Different Pads during Chemical-Mechanical Polishing of MEMSProc. ASPE 22nd Ann. Meet. 2007, Dallas, TX, USA, pp. 469-472
  • S. Cvetkovic, H.H. Gatzen (2007): Concept for Distinction Between the Circumferential and Sidewall Effects during Dicing of Single Crystal SiliconProc. ASPE 22nd Ann. Meet. 2007, Dallas, TX, USA, pp. 386-389
  • S. Demmig, R. Gehrking, M. Hahn, K. Wiedemann, B. Ponick, H.H. Gatzen, A. Mertens (2007): Fortschritte bei der Auslegung und Regelung aktiver MikrosystemeKolloquium Mikroproduktion, Forschungszentrum Karlsruhe GmbH, Karlsruhe, Deutschland, S. 171-178
  • S. Hansen, L. Rissing, H.H. Gatzen (2007): Temperature Characteristics of a Magnetic Micro Strain GaugeEUROMAT 2007, Nürnberg, Germany, Physica Status Solidi (c), Symposium A23: Magnetic Thin Films. Wiley-VCH Verlag
  • D. Dinulovic, E. Flick, H. Gerdes, K. Feindt, M. Eccarius, H.H. Gatzen (2006): Concept for a Wafer Level Test System for Measuring Magnetic Film Properties210th Meet. of The Electrochemical Society 2006, Cancun, Mexico
  • D. Herrmann, D. Milletic, H.H. Gatzen (2006): Recognition of Professional Qualification for University Students in Engineering SciencesBook of Abstract 15th Int. Ass. for Manag. of Tech. IAMOT 2006, Beijing, P.R. China
  • H. Gerdes, D. Dinulovic, H.H. Gatzen (2006): Electromagnetic Dual-position Actuator for Measurement ApplicationsProc. Actuator 2006, 10th Int. Conf. on New Actuators, Bremen, Germany, pp. 824-827
  • H.H. Gatzen, C. Ruffert (2006): Microcoils in Thin-film TechnologyProc. Inductica 2006, Berlin, Germany
  • H.H. Gatzen, C. Ruffert (2006): Advances in Magnetic Micro Thin-film Transducers210th Meet. of The Electrochemical Society, Cancun, Mexico, 2006
  • H.H. Gatzen, E. Flick (2006): Total Quality Management System for a Micro and Nano Technology Oriented University InstitutionProc. 15th Int. Ass. for Manag. of Tech. IAMOT 2006, Beijing, P.R. China
  • H.H. Gatzen, M. Hahn, K. Ullakko (2006): Characterization of Magnetic Shape Memory (MSM) Material and its Application in a Hybrid Micro ActuatorProc. Actuator 2006, 10th Int. Conf. on New Actuators, Bremen, Germany, pp. 406-409
  • H.H. Gatzen, M. Hahn, M. Bedenbecker, B. Ponick, R. Gehrking, S. Demmig (2006): Advances in the Development of a Linear Hybrid Micro ActuatorProc. Actuator 2006, 10th Int. Conf. on New Actuators, Bremen, Germany, pp. 207-210
  • H.H. Gatzen, S. Cvetkovic (2006): Modeling CMP - Investigation of the Chemical Attack on the Mechanical Properties of Bulk MaterialProc. EUSPEN 6th Int. Conf. 2006, Baden, Austria
  • K. Halalo, H.H. Gatzen (2006): Ceramic Micro Needle Array for Painless Drug Delivery and Biological SensingProc. EUSPEN 6th Int. Conf. 2006, Baden, Austria Sensing
  • K. Halalo, H.H. Gatzen (2006): Combining Mechanical Micromachining and Glass Bonding to Fabricate Robust Micro StructuresProc. EUSPEN 6th Int. Conf. 2006, Baden, Austria
  • K.-H. Wu, O. Traisigkhachol, H.H. Gatzen (2006): Development of a MIG-Head for Magnetic Storage of Information on Machine Components210th Meet. of The Electrochemical Society 2006, Cancun, Mexico
  • M. Bedenbecker, Z. Celinski, H.H. Gatzen (2006): Directional Permeability Dependence in Electroplated Permalloy LayersProc. 210th Meet. of The Electrochemical Society, Cancun, Mexico, ecs transactions, Vol. 3, Issue 25, pp. 123-135
  • S. Hansen, L. Rissing, H.H. Gatzen (2006): A Concept for a Toolbox for Modular Magnetic Microsensors210th Meet. of The Electrochemical Society 2006, Cancun, Mexico
  • C. Neumeister, S. Walsh, H.H. Gatzen (2005): A Business Process Model for MEMS14th Int. Ass. for Manag. of Tech. IAMOT 2005, Vienna, Austria
  • D. Dinulovic, H.H. Gatzen (2005): Thin Film Inductive Micropositioning SensorProc. XIX Eurosensors Conf., Barcelona, Spain, Vol. II (W), pp. WPb25
  • H.H. Gatzen, C. Morsbach (2005): Kerf Sidewall Grove Formation during Ductile Dicing of Ceramic MaterialsProc. ASPE 20th Ann. Meet. 2005, Norfolk, Virginia, USA, pp. 387-390
  • H.H. Gatzen, C. Neumeister (2005): GoPro, a business process model to support the development for MEMSCOMS 2005, Baden-Baden, pp. 256-260
  • H.H. Gatzen, G. Günzel (2005): Investigations on the Influence of the Substrate’s Thickness on the Cut Quality During Dicing of thin Silicon WafersProc. euspen 5th Int. Conf. and 7th Ann. Gen. Meet. 2005, Montpellier, France, Vol. 2, pp. 589-590
  • H.H. Gatzen, M. Bedenbecker (2005): Magnetic Micro Systems – small, robust, versatileCOMS 2005, Baden-Baden, pp. 444-448
  • H.H. Gatzen, M. Bedenbecker (2005): Magnetic Micro Systems – small, robust, versatileM2EMS Workshop Kreta
  • H.H. Gatzen, M. Bedenbecker, C. Ruffert (2005): Magnetische MikrobauteileProc. 8. Symposium Magnetoresistive Sensoren; Grundlagen - Herstellung - Anwendungen, 2005, Sensitec GmbH, Georg-Ohm-Str.1, D35633 Lahnau, pp. 28-36
  • M. Hahn, E. Pagounis, H.H. Gatzen (2005): Evaluation of a Micro Motor with Integrated MSM Material Digest IEEE Intermag Conf. 2005, Nagoya, Japan, GF12, pp. 1683-1684
  • S. Cvetkovic, K.-H. Wu, H.H. Gatzen (2005): Modeling CMP - Investigation of the Mechanical Removal MechanismProc. ASPE 20th Ann. Meet. 2005, Norfolk, Virginia, USA, pp. 500-503
  • A. Ben Amor, C. Ruffert, H.H. Gatzen (2004): NiFe 45/55 and its Application in a Strain Gauge SensorProc. 8th Int. Symposium on Magnetic Materials, Processes and Devices, 206th Meet. of The Electrochemical Society 2004, Honolulu, Hawaii, USA, pp. 481-492
  • A. Ben Amor, T. Budde, H.H. Gatzen (2004): Magnetoelastic microtransformer with an improved sensor designDigests 9th Joint MMM-Intermag Conf. 2004, Anaheim, CA, USA, GP-15
  • C. Morsbach, N. Münter, R.J.M. Vullers, H.H. Gatzen (2004): Application of Far Field and Near Field Sliders in Optical Data StorageDigest 9th Joint MMM-Intermag Conf. 2004, Anaheim, CA, USA, GP-13
