Institut für Mikroproduktionstechnik Forschung Publikationen
White Light Interferometry and Atomic Force Microscopy Grinding Tool Topography Measurements - A Comparison

White Light Interferometry and Atomic Force Microscopy Grinding Tool Topography Measurements - A Comparison

Kategorien Konferenz (reviewed)
Jahr 1997
Autorinnen/Autoren H.H. Gatzen, J.C. Mätzig, L.P. Ruhbach
Veröffentlicht in Proc. 4th Int. Conf. on Ultraprecision in Manufacturing Engineering 1997, Braunschweig, Germany