Institut für Mikroproduktionstechnik Forschung Publikationen
Effect of Feed Rate and Grain Concentration on Ductile to Brittle Transition by Silicon Dicing

Effect of Feed Rate and Grain Concentration on Ductile to Brittle Transition by Silicon Dicing

Kategorien Konferenz (reviewed)
Jahr 2007
Autoren S. Cvetkovic, H.H. Gatzen
Veröffentlicht in Proc. EUSPEN 7th Int. Conf. 2007, Bremen, Germany, Vol. 2, pp. 380-383