  • C. Neumeister, H.H. Gatzen (2004): Computer-Aided Variants FindingProc. 13th Int. Ass. for Manag. Of Tech. IAMOT 2004, Washington, D.C. USA
  • D. Dinulovic, H.H. Gatzen (2004): Microfabricated Inductive Linear Micro Positioning SensorProc. 3rd IEEE Int. Conf. on sensors, IEEE Sensors 2004, Vienna, Austria, ISBN 0-7803-8692-2
  • D. Dinulovic, H.H. Gatzen (2004): Microfabricated Inductive Sensor for Position MeasurementsProc. 8th Int. Symposium on Magnetic Materials, Processes and Devices, 206th Meet. of The Electrochemical Society 2004, Honolulu, Hawaii, USA, pp. 471-480
  • H.H. Gatzen (2004): Magnetic Materials in Thin Film Sensors and ActuatorsProc. 8th Int. Symposium on Magnetic Materials, Processes and Devices, 206th Meet. of The Electrochemical Society 2004, Honolulu, Hawaii, USA, pp. 457-470
  • H.H. Gatzen, C. Kourouklis (2004): Mechanical Machining of Thin Polycrystalline Diamond FilmsASPE 19th Ann. Meet. Orlando, Florida, USA, pp. 594-697
  • H.H. Gatzen, G. Günzel (2004): Improved Dicing Method for Thin Silicon WafersProc. 4th euspen Int. Conf. and 6th Ann. Gen. Meet. 2004, Glasgow, UK, pp. 143-144
  • H.H. Gatzen, G. Günzel (2004): Dicing of thin stacked wafer packagesProc. 7th Int. Symposium on Advances in Abrasive Technology 2004, Bursa, Turkey, pp. 443-446
  • H.H. Gatzen, H.-D. Stölting, B. Ponick (2004): Alternatives for Micro-machined Linear ActuatorsProc. 9th Int. Conf. on New Actuators 2004, Bremen, Germany, pp. 665-668
  • M. Hahn, M. Bedenbecker, U. Brand, H.H. Gatzen (2004): Evaluation of a Linear Hybrid Micro Step MotorProc. 8th Int. Symposium on Magnetic Materials, Processes and Devices, 206th Meet. of The Electrochemical Society 2004, Honolulu, Hawaii, USA, pp. 493-505
  • M.C. Wurz, D. Dinulovic, H.H. Gatzen (2004): Investigation of the permeability on electroplated and sputtered permalloyProc. 8th Int. Symposium on Magnetic Materials, Processes and Devices, 206th Meet. of The Electrochemical Society 2004, Honolulu, Hawaii, USA, pp. 526-536
  • T. Budde, H.H. Gatzen (2004): Patterning Techniques for Thick SmCo LayersProc. 18th International Workshop on High-Performance Magnets and Their Applications 2004, Annecy, France, pp. 805-816
  • T. Budde, M. Hahn, M. Föhse, J. Edler, H.-D. Stölting, H.H. Gatzen (2004): Design, Fabrication, and Characterization of a Hybrid Linear Micro Step MotorProc. 9th Int. Conf. on New Actuators 2004, Bremen, Germany, pp. 665-668
  • W.-R. Zabel, S.B. Wiendl, U. Gunst, G. Poll, H.H. Gatzen, H.F. Arlinghaus (2004): The Influence of Chemical and Physical Boundary Layer Properties on the Tribological Performance of Rolling Element BearingsProc. of 14th Int. Colloquium on Tribology 2004, Stuttgart/Ostfildern, pp. 1385-1393
  • B. Ma, C. Morsbach, H.H. Gatzen (2003): A Novel Flying Height Measurement Approach for Optical SlidersIEEE Proc. of AsiaSENSE 2003, Kuala Lumpur, Malaysia, pp. 29-32
  • C. Morsbach, N. Münter, S. Knappmann, H.H. Gatzen: (2003): Concepts for In-situ Flight Attitude Measurements of Optical Flying HeadsProc. Innovative Mass Storage Technology Workshop (IMST) 2003, Grenoble, France, Or 41
  • C. Neumeister, H.H. Gatzen (2003): Combined Matrix Selection to Support the Development of ProductsProc. 12th Int. Ass. for Manag. of Tech. IAMOT 2003, Nancy, France
  • D. Dinulovic, T. Budde, H.H. Gatzen (2003): Design and fabrication of an inductive micro position sensorStatusseminare BMBF-Verbundvorhaben, Microtec, München, S. 295-300
  • H.-W. Hoffmeister, M. Hlavac, H.H. Gatzen, C. Morsbach (2003): Mikrostrukturierung durch SchleifenMikromechanische Produktionstechnik, Abschlusskolloquium DFG Schwerpunktprogramm 1012. Shaker, Aachen, S. 39-54
  • H.H. Gatzen, C. Kourouklis (2003): Nano-Roughness Standards with a Very Low Roughness ValueProc. euspen 4th Int. Top. Conf. 2003, Aachen, Germany, Vol. 2, pp. 495-498
  • H.H. Gatzen, C. Morsbach (2003): Precision Profile Grinding of High Aspect Ratio MicrostructuresProc. euspen Int. Top. Conf. 2003, Aachen, Germany, pp. 349-352
  • H.H. Gatzen, E. Obermeier, T. Kohlmeier, T. Budde, H.D. Ngo, B. Mukhopadhyay, M. Farr (2003): An Electromagnetically Actuated Bi-stable MEMS Optical MicroswitchProc. Transducers 03, Boston, MA, USA, pp. 1514-1517
  • H.H. Gatzen, G. Günzel (2003): Optimization of Chemical Mechanical Polishing of Thin Silicon WafersProc. euspen Int. Top. Conf. 2003, Aachen, Germany, Vol. 1, pp. 293-296
  • H.H. Gatzen, G.M Jones, C. Morsbach, G. Günzel, A. Karyazin (2003): Investigations Regarding the Interdependence of Spindle Load and Machine Performance During SlicingProc. ASPE 18th Ann. Meet. 2003, Portland, Oregon, USA, pp. 435-438
  • L. Zhou, M. Beck, H.H. Gatzen, G. Vurens, F. E. Talke (2003): Tribology of textured pico-slider at a flying height of 5 nmProc. TISD 2003, Monterey, CA, USA
  • L. Zhou, M. Beck, H.H. Gatzen, K. Altshuler, F. E. Talke: (2003): Slider Vibration Reduction Using Slider Surface TextureProc. Joint Conf. on MIPE 2003, Japan
  • M. Balke, H. Lüthje, T. Budde, H.H. Gatzen, G. Bräuer (2003): Non-reactive and reactive ion etching processes for patterning magnetic MEMS componentsProc. of the 2nd MICRO.tec Conf. 2003, Munich, pp. 51-52
  • M. Föhse, H.H. Gatzen: (2003): Erzeugung magnetischer NiFe-Dünnfilme durch galvanische Abscheidung mit Pulse-PlatingOberflächentage 2003, DGO-Veranstaltung, Tagungsband, Bremen
  • M. Föhse, J. Edler, H.D. Stölting, H.H. Gatzen (2003): A batch fabricated linear synchronous motorProc. Int. Mech. Eng. Congr. and Expo IMECE 2003, Washington D.C., USA, pp. 1-8
  • R. Bandorf, M. Beck, H. Lüthje, J.-H. Sick, H.H. Gatzen (2003): Influence of the initial surface roughness on the wear behaviour of micro probes under rotating and oscillating flat micro contactProc. 2nd MICRO.tec Conf. 2003, Munich, pp. 477-478
