Optimization of Chemical Mechanical Polishing of Thin Silicon Wafers
| Kategorien |
Konferenz (reviewed) |
| Jahr | 2003 |
| Autoren | H.H. Gatzen, G. Günzel |
| Veröffentlicht in | Proc. euspen Int. Top. Conf. 2003, Aachen, Germany, Vol. 1, pp. 293-296 |
