White Light Interferometry and Atomic Force Microscopy Grinding Tool Topography Measurements - A Comparison
| Kategorien |
Konferenz (reviewed) |
| Jahr | 1997 |
| Autorinnen/Autoren | H.H. Gatzen, J.C. Mätzig, L.P. Ruhbach |
| Veröffentlicht in | Proc. 4th Int. Conf. on Ultraprecision in Manufacturing Engineering 1997, Braunschweig, Germany |