  • T. Budde, H.H. Gatzen (2003): Thick Sputter Deposited NiFe 45/55 Films for Flux Guides In Magnetic MEMSProc. 16th Soft Magnetic Materials Conf. 2003, Düsseldorf, Germany, pp. 867-872
  • D. Dinulovic, H.H. Gatzen (2002): Entwicklung eines Wegmesssensors zur Überwachung eines MikropositionierersProc. 47th Internationales Wissenschaftliches Kolloquium 2002, Ilmenau, S. 673-674
  • H. Iswahjudi, H.H. Gatzen (2002): FEM Simulation for Design and Evaluation of an Eddy Current MicrosensorProc. 14th European Simulation Symposium and Exhibition 2002, Dresden, Germany, pp. 201-205
  • H.H. Gatzen (2002): Technologien für MikromotorenInvited paper, Proc. MTT 2002, Erfurt, S. 37-41
  • H.H. Gatzen (2002): Advances in European Magnetic MEMS TechnologyInvited paper, Proc. 7th Int. Symposium on Magnetic Materials, Processes and Devices, 202nd Meet. of The Electrochemical Society 2002, Salt Lake City, UT, USA, pp. 90-108
  • H.H. Gatzen, C. Morsbach, A. Karyazin (2002): High Precision Machining of a Longitudinal Bearing for a Linear MicroactuatorProc. 3rd Int. euspen Conf. 2002, Eindhoven, The Netherlands, pp. 325-328
  • H.H. Gatzen, C. Morsbach, A. Karyazin (2002): Mechanical Micromachining of High Aspect Ratio MicrostructuresProc. ASPE 2002, 17th Ann. Meet. 2002, St. Louis, Missouri, USA, pp. 562-566
  • H.H. Gatzen, G. Günzel (2002): Dicing of Ultra-thin Silicon WafersProc. ASPE 2002, 17th Ann. Meet. 2002, St. Louis, Missouri, USA, pp. 557-561
  • H.H. Gatzen, G. M. Jones, A. Karyazin (2002): Chipping Minimization during Dicing and SlicingProc. ASPE 2002, 17th Ann. Meet. 2002, St. Louis, Missouri, USA, pp. 551-556
  • L. Zhou, M. Beck, H.H. Gatzen, K. Kato, G. Vurens, F. E. Talke (2002): The effect of Slider Texture on the Tribology of Near Contact Recording SlidersProc. Austrib 2002, Perth, Australia, pp. 229-126
  • M. Föhse, H.H. Gatzen (2002): Optimizing the Magnetic Properties of Electroplated Permalloy for Flux Guides in MicromotorsProc. 7th Int. Symposium on Magnetic Materials, Processes and Devices, 202nd Meet. of The Electrochemical Society 2002, Salt Lake City, UT, USA, pp. 125-136
  • M. Föhse, J. Edler, H.D. Stölting, H.H. Gatzen (2002): Design, Fabrication, and Characterization of a Miniature Linear Asynchronous MotorProc. Actuator 2002, Bremen, Germany, pp. 176-179
  • M. Föhse, J. Edler, H.D. Stölting, H.H. Gatzen (2002): Investigations on the Pole Geometry Optimization of a Variable Reluctance Microactuator47. Internationales Wissenschaftliches Kolloqium, Ilmenau, Germany, pp. 215-216
  • T. Budde, H.H. Gatzen (2002): Magnetic Properties of Thick Sputter Deposited SmCo-Films for MEMS-ApplicationsDigest Intermag Europe 2002, Amsterdam, The Netherlands, GD05
  • T. Kohlmeier, H.H. Gatzen (2002): Ni Electroplating in SU-8 Microforms for Fabricating Self Supporting MicrostructuresProc. 7th Int. Symposium on Magnetic Materials, Processes and Devices, 202nd Meet. of The Electrochemical Society 2002, Salt Lake City, UT, USA, pp. 137-148
  • T. Kohlmeier, T. Budde, H.H. Gatzen (2002): Electromagnetic Bearing System for Integration in a Linear MicroactuatorProc. Eurosensors XVI, The 16th European Conf. on Solid-State Transducers 2002, Prague, Czech Republic, pp. 1217-1220
  • U. Gunst, S.B. Wiendl, W.-R. Zabel, H.F. Arlinghaus, H.H. Gatzen, G. Poll (2002): Characterization of High-Speed Rolling Element Bearing, Greases and Additives with TOF-SIMSProc. SIMS Europe, Münster, Germany, pp. 32
  • C.W. Chang, T. Budde, H.H. Gatzen, R.S. Muller (2001): A Magnetically Actuated Scanner for Intravascular Ultrasound ImagingProc. ASME IMECE 2001, Int. Mechanical Engineering Congress and Exposition, New York, USA, Vol. 2, MEMS 23914
  • H.H. Gatzen, C. Kourouklis (2001): The Fabrication of Nano-Roughness Standards for the Calibration of Atomic Force MicroscopesProc. ASPE 16th Ann. Meet. 2001, Virginia, USA, pp. 493-496
  • H.H. Gatzen, C. Kourouklis, R. Krüger-Sehm (2001): Roughness Standards for the Calibration of SPM- from Design to Comparison MeasurementProc. 5th Seminar on Quantitative Microscopy, Nanoscale 2001, Bergisch Gladbach, pp. 7-13
  • H.H. Gatzen, C. Morsbach, G.M. Jones (2001): Investigations Regarding the Operating Range of Ultrathin Grinding Wheels on AlTiCProc. 10th ICPE 2001, Yokohama, Japan
  • H.H. Gatzen, C. Morsbach, M. Tricard (2001): Dual Wheel Miniature Gang for Silicon Wafer DicingProc. euspen 2nd Intern. Conf. 2001, Turin, Italy, pp. 722-725
  • H.H. Gatzen, M. Beck (2001): DLC Coating Technology for Cutting ToolsProc. 2nd Int. Conf. 2001 THE Coatings, Hanover, C2-1-7
  • H.H. Gatzen, C. Morsbach, J. Zeadan (2000): Advances in Dicing Wafers for Micro Electro-Mechanical Systems (MEMS)Proc. Micro.tec Conf. 2000, Hanover, VDE Publication, Vol. 2, pp. 621-625
  • H.H. Gatzen, H. Siekmann (2000): Investigations on the Tool Plate Preparation for NanogrindingProc. ASPE 15th Ann. Meet. Scottsdale, AZ, USA, pp. 90-93
  • H.H. Gatzen, H.-D. Stölting, S. Büttgenbach, H. Dimigen (2000): A Novel Variable Reluctance Micromotor for Linear ActuationProc. Actuator 2000, Bremen, Germany, pp. 363-366
  • H.H. Gatzen, J. Zeadan (2000): Investigations on the Coolant Supply in Precision DicingProc. ASPE 15th Ann. Meet. 2000, Scottsdale, AZ, USA, pp. 90-93
  • W. Bach, K. Möhwald, H.H. Gatzen, C. Morsbach (2000): Metall-Kapillardruckgießen: ein neues Urformverfahren für die Mikromechanik (Metal Capillary Casting, a New Micromechanical Technology)7. Werkstoffwissenschaftliches Kolloquium, Innovative Werkstofftechnologie 1999, Aachen, Werkstoffwissenschaftliche Schriftenreihe, Band 41, S. 67-73
  • C. Morsbach, H.H. Gatzen (1999): Investigations on the Wear Profile of Dicing WheelsProc. ASPE 14th Ann. Meet. 1999, Monterey, CA, USA, pp. 67-70
  • H.H. Gatzen, H. Siekmann (1999): Plate Topography Influence on the Nanogrinding Process.Proc. ASPE 14th Ann. Meet. Monterey, CA, USA, pp. 83-86
  • H.H. Gatzen, J. Zeadan, G. Jones (1999): Kerf Sidewall Phenomena in Slicing Processes of Thin Film HeadsProc. euspen 1st Int. Conf. 1999, Bremen, pp. 548-461
  • H.H. Gatzen, L. Rissing (1999): Composition Dependent Magnetostrictive Properties of NiFe FilmsProc. ASME Ann. Meet. 1999, Nashville, Tennessie, USA, pp. 151-155
  • H.H. Gatzen, L. Rissing, T. Woywod (1999): Magnetoelastic Microtransformer with an Improved Core DesignDigest IEEE Intermag Conf. 1999, Kyongju, South Korea, GF-02, ISBN:0-7803-5555-5
  • H.H. Gatzen, M. Beck, J. Zeadan (1999): Technological Challenges in Ultraprecision Grinding of Flexural MicrosensorProc. euspen 1st Int. Conf. 1999, Bremen, Germany, Vol. 1, pp. 538-541
  • K. Möhwald, C. Morsbach, F.-W. Bach, H.H. Gatzen (1999): Investigations on Capillary Action Microcasting of MetalsProc. EUSPEN 1st Int. Conf. 1999, Bremen, Germany, Vol. 1, pp. 490-493
  • H.H. Gatzen, H.K. Tönshoff (1998): Risk Management and Product Integrity – A Simple Approach to Concurrent EngineeringProc. TMCE 1998, Manchester, UK
  • H.H. Gatzen, L. Ruhbach (1998): Mechanical Microprofiling Mechanisms of Advanced CeramicsProc. 13th Ann. Meet. 1998, St Louis, MO, USA, pp. 69-75
  • T. Hellmold, L.P. Ruhbach, J. Zeadan, H.H. Gatzen (1998): Ductile Mode Cutting of Silicon MicropartsProc. ASPE Spring Topical Meet. 1998, Monterey, CA, USA
  • H.H. Gatzen (1997): Precision Engineering Requirements in Magnetic Memory Disc File SystemsInvited paper, Proc. 9th Precision Engineering Seminar 1997, Braunschweig
  • H.H. Gatzen (1997): Challenges in thin film head machiningData Storage, Vol. 3, pp. 85-90
  • H.H. Gatzen, H.K. Tönshoff (1997): Risk Management and Product Integrity – A Simple Approach to Concurrent EngineeringProc. TMCE 1998, Manchester, UK, 1997
  • H.H. Gatzen, J.C. Mätzig, H. Siekmann (1997): Applying Scanning Probe Microscopy to Ultraprecision-MachiningProc. european Workshop on Microtechnology and Scanning Probe Microscopy 1997, Mainz
  • H.H. Gatzen, J.C. Mätzig, H. Siekmann (1997): Rauheitsmessungen im Subnanometerbereich: Vergleich optischer und tastender Messverfahren (Roughness Measurement in the Subnanometer Range – a Comparison between Optical and Tactile Methods)Proc. Workshop 1997: New Developments and Applications in Scanning Probe Microscopy, Dresden, Germany
  • H.H. Gatzen, J.C. Mätzig, L.P. Ruhbach (1997): White Light Interferometry and Atomic Force Microscopy Grinding Tool Topography Measurements - A ComparisonProc. 4th Int. Conf. on Ultraprecision in Manufacturing Engineering 1997, Braunschweig, Germany
  • H.H. Gatzen, J.C. Mätzig, L.P. Ruhbach (1997): Grinding Tool Topography Analysis by White Light Interferometry and Atomic Force MicroscopyProc. 9th Precision Engineering 1997, Braunschweig
  • H.H. Gatzen, J.C. Mätzig, L.P. Ruhbach (1997): Ultraprecision Grinding of High Aspect Ratio MicropartsProc. ASPE 12th Ann. Meet. 1997, Norfolk, UK, VA, pp. 454-457
  • H.H. Gatzen, M.S. Schwabe (1997): Technological Investigations for the Manufacture of Giant Magnetoresistive (GMR) StructuresProc. SICAN Fall Conf. 1997, Hanover, Germany
  • H.H. Gatzen, S.A. Zielke (1997): Finite Element Analysis of Dual Magnetic Field SensorsSICAN Fall Conf. 1997, Hanover
  • H.H. Gatzen, J.C. Mätzig (1996): Minimierung der Rauheit beim Nanoschleifen isostatisch heißgepreßter Keramikwerkstoffe (Roughness Minimization during Nanogrinding of Hot Isostatic Pressed Ceramics)Proc. 8th Precision Engineering, Braunschweig, pp. 22.1-22.21
  • H.H. Gatzen (1995): Microtechnology and its Application in Data Storage - An OverviewProc. SICAN and CAD/CAT Lower Saxony Conf. 1995, Germany
  • H.H. Gatzen (1995): Time to Market - Schlüssel zum Erfolg bei Hochtechnologieprodukten (Time to Market - The Key to Success with High Technology Products)Proc. SICAN and CAD/CAT Lower Saxony Conf. 1995, Germany
  • H.H. Gatzen (1995): Magnetic Micromechanics Activities in GermanyInvited paper, Proc. 4th Int. Symposium on Materials, Processes and Devices 1995, Chicago, Illinois, USA
  • H.H. Gatzen, G.F. Hughes (1987): Flight Attitude and Take-off/Landing Behavior of a Miniature Winchester Head for Rotary ActuatorsProc. ASLE Tribology Conf. 1987, San Antonio, Texas, USA, pp. 133-137
  • H.H. Gatzen, L.W. Fay (1982): Positional Accuracy and Acoustic Noise Problems in High Track Density Floppy Disk Drives with a Step Motor Driven Band ActuatorProc. 11th Ann. Symposium on Incremental Motion Control Systems and Devices 1982, Chicago, Illinois, USA, pp. 197-207
  • H.H. Gatzen (1977): Bütykös tárcsa felületeinek egyenetlensége és érdessége által létrehozott zavaró gyorsulások (Disturbing Accelerations caused by Waviness and Roughness of the Cam Surface)Finommechanika Microtechnika 12
  • H.H. Gatzen, J. Heinzl (1977): Dynamik schnellaufender Kurvengetriebe (Dynamics of High Speed Cam Follower Systems)Proc. Second Symposium on Linkages and Computer Aided Design Methods, Vol. 3, No. 1, paper 24, Bucharest, Rumänien and I-Magazine No. 281, Düsseldorf, pp. 163-169
  • H.H. Gatzen (1976): Die quantitative Abschätzung der Störbeschleunigungen bei Kurvengetrieben (A Quantitative Analysis of Disturbing Accelerations in Cam Follower Systems)Proc. Constronic '76, Budapest, Ungarn, pp. 327-336

Berichte

  • S. Hansen, M.C. Wurz, H.H. Gatzen (2006): Baukasten multifunktionaler Mikrosensoren für Messaufgaben in der Fertigungstechnikwt Werkzeugtechnik online, Jahrgang 96, H. 11/12, S. 866-870

Zeitschriften/Aufsätze

  • B. Wielage, T. Mäder, D. Weber, A. Belski, H.H. Gatzen (2010): Analyses of Sensor Films on a Carbon FibreJournal FIB, 2010 (s.dazu auch Nr. 283!?)
  • B. Wielage, T. Mäder, D. Weber, A. Belski, H.H. Gatzen (2010): Analyses of Sensor Films on a Carbon FibreJournal of Materials Science and Engineering
  • B. Wielage, T. Mäder, D. Weber, A. Belski, H.H. Gatzen (2010): Analyses of Sensor Films on a Carbon FibreJournal of Materials Science and Engineering, Sept. 2010, Vol. 4, No. 9, (Serial No. 34), ISSN 1934-8959, USA, 2010
  • J. Chen, E. Flick, H.H. Gatzen (2010): Minimizing Oxygen Inclusion when Electroplating High Saturation Density CoFe for Microelectromechanical SystemJournal of Applied Physics 107, Issue 9, pp. 09A311-09A311-3, 2010
  • K.-H. Wu, E. Gastan, M Rodman, B.-A. Behrens, Fr.-W. Bach, H.H. Gatzen (2010): Development and Application of Magnetic Magnesium for Data Storage in Gentelligent ProductsJournal of Magnetism and Magnetic Material 322, Elsevier, pp. 1134-1136, 2010
  • V. Zagorodnii, A.J. Hutchison, S. Hansen, J. Chen, H.H. Gatzen, Z. Celinski (2010): Broad-band Ferromagnetic Resonance Characterization of Lossy Ferromagnetic Metallic ElementsJournal of Applied Physics 107, Issue 11, pp. 113906-113906-7, 2010
  • B.-A. Behrens, H.H. Gatzen, I. Peshekhodov, F. Pape (2009): Investigation of the Mechanical Behavior of a PU-Based Coil-Coating System with the Help of Indentation and FE AnalysisKey Engineering Materials Vols. 410-411 (2009), pp. 217-224
  • D. Dinulovic, H. Saalfeld, Z. Celinski, S. Field, H.H. Gatzen (2009): Evaluation of an Electromagnetic Microactuator using Scanning Hall Probe Microscopy MeasurementsJournal of Applied Physics, AIP, Vol. 105, 07F119-1
  • A. Neumeister, R. Himmelhuber, C. Materlik, T. Temme, F. Pape, H.H. Gatzen, A. Ostendorf (2008): Properties of Three-Dimensional Precision Objects Fabricated by Using Laser Based Micro Stereo LithographyJLMN-Journal of Laser Micro/Nanoengineering, Vol. 3, No. 2, pp. 67-72
  • B. Spasova, M. Wurz, H.H. Gatzen (2008): Manufacturing Technology for the Fabrication a Discrete Actuator Using a Magnetic Shape Memory AlloyE-MRS-Symposium 2007, Warsaw, Poland, European Physics Journal, Springer Verlag Berlin Heidelberg New York, Special Topics 158, pp. 243-247
  • B. Spasova, M. Wurz. H.H. Gatzen (2008): Application of MSM Bulk Material in a Hybrid MicroactuatorEUROMAT 2007, Nürnberg, Germany, Physica Status Solidi (a) 205, No. 10, pp. 2307-2312 Wiley-VCH Verlag
  • C. Ruffert, H.H. Gatzen (2008): Fabrication and Test of Multi Layer Micro Coils with a High Packaging DensityHARMST2007, Besançon, France, Microsystem Technologies, Springer Verlag Berlin Heidelberg New York, Vol. 14, No. 9-11, pp. 1589-1592
  • D. Paulkowski, R. Bandorf, S. Achilles, F. Pape, H.H. Gatzen, G. Bräuer (2008): Studies on Diamond-like Carbon Coatings for the Application in Micro ActuatorsEUROMAT 2007, Nuremberg, Germany, (accepted for Advanced Engineering Materials), Wiley-VCH Verla
  • K.-H. Wu, O. Traisigkhachol, H.H. Gatzen (2008): A Concept for Magnetic Data Recording on Genetically Intelligent ("Gentelligent") ComponentsEUROMAT 2007, Nuremberg, Germany, Physica Status Solidi (c) 5, No. 11, pp. 3547-3550, Wiley-VCH Verlag
  • M. Bedenbecker, H.H. Gatzen (2008): Investigation on a NiFe Alloy with a Coefficient of Thermal Expansion Matching the One of SiliconMMM 2007, Tampa, FL, USA, Journal of Applied Physics, Vol. 103, 07E731
  • M. Bedenbecker, R. Bandorf, G. Bräuer, H. Lüthje, H.H. Gatzen (2008): Hard and Soft Magnetic Materials for Electromagnetic MicroactuatorsMicrosystem Technologies, Springer Verlag Berlin Heidelberg New York, Vol. 14, No. 12, pp. 1949-1954
  • M. Feldmann, A. Waldschick, C. Ruffert, H.H. Gatzen, S. Büttgenbach (2008): Fabrication of Drive and Guide Components for MicromotorsMicrosystem Technologies, Springer Verlag Berlin Heidelberg New York, Vol. 14, No. 12, pp. 1941-1947
  • S. Demmig, R. Gehrking, M. Hahn, K. Wiedmann, B. Ponick, H.H. Gatzen, A. Mertens (2008): Technical Progress in Designing and Controlling of Active Micro SystemsMicrosystem Technologies, Springer Verlag Berlin Heidelberg New York, Vol. 14, No. 12, pp. 1925-1931
  • S. Hansen, L. Rissing, H.H: Gatzen (2008): Temperature Characteristics of a Magnetic Micro Strain GaugeEUROMAT 2007, Nuremberg, Germany, Symposium A23: Magnetic Thin Films, Physica Status Solidi (c) 5, No. 11, pp. 3551-3554, Wiley-VCH Verlag
  • B. Kuanr, Y. Khivintsev, I. Harward, R.E. Camley, Z. Celinski, M. Bedenbecker, H.H. Gatzen (2007): Increasing Operational Frequency in Microwave Devices by Using [SmCo/NiFe] Multilayered StructuresIEEE Trans. on Magn., Vol. 43, No. 6, pp. 2648-2650
  • C. Ruffert, J. Li, B. Denkena, H.H. Gatzen (2007): Development and Evaluation of an Active Magnetic Guide for Microsystems with an Integrated Air Gap Measurement SystemIEEE Trans. on Magn., Vol. 43, No. 6, pp. 2716-2718
  • D. Dinulovic, H. Gerdes, H. Mucha, B. Wielage, H.H. Gatzen (2007): Carbon Fiber with Magnetoelastic Sensing Capability for Composite MaterialsSensor Letters, Vol. 5, No. 1, pp. 218-221
  • H. Gerdes, H.H. Gatzen (2007): Focused Ion Beam Core Hole Drilling for Stress Detection in Thin-filmsMicroNanoReliability 2007, Berlin, Germany, Micromaterials and Nanomaterials, Microsystem Technologies, Springer Verlag Berlin Heidelberg New York, Vol. 15, No. 1, pp. 151-153
  • H.H. Gatzen , C. Ruffert (2007): Advances in Magnetic Micro Thin-film TransducersSymposium on Magnetic Materials, Processes and Devices, 210th Meet. of The Electrochemical Society, Cancun, Mexico, 2006, ecs transactions, Vol. 3, Issue 25, pp. 203-221
  • H.H. Gatzen, D. Dinulovic, E. Flick, H. Gerdes, K. Feindt, M. Eccarius (2007): Concept for a Wafer Level Test System for Measuring Magnetic Film PropertiesSymposium on Magnetic Materials, Processes and Devices, 210th Meet. of The Electrochemical Society, Cancun, Mexico, 2006, ecs transactions, Vol. 3, Issue 25, pp. 165-177
  • H.H. Gatzen, K.-H. Wu, O. Traisigkhachol (2007): Development of a Recording Head for Magnetic Storage of Information on Machine ComponentsSymposium on Magnetic Materials, Processes and Devices, 210th Meet. of The Electrochemical Society, Cancun, Mexico, 2006, ecs transactions, Vol. 3, Issue 25, pp. 191-202
  • H.H. Gatzen, S. Hansen, L. Rissing (2007): A Concept for a Toolbox of Components for Modular Magnetic MicrosensorsSymposium on Magnetic Materials, Processes and Devices, 210th Meet. of The Electrochemical Society, Cancun, Mexico, 2006, ecs transactions, Vol. 3, Issue 25, pp. 235-246
  • M. Bedenbecker, Z. Celinski, H.H. Gatzen (2007): Directional Permeability Dependence in Electroplated Permalloy LayersSymposium on Magnetic Materials, Processes and Devices, 210th Meet. of The Electrochemical Society, Cancun, Mexico, 2006, ecs transactions, Vol. 3, Issue 25, pp. 123-135
  • M. Hahn, M. Bedenbecker, H.H. Gatzen (2007): Evaluation of a Linear Hybrid Microstep Motor by Means of Magnetic Flux Measurements10th Joint MMM/Intermag Conf. 2007, Baltimore, MD, USA, FU-04 IEEE Trans. on Magn., Vol. 43, No. 6, pp. 2588-2590
  • N. Münter, S. Knappmann, C. Morsbach, H.H. Gatzen (2007): Acoustic Emission (AE) Measurements to Determine the Dynamic Flying Characteristics of Optical SlidersMicrosystem Technologies, Springer Verlag Berlin Heidelberg New York, Vol. 13, No. 2, pp. 173-175
  • S. Hansen, L. Rissing, H.H. Gatzen (2007): Modularly Designed Magnetoelastic Micro Strain Gauge10th Joint MMM/Intermag Conf. 2007, Baltimore, MD, USA, IEEE Trans. on Magn., Vol. 43, No. 6, pp. 2385-2387
  • S. Krongelb, C. Bonhote, S. Brankovic, H.H. Gatzen, Y. Kitamoto (2007): Magnetic Materials, Processes and Devices 9ECS Transactions, Vol. 3, Issue 25
  • A. Ben Amor, T. Budde, H.H. Gatzen (2006): A Magnetoelastic Microtransformer Based Micro Strain Gauge5th European Magnetic Sensor & Actuator Conf. EMSA 2004, Sensors and Actuators A129 (2006) No. 1-2, pp. 41-44
  • C. Ruffert, M. Feldmann, S. Büttgenbach, H.H. Gatzen (2006): Fabrication of Functional Components forEelectromagnetic MicroactuatorsMicrosystem Technologies, Springer Verlag Berlin Heidelberg New York, Vol. 12, No.7, pp. 670-675
  • C. Ruffert, R. Gehrking, B. Ponick, H.H. Gatzen (2006): Magnetic Levitation Assisted Guide for a Linear MicroactuatorIEEE Trans. on Magn., Vol. 42, No. 11, pp. 3785-3787
  • D. Dinulovic, D. Hermann, J. Flügge, H.H. Gatzen (2006): Development of a Linear Micro Inductosyn SensorIEEE Trans. on Magn., Vol. 42, No. 10, pp. 2830-2832
  • D. Dinulovic, H.H. Gatzen (2006): Microfabricated Inductive Micropositioning Sensor for Measurement of a Linear MovementIEEE Sensors Journal, Vol. 6, No. 6, pp. 1482-1487
  • M. Bedenbecker, H.H. Gatzen (2006): Electroplated CoFe Thin Films for Electromagnetic MicroactuatorsMMM 2005, San Jose, CA, USA, Journal of Applied Physics, Vol. 99, 08M308
  • M. Bedenbecker, R. Bandorf, H. Lüthje, G. Bräuer, H.H. Gatzen (2006): Development and Fabrication of Magnetic Thin FilmsMicrosystem Technologies, Springer Verlag Berlin Heidelberg New York, Vol. 12, No.7, pp. 655-658
  • M. Hahn, R. Gehrking, B. Ponick, H.H. Gatzen (2006): Design Improvements for a Linear Hybrid Step Micro-actuatorMicrosystem Technologies, Springer Verlag Berlin Heidelberg New York, Vol. 12, No.7, pp. 646-649
  • M. Wurz, C. Ruffert, Z. Mrowka, S. Knappmann, H.H. Gatzen (2006): Fabrication of a Micro Coil for Magneto-Optical Data StorageIEEE Trans. on Magn., Vol. 42, No. 10, pp. 2468-2470
  • R. Bandorf, R. Küster, C. Henke, H. Lüthje, J.-H. Sick, C. Neumeister, A. Phataralaoha, S. Büttgenbach, H.H. Gatzen, G. Bräuer (2006): Tribology of MicrosystemsMicrosystem Technologies, Springer Verlag Berlin Heidelberg New York, Vol. 12, No.7, pp. 680-684
  • T. Budde, H.H. Gatzen (2006): Thin Film SmCo Magnets for use in Electromagnetic MicroactuatorsMMM 2005, San Jose, CA, USA, Journal of Applied Physics, Vol. 99, 08N304
  • H.H. Gatzen, C. Morsbach (2005): Magnetische Werkstoffe in Mikrosystemenwt Werkstofftechnik-online, Jahrgang 94, H. 11/12, S. 631-635
  • H.H. Gatzen, N. Münter, B. Ma, C. Morsbach (2005): Thermal Sensor for In-situ Flying Height Measurements of Optical Flying HeadsTribology International 38, pp. 594-598
  • H.H. Gatzen, S. Knappmann, C. Neumeister, J. Mössner, Z. Mrowka, C. Morsbach (2005): Thermo-resistive Flight Attitude Measurements of Flying Heads in Near Field Magneto-optical Data StorageIEEE Trans. on Magn. Vol. 41, No. 10, pp. 2863-2865
  • L. Zhou, M. Beck, H. H. Gatzen, K. Altshuler, F. E. Talke (2005): Slider Vibration Reduction Using Slider Surface Texture.Microsystem Technologies, Vol. 11, No. 8-10, pp. 857-866
  • A. Ben Amor, C. Ruffert, S. Knappmann, H.H. Gatzen (2004): Write heads with a micro coil for magneto-optical data storageIEEE Trans. on Magn. Vol. 40, No. 4, pp. 3207-3210
  • R. Bandorf, H. Lüthje, K. Schiffmann, M. Beck, H.H. Gatzen, M. Schmidt, S. Büttgenbach, G. Bräuer (2004): Submicron coatings for micro-tribological applicationsMicrosystem Technologies, Springer Verlag Berlin Heidelberg New York, Vol. 10, No. 3, pp. 223-226
  • S. Seidemann, T. Kohlmeier, M. Föhse, H.H. Gatzen, S. Büttgenbach (2004): High Aspect Ratio Spiral and Meander Micro Coils for Actuator ApplicationsHARMST 2003, Monterey, CA, USA, Microsystem Technologies Vol. 10, No. 6-7, pp. 564-567
  • S.B. Wiendl, W.-R. Zabel, H.H. Gatzen, G. Poll (2004): The Influence of Boundary Layer Properties on Grease Lubricated High-Speed Ball Bearing PerformanceTransient Processes in Tribology, Tribology Series, 43, Elsevier, Amsterdam, Netherlands, pp. 441-447
  • T. Budde, H.H. Gatzen (2004): Magnetic Properties of an SmCo/NiFe System for Magnetic MicroactuatorsJournal of Magnetism and Magnetic Materials, Vol. 272-276, Part 3
  • T. Budde, M. Föhse, B. Majjer, H. Lüthje, G. Bräuer, H.H. Gatzen (2004): An Investigation on Technologies to Fabricate Magnetic Microcomponents for Miniaturized Actuator SystemsMicrosystem Technologies, Springer Verlag Berlin Heidelberg New York, Vol.10, No. 3, pp. 237-240
  • W.-R Zabel, S.B. Wiendl, H.H. Gatzen, G. Poll (2004): Einfluss von Antioxidantien auf die Schmierfettgebrauchsdauer in schnelllaufenden WälzlagernMineralöltechnik, Band 49, Heft 7, Hohenheim, Deutschland, S. 1-18
  • C. Kourouklis, T. Kohlmeier, H.H. Gatzen (2003): The Application of Chemical-Mechanical Polishing for Planarizing a SU-8/Permalloy Combination Used in MEMS DevicesSensors & Actuators A: Physical, Vol. 106, No. 1-3, pp. 268-271
  • C. Morsbach, C. Dubarry, M. Gabriel, M. Hoyer, S. Knappmann, F. Piazza, J. Robertson, R. Vullers, H.H. Gatzen (2003): Flyable Media for Slider Based Ultra High Density Optical RecordingIEE Proc. Science, Measurement and Technology, Vol. 150, No. 5, pp. 203-206
  • H.H. Gatzen, C. Morsbach, C. Kourouklis (2003): Chemical-mechanical Planarization of a SU-8/Copper combination for MEMSProc. ASPE 18th Ann. Meet. 2003, Portland, Oregon, USA, Sensors & Actuators A: Physical, Vol. 106, No. 1-3, pp. 268-271
  • H.H. Gatzen, M. Beck (2003): Wear of Single Crystal Silicon as a Function of Surface RoughnessWear, Vol. 254, No. 9, pp. 907-910
  • H.H. Gatzen, M. Beck (2003): Investigations on the Friction Force Anisotropy of the Silicon LatticeWear, Vol. 254, No. 11, pp. 1122-1126
  • H.H. Gatzen, M. Beck (2003): Triological Investigation of Micromachined Silicon SlidersTribology Int., Vol. 36, No. 4-6, pp. 279-283
  • L. Zhou, M. Beck, H.H. Gatzen, K. Altshuler, and F. E. Talke (2003): Dynamics of Textured Pico-Sliders during Contact Start/StopIEEE Trans. on Magn., Vol. 39, No.5, pp. 2426-2428
  • C. Becker, A. Bartos, H.H. Gatzen (2002): Exchange Biasing of Oxidized NiFe 81/19IEEE Trans. on Magn. Vol. 38, No. 5, pp. 2770-2772
  • C. Morsbach, R. Golloch, U. Kessen, G.P. Merker, H.H. Gatzen (2002): Messen in anderen Dimensionen - Entwicklung, Fertigung und Erprobung eines induktiven Miniatur-AbstandssensorsF&M Messtechnik, Carl Hanser, Munich, Vol. 110, No. 5, pp. 36-40
  • H.H. Gatzen, E. Andreeva, H. Iswahjudi (2002): Eddy Current Microsensor Based on Thin - film TechnologyIEEE Trans. on Magn., Vol. 38, No. 5, pp. 3368-3370
  • J. Edler, M. Föhse, H.D. Stölting, H.H. Gatzen (2002): A Linear Microactuator with Enhanced DesignMicrosystem Technologies, Springer Verlag Berlin Heidelberg New York, Vol. 7, No.5-6, pp. 261-264
  • L. Zhou, M. Beck, H.H. Gatzen, K. Kato, G. Vurens, F. E. Talke (2002): Tribology of Textured Sliders in Near Contact SituationsIEEE Trans. on Magn., Vol. 38, No. 5, pp. 2159-2161
  • T. Budde, H.H. Gatzen (2002): Patterned Sputter Deposited SmCo-Films for MEMS ApplicationsJournal of Magnetism and Magn. Mat., Vol. 242-245
  • T. Kohlmeier, H.H. Gatzen (2002): Challenges in Using Photosensitive Embedding Material to Planarize Multi-layer Coils for Actuator SystemsJournal of Magnetism and Magn. Mat., Vol. 242-245, pp. 1149-1152
  • T. Kohlmeier, V. Seidemann, S. Büttgenbach H.H. Gatzen (2002): Application of UV Depth Lithography and 3D-Microforming for High Aspect Ratio Electromagnetic Microactuator ComponentsMicrosystem Technologies, Springer Verlag Berlin Heidelberg New York, Vol. 8, No.4-5, pp. 304-307
  • H.H. Gatzen (2001): Dicing Challenges in Microelectronics and Micro Electro-Mechanical Systems (MEMS)Microsystem Technologies Vol. 7, pp. 151-154
  • J. Edler, M. Föhse, H.-D. Stölting, H.H. Gatzen (2001): Elektromagnetischer MikrolinearmotorInnovative Klein- und Mikroantriebe 2001 (Innovative Miniature and Micro Drives), GMM-Fachbericht 33, VDE-Verlag, Mainz, S.117-121
  • M. Föhse, T. Kohlmeier, H.H. Gatzen (2001): Thinfilm Technologies to Fabricate a Linear MicroactuatorSensors and Actuators A91, No. 1-2, pp. 145-149
  • H.H. Gatzen (2000): Rigid Disk Slider Micromachining Challenges to Meet Microtribology NeedsInvited paper, Tribology International, Vol. 33, pp. 347-342
  • H.H. Gatzen, C. Morsbach, J. Zeadan: (2000): Diamond Wear during Precision Grinding of Brittle MaterialsAdvances in Abrasive Technology III, 2000, Soc. of Grinding Engineers, Tokyo, Japan
  • H.H. Gatzen (1999): Anwendung der Mikrotechnologie in der MesstechnikTechnisches Messen, Band 66, Heft 12, S. 476-484
  • H.H. Gatzen (1999): Fabrication Considerations when Dicing Silicon WafersMaterials Mechanics-Fracture Mechanics-Micromechanics 1999, Fraunhofer Institute for Reliability and Microintegration, Berlin
  • H.H. Gatzen, C. Morsbach, H. Siekmann, J. Zeadan (1998): Slicing Induced ABS Cambering in Thin Film PicoslidersIEEE Trans. on Magn., Vol. 35, No. 5, pp. 2427-2429
  • H.H. Gatzen, M.S. Schwabe (1998): Dual Stripe Sensor on a Picoslider for In-Contact Thermal Asperity TestingIEEE Trans. on Magn., Vol. 34, No. 4, pp. 1702-1704
  • L. Rissing, S.A. Zielke, H.H. Gatzen (1998): Inductive Microtransformer Exploiting the Magnetoelastic EffectIEEE Trans. on Magn. Vol. 34, No. 4, pp. 1378-1380
  • H.H. Gatzen, J.C. Mätzig (1996): Nanogrinding Proc. ASPE 11th Ann. Meet. 1996, Monterey, California, USA, and J. of the American Society for Precision Engineering, Vol. 21, pp. 134-139
  • H.H. Gatzen, J.C. Mätzig, M.K. Schwabe (1996): Precision Machining of Rigid Disk Head SlidersInvited paper, IEEE Trans. on Magn., Vol. 32, No. 3, pp. 1843-1849
  • H.H. Gatzen, X. Ma, M. Scherge, M.S. Jhon, C.L. Bauer (1996): Observations Regarding the Tribological Properties of SiC Sliders Compared to ALTiC SlidersIEEE Trans. on Magn., Vol. 32, No. 5, pp. 3783-3785
  • H.H. Gatzen (1980): Technologie der Schreib-Lese-Köpfe für digitale Magnetschichtspeicher (Technology of Read/Write Heads for Digital Magnetic Storage Devices)Proc. Constronic '80, Budapest, Ungarn, pp. 197-207
  • H.H. Gatzen (1980): Theoretische Ermittlung des Kopfprofils eines Schreib-Lese-Kopfes für Magnetbandspeicher mit hoher Bandgeschwindigkeit. (A Theoretical Approach to determine the Head Profile of a Read/Write Head for High Speed Tape Drives)Feinwerktechnik No. 7, pp. 361-364
  • H.H. Gatzen (1980): Schreib-Leseköpfe für Magnetplattenspeicher in konventioneller und Dünnfilm-Technologie. Ein Vergleich in Aufbau, Wirkungsweise und Leistungsmerkmalen (Read/Write Heads for Magnetic Disk Files in Conventional and Thin-Film Technology. A Comparison of Design, Principle, and Specification) Feinwerktechnik 2, pp. 53-59
  • H.H. Gatzen, W. Berghof (1980): Sputter Deposited Multilayer Thin-Film HeadIEEE Trans. on Magn., Vol. 16, No. 5, pp. 782-785
  • H.H. Gatzen (1979): Wandel in der Feinwerktechnik: Elektronik in klassischen Bereichen der Feinwerktechnik, Feinwerktechnik in der Elektronik (Changes in Precision Mechanics: Electronics in the Field of Precision Mechanics, Precision Mechanics in the Field of Electronics)Feinwerktechnik No. 8, pp. 357-364

Doktorarbeiten

  • H.H. Gatzen (1976): Bestimmung der Nutz- und Störbeschleunigungen bei Kurvengetrieben. (Determination of the Disturbing and Effective Accelerations in Cam Follower Systems)Dissertation, RWTH Aachen

Verschiedenes

  • B. Spasova, H.H. Gatzen (2010): Simulation of an Improved Microactuator with Discrete MSM ElementsMaterials Science Forum Vol. 635, pp. 181-186, Trans Tech Publications, Switzerland
  • A. Belski, H.H. Gatzen (2009): Magnetoelastic Carbon Fiber Micro Strain SensorIEEE Transaction on Magnetics, Vol. 45, Issue 10, pp. 4522-4525
  • B. Denkena, H.H. Gatzen, H. Kayapinar, F. Pape (2009): Design, Fabrication and Calibration of Capacitive Air Gap Sensors for Application in Levitation based Guides for Microactuators.Proc. IEEE Sensors 2009, Christchurch, New Zealand, pp. 1915-1918
  • D. Dinulovic, F. Pape, H. Saalfeld, W. Kurniawan, E. Obermeier, H.H. Gatzen (2009): Operating Range Optimization of a Slider with an Integrated Microactuator (SLIM) for Hard Disc DriversIEEE Transaction on Magnetics, Vol. 45, Issue 10, pp. 3769-3772
  • H. Saalfeld, D. Dinulovic, H.H. Gatzen (2009): Improved Fabrication of an Integrated Electromagnetic Second Stage Microactuator for a Hard Disk Recording HeadProc. (CD), ASME IMECE 2009, IMECE2009-11076, pp. 1-8, Lake Buena Vista, FL, USA
  • H.H. Gatzen, E. Flick (2008): Biomedizinische Anwendungen energieautarker MikrosystemeCD 2, Fachveranstaltung Energy Harvesting, Haus der Technik, Essen, Deutschland
  • H.H. Gatzen, F. Pape, C. Ruffert (2008): ANKOM-Projekt "ProfIS" - Professional Improvement by Study in Engineering SciencesHIS Hochschul-Informations-System GmbH, Forum Hochschule, ISSN 1863-5563, 13/2008, pp. 81-89
  • H.H. Gatzen, P. J. P. Freitas, E. Obermeier, J. Robertson (2008): Electromagnetic Second Stage Microactuator for a Hard Disc Recording HeadProc. Innovative Mass Storage Technology Workshop (IMST), Leuven, Belgium
  • I. Peshekhodov, F. Pape, K. B. Sidhu, H.H. Gatzen, B.-A. Behrens (2008): Investigation of a Thermoplastic Polyurethane Coating on Galvanized Sheet Steel with the Help of Numerical and Experimental NanoindentationProceedings (CD), Numisheet 2008, Interlaken, Switzerland

[nicht kategorisiert]

  • F. Pape, T. Creutzburg, and H.H Gatzen (2010): Qualification of Membranes for MEMS Applications Applying NanoindentationNanobrücken / Hysitron User Meeting, pp. 57-58, Saarbrücken, Germany, 2010